Abstract
Defects in optical coatings are a major factor degrading their performance. Based on the nature of defects, we classified them into two categories: visible defects and non-visible defects. Visible defects result from the replication of substrate imperfections or particulates within the coatings by subsequent layers and can increase scattering loss, produce critical errors in extreme ultraviolet lithography, weaken mechanical and environmental stability, and reduce laser damage resistance. Non-visible defects mainly involve a decrease in laser damage resistance but typically have no influence on other properties of optical coatings. In the case of widely used HfO2/SiO2 dielectric coatings, metallic Hf nano-clusters, off-stoichiometric HfO2 nano-clusters, or areas of high-density electronic defects have been postulated as possible sources for non-visible defects. The emphasis of this review is devoted to discussing localized defect-driven laser-induced damage (LID) in optical coatings used for nanosecond-scale pulsed laser applications, but consideration is also given to other properties of optical coatings such as scattering, environmental stability, etc. The low densities and diverse properties of defects make the systematic study of LID initiating from localized defects time-consuming and very challenging. Experimental and theoretical studies of localized defect-driven LID using artificial defects whose properties can be well controlled are highlighted.
About the authors
Xinbin Cheng received his PhD in 2008 from the Tongji University. He is an Associate Professor of Optics at Tongji University. Since 2010, he heads the group ‘High Power Laser Coatings’ in the Institute of Precision Optical Engineering of Tongji University. His research interests comprise XUV multilayers, high power laser coatings, and nanometrological standards.
Zhanshan Wang received his PhD in 1996 from the Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences. He is a Professor of Optics at Tongji University. He acts as the Director of the Institute of Precision Optical Engineering and an Executive Deputy Director of the Advanced Institute of Technology at Tongji University. He is mainly engaged in the research of the micro-imaging system in XUV to infrared range, and in the research of the design, fabrication, and characterization of multilayer optical elements in XUV to visible regions.
This work was partly supported by the National Natural Science Foundation of China (grant numbers 61235011, 61008030, 61108014, 61205124). The authors are grateful to our colleagues for their support and Norbert Kaiser for the invitation to write this review.
References
[1] G. Kolodnyi, V. Azarova, Y. Golyaev, A. Melnikov, M. Rasyov, et al., Proc. SPIE 3738, 446 (1999).Search in Google Scholar
[2] T. Accadia, F. Acernese, F. Antonucci, P. Astone, G. Ballardin, et al., Astroparticle Phys. 34, 521–527 (2011).Search in Google Scholar
[3] S. Maure, G. Albrand and C. Amra, Appl. Optics 35, 5573–5582 (1996).Search in Google Scholar
