The reactive sputtering of oxides and nitrides : Pure and Applied Chemistry

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Pure and Applied Chemistry

The Scientific Journal of IUPAC

Ed. by Burrows, Hugh / Weir, Ron / Stohner, Jürgen


IMPACT FACTOR 2014: 2.492
5-year IMPACT FACTOR: 3.202
Rank 51 out of 157 in category Chemistry, Multidisciplinary in the 2014 Thomson Reuters Journal Citation Report/Science Edition

SCImago Journal Rank (SJR) 2014: 1.012
Source Normalized Impact per Paper (SNIP) 2014: 1.187
Impact per Publication (IPP) 2014: 2.785

VolumeIssuePage

Issues

The reactive sputtering of oxides and nitrides

R. P. Howson

Conference

International Symposium on Plasma Chemistry, International Symposium on Plasma Chemistry, ISPC, Plasma Chemistry, Eleventh, Loughborough, UK, 1993-08-22–1993-08-27

Citation Information: Pure and Applied Chemistry. Volume 66, Issue 6, Pages 1311–1318, ISSN (Online) 1365-3075, ISSN (Print) 0033-4545, DOI: 10.1351/pac199466061311, January 2009

Publication History

Published Online:
2009-01-01

Citing Articles

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[1]
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Surface and Coatings Technology, 2013, Volume 227, Page 38
[2]
Jan Kischkat, Sven Peters, Bernd Gruska, Mykhaylo Semtsiv, Mikaela Chashnikova, Matthias Klinkmüller, Oliana Fedosenko, Stephan Machulik, Anna Aleksandrova, Gregorii Monastyrskyi, Yuri Flores, and W. Ted Masselink
Applied Optics, 2012, Volume 51, Number 28, Page 6789
[3]
M Ghanashyam Krishna and A.K. Bhattacharya
Vacuum, 1997, Volume 48, Number 10, Page 879
[4]
R.P. Howson
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1997, Volume 121, Number 1-4, Page 65
[5]
R.P. Howson, N. Danson, and G.W. Hall
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1997, Volume 121, Number 1-4, Page 90
[7]
R. P. HOWSON
ChemInform, 2010, Volume 25, Number 52, Page no

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