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Licensed Unlicensed Requires Authentication Published by De Gruyter October 5, 2016

A new form measurement system based on subaperture stitching with a line-scanning interferometer

  • Sören Laubach EMAIL logo , Gerd Ehret , Jörg Riebeling and Peter Lehmann

Abstract

A new optical form measurement system for almost rotational symmetric surfaces has been set up. It is based on an interferometric line sensor applying sinusoidal path length modulation in combination with a movement system. With this system, ring-shaped subapertures of the specimens are measured. The system is especially suitable for measuring spheres and aspheres with a broad range of radii (r>50 mm). The individual subapertures are stitched together to yield the full 3D topography. Because the rotation of the specimen by more than 360° has to yield the same results, inherent consistency tests are possible. Example measurements of a sphere are shown and discussed. Reproducibility measurements for one ring scan performed with the system show a standard deviation of 14 nm. The system can be set up at a moderate price as off-the-shelf mechanical and optoelectronic devices can be used. Future improvements of the system are discussed.

Acknowledgments

The financial support of this research work (LE 992/7-2, EH 400/4-2) by the Deutsche Forschungsgemeinschaft (DFG) is gratefully acknowledged.

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Received: 2016-6-21
Accepted: 2016-8-19
Published Online: 2016-10-5
Published in Print: 2016-12-1

©2016 THOSS Media & De Gruyter

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