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Zeitschrift für Kristallographie - Crystalline Materials

Ed. by Antipov, Evgeny / Bismayer, Ulrich / Huppertz, Hubert / Petrícek, Václav / Pöttgen, Rainer / Schmahl, Wolfgang / Tiekink, E. R. T. / Zou, Xiaodong

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X-ray computed tomography in Zernike phase contrast mode at 8 keV with 50-nm resolution using Cu rotating anode X-ray source

Andrei Tkachuk / Fred Duewer / Hongtao Cui / Michael Feser / Steve Wang / Wenbing Yun

Citation Information: Zeitschrift für Kristallographie. Volume 222, Issue 11/2007, Pages 650–655, ISSN (Print) 0044-2968, DOI: 10.1524/zkri.2007.222.11.650, September 2009

Publication History

Published Online:

High-resolution X-ray computed tomography (XCT) enables nondestructive 3D imaging of complex structures, regardless of their state of crystallinity. This work describes a sub-50 nm resolution XCT system operating at 8 keV in absorption and Zernike phase contrast modes based on a commercially available Cu rotating anode laboratory X-ray source. The system utilizes a high efficiency reflective capillary condenser lens and high-resolution Fresnel zone plates with an outermost zone width of 35 nm and 700 nm structure height resulting in a spatial resolution better than 50 nm currently. Imaging a fragment of the solid oxide fuel cells (SOFC) with 50 nm resolution is presented as an application example of the XCT technique in materials science and nanotechnology.

Keywords: X-ray microscopy; Computed tomography; Fresnel zone plate; SOFC; Fuel cell; Nanotechnology

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