[4] D. G. Stearns, P. B. Mirkarimi and E. Spiller, Thin Solid Films 446, 37–49 (2009).10.1016/S0040-6090(03)01285-9Search in Google Scholar
[5] D. P. Zhang, J. D. Shao, H. J. Qi, M. Fang, K. Yi, et al., Opt. Laser Technol. 38, 654–657 (2006).Search in Google Scholar
[6] C. J. Stolz, Proc. SPIE 6834, 683402 (2007).Search in Google Scholar
[7] D. Besnard, Eur. Phys. J. D 44, 207 (2007).10.1140/epjd/e2006-00165-4Search in Google Scholar
[8] H. W. Yu, F. G. Jing, X. F. Wei, W. G. Zheng, X. M. Zhang, et al., Proc. SPIE 7131, 713112 (2009).Search in Google Scholar
[9] A. M. Ledger, Appl. Opt. 18, 2979–2989 (1979).Search in Google Scholar
[10] K. H. Guenther, Appl. Opt. 20, 1034–1038 (1981).Search in Google Scholar
[11] M. J. Brett, R. N. Tait, S. K. Dew, S. Kamasz and A. H. Labun, J. Mater. Sci. Mater. 3, 64 (1992).Search in Google Scholar
[12] C. J. Stolz, L. M. Sheehan, M. K. Gunten, R. P. Bevis and D. J. Smith, Proc. SPIE 2714, 374 (1999).Search in Google Scholar
[13] L. Dubost, A. Rhallabi, J. Perrin and J. Schmitt, J. Appl. Phys. 78, 3784 (1995).Search in Google Scholar
[14] S. A. Letts, D. W. Myers and L. A. Witt, J. Vac. Sci. Technol. 19, 739 (1981).Search in Google Scholar
[15] X. B. Cheng, Z. X. Shen, H. F. Jiao, J. L. Zhang, B. Ma, et al., Appl. Opt. 50, C357–C363 (2011).10.1364/AO.50.00C357Search in Google Scholar
[16] X. F. Liu, D. W. Li, Y. A. Zhao and X. Li, Appl. Opt. 49, 1774–1779 (2010).Search in Google Scholar
[17] X. B. Cheng, T. Ding, W. Y. He, J. L. Zhang, H. F. Jiao, et al., Proc. SPIE 8190, 819002 (2011).Search in Google Scholar
[18] B. J. Liao, D. J. Smith and B. McIntyre, NBS SP 746, 305 (1987).Search in Google Scholar
[19] T. Suratwala, R. Steele, M. D. Feit, L. Wong, P. Miller, et al., J. Non-Cryst. Solids 354, 2023–2037 (2008).Search in Google Scholar
[20] M. Sugawara, I. Nishiyama, K. Motal and J. Cullins, Jpn. J. Appl. Phys. 45, 9044–9052 (2006).10.1143/JJAP.45.9044Search in Google Scholar
[21] S. R. Qiu, J. E. Wolfe, A. M. Monterrosa, W. A. Steele, N. E. Teslich, et al., Proc. SPIE 7842, 78421X-1 (2010).Search in Google Scholar
[22] M. C. Staggs, M. R. Kozlowski, W.J. Siekhaus and M. Balooch, Proc. SPIE 1848, 234 (1992).Search in Google Scholar
[23] A. Bodemann, N. Kaiser, M. Kozlowski, E. Pierce and C. Stolz, Proc. SPIE 2714, 395 (1996).Search in Google Scholar
[24] M. Poulingue, J. Dijon, B. Rafin, H. Leplan and M. Ignat, Proc. SPIE 3738, 325 (1999).Search in Google Scholar
[25] C. Y. Wei, K. Yi, Z. X. Fan and J. D. Shao, Appl. Opt. 51, 6781–6788 (2012).Search in Google Scholar
[26] J. Dijon, M. Poulingue and J. Hue, Proc. SPIE 3578, 387 (1998).Search in Google Scholar
[27] M. Poulingue, M. Ignat and J. Dijon, Thin Solid Films 348, 215–221 (1999).10.1016/S0040-6090(99)00137-6Search in Google Scholar
[28] J. K. Murphy, Proc. SPIE 246, 64 (1980).Search in Google Scholar
[29] J. F. DeFord and M. R. Kozlowski, Proc. SPIE 1848, 455 (1993).Search in Google Scholar
[30] C. J. Stolz, F. Y. Génina and T. V. Pistor, Proc. SPIE 5273, 41 (2004).Search in Google Scholar
