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Pure and Applied Chemistry

The Scientific Journal of IUPAC

Ed. by Burrows, Hugh / Weir, Ron / Stohner, Jürgen


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The reactive sputtering of oxides and nitrides

R. P. Howson

Conference

International Symposium on Plasma Chemistry, International Symposium on Plasma Chemistry, ISPC, Plasma Chemistry, Eleventh, Loughborough, UK, 1993-08-22–1993-08-27

Citation Information: Pure and Applied Chemistry. Volume 66, Issue 6, Pages 1311–1318, ISSN (Online) 1365-3075, ISSN (Print) 0033-4545, DOI: 10.1351/pac199466061311, January 2009

Publication History

Published Online:
2009-01-01

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