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Comparison of processing parameter effects during magnetron sputtering and electrochemical anodization of TiO2 nanotubes on ITO/glass and glass substrates

  • Emine Başalan

    Emine Başalan, born in 1990, studied Metallurgical and Material Engineering and received an M.Sc. at Dokuz Eylül University with a focus on Nanoscience and Nanoengineering in 2014. Since 2017, she has been a PhD student at Dokuz Eylül University, Department of Metallurgical and Materials Engineering and has been working on a new generation of composite materials. In the meantime, she is working at the Olgun Çelik R&D Center as R&D Engineer.

    , Mustafa Erol

    Assoc. Prof. Dr. Mustafa Erol was born in 1983. He graduated from Dokuz Eylul University in 2007 with a Bachelor’s degree in Metallurgical and Materials Engineering. He received his MSc and PhD degrees at Dokuz Eylul University in Metallurgical and Materials Engineering in 2009 and 2014, respectively. He has been working as an Associated Professor in the Department of Metallurgical and Materials Engineering at Dokuz Eylul University in Izmir. His area of research is as follows: heat releasing materials, semiconducting and functional materials, photocatalysis, and nanomaterials.

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    , Orkut Sancakoğlu

    Dr. Orkut Sancakoğlu was born in 1985, He finished his B.Sc. degree at Dokuz Eylül University Metallurgy and Materials Engineering Department, graduating in 2007, and completing his M.Sc. thesis with a project “The co-deposition of metal films with ceramic nano particles”. Subsequently, he completed his Ph.D. research on the topic “Electrolytic co-deposition of carbon nanoparticles with metals, improvement of corrosive and mechanical properties”. In addition, during these years, in addition to metallic coatings, he focused on several studies involving materials used for sensor applications as well as the production, characterization and applications of photocatalytic surfaces.

    , Tuncay Dikici

    Assoc. Prof. Dr. Tuncay Dikici was born in 1983. He graduated from Selcuk University in 2005 with Degree in Mechanical Engineering. He was awarded his Ph.D degree in the Department of Metallurgical and Material Engineering, Dokuz Eylül University, (2016). He works as a Lecturer at the Vocational School. He also works on nanotechnology, surface treatments, bio-materials, materials characterization and thin films.

    and Erdal Çelik

    Prof. Dr. Erdal Celik was born in 1967. He graduated from Istanbul Technical University in 1993 with a degree in Metallurgical and Materials Engineering. He is now Director of the Center for Fabrication and Applications of Electronic Materials and works as a Professor at Dokuz Eylul University. He also works on nanotechnology, production techniques, electronic materials, materials characterization and thin films.

From the journal Materials Testing

Abstract

Titanium thin films were deposited on glass and indium tin oxide (ITO) coated glass substrates by radio-frequency (RF) magnetron sputtering under varying sputtering parameters as: power, pressure, substrate temperature and target-substrate distance. The crystalline structure, crystallite size and texture coefficients of the films were evaluated in detail. As the evaluation points out, 100 W, 1.33 Pa ambient temperature and 70 mm were determined as the optimum sputtering parameters for intended crystalline structures. Subsequently, electrochemical anodization experiments were performed via varied electrolytes and under various anodization parameters (voltage, time and electrolyte type) in a two-electrode electrochemical cell using the films obtained through the optimized sputtering parameters. The anodized samples were annealed at 450 °C for 1 h in air in order to obtain anatase transformation and the desired crystalline structure. The surface morphologies and the crystalline structures of the anodized films were evaluated through x-ray diffractometer (XRD) and scanning electron microscope (SEM), respectively. Finally, the anodization parameters for the formation of TiO2 nanotube arrays were determined as: 35 V and 35 min. in an electrolyte composed of 0.3 wt.-% NH4F – 2 wt.-% water – ethylene glycol.


Assoc. Prof. Dr. Mustafa Erol Department of Metallurgical and Materials Engineering, Dokuz Eylul University Tinaztepe Campus 35390, Buca-Izmir/Turkey

About the authors

Emine Başalan

Emine Başalan, born in 1990, studied Metallurgical and Material Engineering and received an M.Sc. at Dokuz Eylül University with a focus on Nanoscience and Nanoengineering in 2014. Since 2017, she has been a PhD student at Dokuz Eylül University, Department of Metallurgical and Materials Engineering and has been working on a new generation of composite materials. In the meantime, she is working at the Olgun Çelik R&D Center as R&D Engineer.

Assoc. Prof. Dr. Mustafa Erol

Assoc. Prof. Dr. Mustafa Erol was born in 1983. He graduated from Dokuz Eylul University in 2007 with a Bachelor’s degree in Metallurgical and Materials Engineering. He received his MSc and PhD degrees at Dokuz Eylul University in Metallurgical and Materials Engineering in 2009 and 2014, respectively. He has been working as an Associated Professor in the Department of Metallurgical and Materials Engineering at Dokuz Eylul University in Izmir. His area of research is as follows: heat releasing materials, semiconducting and functional materials, photocatalysis, and nanomaterials.

Dr. Orkut Sancakoğlu

Dr. Orkut Sancakoğlu was born in 1985, He finished his B.Sc. degree at Dokuz Eylül University Metallurgy and Materials Engineering Department, graduating in 2007, and completing his M.Sc. thesis with a project “The co-deposition of metal films with ceramic nano particles”. Subsequently, he completed his Ph.D. research on the topic “Electrolytic co-deposition of carbon nanoparticles with metals, improvement of corrosive and mechanical properties”. In addition, during these years, in addition to metallic coatings, he focused on several studies involving materials used for sensor applications as well as the production, characterization and applications of photocatalytic surfaces.

Assoc. Prof. Dr. Tuncay Dikici

Assoc. Prof. Dr. Tuncay Dikici was born in 1983. He graduated from Selcuk University in 2005 with Degree in Mechanical Engineering. He was awarded his Ph.D degree in the Department of Metallurgical and Material Engineering, Dokuz Eylül University, (2016). He works as a Lecturer at the Vocational School. He also works on nanotechnology, surface treatments, bio-materials, materials characterization and thin films.

Prof. Dr. Erdal Çelik

Prof. Dr. Erdal Celik was born in 1967. He graduated from Istanbul Technical University in 1993 with a degree in Metallurgical and Materials Engineering. He is now Director of the Center for Fabrication and Applications of Electronic Materials and works as a Professor at Dokuz Eylul University. He also works on nanotechnology, production techniques, electronic materials, materials characterization and thin films.

Acknowledgment

This study was financially supported by TUBITAK with the project code 115M151. The authors are indebted to the infrastructural support from Dokuz Eylül University, the Center for Production and Applications of Electronic Materials (EMUM) and İzmir Katip Çelebi University Central Research Laboratories (IKCU-MERLAB) where the research was carried out.

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Published Online: 2021-03-31

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