[31] C. J. Stolz, M. D. Feit and T. V. Pistor, Appl. Opt. 45, 1594–1601 (2006).Search in Google Scholar
[32] C. J. Stolz, M. D. Feit and T. V. Pistor, Appl. Opt. 47, C162–C166 (2008).10.1364/AO.47.00C162Search in Google Scholar
[33] V. E. Gruzdev and A. S. Gruzdeva, Proc. SPIE 3263, 169 (1998).Search in Google Scholar
[34] Y. G. Shan, H. B. He, C. Y. Wei, S. H. Li, M. Zhou, et al., Appl. Opt. 49, 4290–4295 (2010).Search in Google Scholar
[35] X. B. Cheng, J. L. Zhang, T. Ding, Z. Y. Wei, H. Q. Li, et al., Light Sci. Appl. 2, e80 (2013).10.1038/lsa.2013.36Search in Google Scholar
[36] J. M. Bennett, Proc. SPIE 5273, 195 (2004).10.1017/S1743921304008658Search in Google Scholar
[37] Z. X. Shen, T. Ding, X. W. Ye, X. D. Wang and B. Ma, Appl. Opt. 50, C433–C440 (2011).10.1364/AO.50.00C433Search in Google Scholar PubMed
[38] A. L. Rigatti, Proc. SPIE 5647, 136 (2005).10.1017/S1752756200010474Search in Google Scholar
[39] M. R. Kozlowski and R. Chow, Proc. SPIE 2114, 640 (1994).Search in Google Scholar
[40] C. J. Stolz, L. M. Sheehan, M. K. Gunten, R. P. Bevis and D. J. Smith, Proc. SPIE 3738, 318 (1999).Search in Google Scholar
[41] R. Chow and N. Tsujimoto, Appl. Opt. 35, 5095–5101 (1996).Search in Google Scholar
[42] N. Wang, J. D. Shao, K. Yi and C. Y. Wei, Chin. Opt. Lett. 8, 621 (2010).Search in Google Scholar
[43] J. E. Wolfe, C. J. Stolz and S. Falabella, Opt. Interf. Coat. Techn. Digest FA.2 (2013).Search in Google Scholar
[44] C. J. Stolz, J. E. Wolfe, P. B. Mirkarimi, J. A. Folta, J. J. Adams, et al., Opt. Interf. Coat. Techn. Digest FA.1 (2013).Search in Google Scholar
[45] H. Bercegol, Proc. SPIE 3578, 421 (1999).Search in Google Scholar
[46] Y. G. Shan, H. B. He, Y. Wang, X. Li, D. W. Li, et al., Opt. Commun. 284, 625–629 (2011).Search in Google Scholar
[47] P. E. Miller, J. D. Bude, T. I. Suratwala, N. Shen, T. A. Laurence, et al., Opt. Lett. 35, 2702–2704 (2010).Search in Google Scholar
[48] T. I. Suratwala, P. E. Miller, J. D. Bude, W. A. Steele and N. Shen, J. Am. Ceram. Soc. 94, 416–428 (2011).Search in Google Scholar
[49] J. D. Barrie, P. D. Fuqua, B. L. Jones and N. Presser, Thin Solid Films 447, 1–6 (2004).Search in Google Scholar
[50] C. Amra, C. Grézes-Besset and L. Bruel, Appl. Opt. 32, 5492–5503 (1993).10.1364/AO.32.005492Search in Google Scholar PubMed
[51] C. Amra, J. H. Apfel and E. Pelletier, Appl. Opt. 31, 3134–3151 (1992).10.1364/AO.31.003134Search in Google Scholar PubMed
[52] E. L. Church, H. A. Jenkinson and J. M. Zavada, Opt. Eng. 18, 125 (1979).Search in Google Scholar
[53] J. Stover, ‘Optical Scattering – Measurement and Analysis’, 2nd ed. (SPIE, Washington, 1995).10.1117/3.203079Search in Google Scholar
[54] M. Trost, S. Schröder, T. Feigl and A. Duparré, Appl. Opt. 50, C148–C153 (2011).10.1364/AO.50.00C148Search in Google Scholar PubMed
[55] J. M. Elson, J. P. Rahn and J. M. Bennett, Appl. Opt. 19, 669–679 (1980).Search in Google Scholar
