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tm - Technisches Messen

Plattform für Methoden, Systeme und Anwendungen der Messtechnik

[TM - Technical Measurement: A Platform for Methods, Systems, and Applications of Measurement Technology
]

Editor-in-Chief: Puente León, Fernando / Zagar, Bernhard


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Chirp-Kalibriernormale für Oberflächenmessgeräte (Chirp Calibration Standards for Surface Measuring Instruments)

Rolf Krüger-Sehm / Peter Bakucz / Lena Jung / Harald Wilhelms

Citation Information: tm - Technisches Messen. Volume 74, Issue 11, Pages 572–576, ISSN (Print) 0171-8096, DOI: 10.1524/teme.2007.74.11.572, September 2009

Publication History

Published Online:
2009-09-25

In diesem Beitrag wird ein „Chirp”-Oberflächennormal vorgestellt. Es ist dafür vorgesehen, mit einer Serie von verschiedenen Ortsfrequenzen das Übertragungsverhalten von Oberflächenmessgeräten zu testen. Die Topografie des Normals enthält eine abgestufte Folge von Sinuswellen, deren Abstände, Steigungen und Krümmungen durch den Synthese- und Fertigungsprozess genau bekannt sind. Die Oberfläche des Normals wird durch einen Diamant-Drehprozess hergestellt. Bei der Erzeugung der NC-Steuerdaten wird mittels morphologischer Operationen der Einfluss der Werkzeuggeometrie berücksichtigt. Erste Ergebnisse von Messungen am Chirp-Normal mit Interferenzmikroskopen und Tastschnittgeräten werden gezeigt.

In this article a chirp-calibration standard is presented. It is intended to test the function transfer of surface measuring instruments by a series of different space scaled frequencies. The standard contains a sequence of sinusoidal waves, the distance, slopes and curvatures of which are well known from the design and the manufacturing process. The surface of the specimen is manufactured by a single diamond turning process. The control data take into account the influence of the cutting tool by morphological operations. First results of measurements on the chirp standard by both a contact stylus instrument and an interference microscope are presented.

Keywords: measurement standard; contact stylus instrument; interference microscope; confocal microscope

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