A new form measurement system based on subaperture stitching with a line-scanning interferometer

Sören Laubach 1 , Gerd Ehret 1 , Jörg Riebeling 2 ,  and Peter Lehmann 2
  • 1 Physikalisch-Technische Bundesanstalt, Bundesallee 100, 38116 Braunschweig, Germany
  • 2 Department of Electrical Engineering, University of Kassel, Wilhelmshöher Allee 71, 34121 Kassel, Germany
Sören Laubach, Gerd Ehret, Jörg Riebeling and Peter Lehmann


A new optical form measurement system for almost rotational symmetric surfaces has been set up. It is based on an interferometric line sensor applying sinusoidal path length modulation in combination with a movement system. With this system, ring-shaped subapertures of the specimens are measured. The system is especially suitable for measuring spheres and aspheres with a broad range of radii (r>50 mm). The individual subapertures are stitched together to yield the full 3D topography. Because the rotation of the specimen by more than 360° has to yield the same results, inherent consistency tests are possible. Example measurements of a sphere are shown and discussed. Reproducibility measurements for one ring scan performed with the system show a standard deviation of 14 nm. The system can be set up at a moderate price as off-the-shelf mechanical and optoelectronic devices can be used. Future improvements of the system are discussed.

  • [1]

    D. Malacara, Optical Shop Testing (Wiley-Interscience, John Wiley & Sons, Inc., 2007).

  • [2]

    M. Salleh, Q. Yang, and B. Jones, Finite Element Modeling and Simulation of Probe System, IMTC 2005 – Instrumentation and Measurement Technology Conference, Ottawa, Canada, 17–19 May 2005.

  • [3]

    F. Meli and A. Küng, Meas. Sci. Technol. 18, 074007 (2006).

  • [4]

    G. Berger and J. Petter, Techn. Mess. 81, 2–7 (2014).

  • [5]

    P. de Groot, Adv. Opt. Photon. 7, 1–65 (2015).

  • [6]

    D. Malacara, M. Servin and Z. Malacara, Interferogram Analysis for Optical Testing (CRC Press, Taylor & Francis Group, Boca Raton, FL, 2005).

  • [7]

    J. Millerd, N. Brock, J. Hayes, M. North-Morris, M. Novak, et al., Proc. SPIE 5531, 304–314 (2004).

    • Crossref
    • Export Citation
  • [8]

    A. Hettwer, J. Kranz, J. Schwider, Opt. Eng. 39, 960–966 (2000).

  • [9]

    R. Castonguay and P. Swaykowski, Scanning simultaneous phase-shifting, USPO #7,561,279 (2009).

  • [10]

    S. O. Donohue, P. Murphy, J. Fleig and G. Devries, Stitching interferometry for flexible asphere metrology, 21st ASPE Annual Meeting, ASPE Proceedings (2006).

  • [11]

    H. Knell, S. Laubach. G. Ehret and P. Lehmann, Opt. Express 22, 29787–29789 (2014).

    • Crossref
    • PubMed
    • Export Citation
  • [12]

    S. Laubach, G. Ehret, H. Knell and P. Kühnhold, P. Lehmann. In: DGaO Proceedings, (2014). Available at: http://www.dgao-proceedings.de. ISSN: 1614-8436.

  • [13]

    H. Knell, M. Schake, M. Schulz and P. Lehmann, Proc. SPIE 9132, 91320I (2014).

  • [14]

    S. Laubach, G. Ehret, H. Knell and P. Kühnhold, P. Lehmann. In: DGaO Proceedings, (2015). Available at: http://www.dgao-proceedings.de. ISSN: 1614-8436.

  • [15]

    O. Sasaki and H. Okazaki, Appl. Opt. 25, 3137–3140 (1986).

  • [16]

    O. Sasaki and H. Okazaki, Appl. Opt. 25, 3152–3158 (1986).

  • [17]

    M. Takeda, H. Ina and S. Kobayashi, J. Opt. Soc. Am. 72, 156–160 (1982).

    • Crossref
    • Export Citation
  • [18]

    H. Knell and P. Lehmann, Proc. SPIE 8788, 87880R (2013).

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Advanced Optical Technologies is a strictly peer-reviewed scientific journal. The major aim of Advanced Optical Technologies is to publish recent progress in the fields of optical design, optical engineering, and optical manufacturing. Advanced Optical Technologies has a main focus on applied research and addresses scientists as well as experts in industrial research and development.