[56] P. Bousquet, F. Flory and P. Roche, JOSA 71, 1115–1123 (1981).10.1364/JOSA.71.001115Search in Google Scholar
[57] A. Duparré, in ‘Encyclopedia of Modern Optics’, Ed. by B. D. Guenther, D. G. Steel and L. Bayvel (Elsevier, Amsterdam, 2004) pp. 314–320.10.1016/B0-12-369395-0/00875-7Search in Google Scholar
[58] S. Schröder, T. Herffurth, H. Blaschke and A. Duparré, Appl. Opt. 50, C164–C171 (2011).10.1364/AO.50.00C164Search in Google Scholar PubMed
[59] R. P. Yang, Opt. Eng. 15, 516 (1976).Search in Google Scholar
[60] K. B. Nahm and W. L. Wolfe, Appl. Opt. 26, 2995–2999 (1987).Search in Google Scholar
[61] T. A. Germer, Appl. Opt. 36, 8798–8805 (1997).Search in Google Scholar
[62] J. C. Stover, V. Ivakhnenko and Y. A. Eremin, Proc. SPIE 4449, 131 (2001).Search in Google Scholar
[63] S. Schröder, M. Kamprath and A. Duparré, Proc. SPIE 5878, 232 (2005).Search in Google Scholar
[64] A. Okamoto, H. Kuniyasu and T. Hattori, IEEE Trans. Electr. Devices, 19, 372 (1999).Search in Google Scholar
[65] M. Zerrad, M. Lequime, C. Deumié and C. Amra, Proc. SPIE 7102, 710207-1 (2008).Search in Google Scholar
[66] T. Herffurth, S. Schröder, M. Trost, A. Duparré and A. Tünnermann, Appl. Opt. 52, 3279–3287 (2013).Search in Google Scholar
[67] J. B. Oliver, P. Kupinski, A. L. Rigatti, A. W. Schmid, J. C. Lambropoulos, et al., Opt. Express 20, 16596–16610 (2012).10.1364/OE.20.016596Search in Google Scholar
[68] S. Papernov, A. Tait, W. Bittle, A. W. Schmid, J. B. Oliver, et al., J. Appl. Phys. 109, 113106 (2011).Search in Google Scholar
[69] A. Ciapponi, F. R. Wagner, S. Palmier and J.-Y. Natoli, J. Lumin. 129, 1786–1789 (2009).10.1016/j.jlumin.2009.02.026Search in Google Scholar
[70] J.-Y. Natoli, L. Gallais, H. Akhouayri and C. Amra, Appl. Opt. 41, 3156–3166 (2002).Search in Google Scholar
[71] L. Jensen, S. Schrameyer, M. Jupé, H. Blaschke and D. Ristau, Proc. SPIE 7504, 75041E-1 (2009).Search in Google Scholar
[72] L. Gallais, J. Capoulade, J.-Y. Natoli and M. Commandré, J. Appl. Phys. 104, 053120 (2008).Search in Google Scholar
[73] J. Dijon, T. Poiroux and C. Desrumaux, Proc. SPIE 2966, 315 (1997).Search in Google Scholar
[74] J. Y. Natoli, L. Gallais, B. Bertussi, A. During, M. Commandré, et al., Opt. Express 11, 824–829 (2003).10.1364/OE.11.000824Search in Google Scholar PubMed
[75] X. B. Cheng, H. F. Jiao, J. L. Lu, B. Ma and Z. S. Wang, Opt. Express 21, 14867–14875 (2013).10.1364/OE.21.014867Search in Google Scholar PubMed
[76] S. Papernov and A. W. Schmid, Proc. SPIE 7132, 71321J-1 (2008).Search in Google Scholar
[77] S. Papernov and A. W. Schmid, J. Appl. Phys. 82, 5422 (1997).Search in Google Scholar
[78] M. D. Feit, L. W. Hrubesh, A. M. Rubenchik and J. N. Wong, Proc. SPIE 4347, 316 (2001).Search in Google Scholar
[79] S. Papernov, E. Shin, T. Murray, A. W. Schmid and J. B. Oliver, Proc. SPIE 8530, 85301H-1 (2012).Search in Google Scholar
[80] T. A. Laurence, J. D. Bude, N. Shen, T. Feldman, P. E. Miller, et al., Appl. Phys. Lett. 94, 151114 (2009).Search in Google Scholar
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