A new form measurement system based on subaperture stitching with a line-scanning interferometer

Sören Laubach 1 , Gerd Ehret 1 , Jörg Riebeling 2 ,  and Peter Lehmann 2
  • 1 Physikalisch-Technische Bundesanstalt, Bundesallee 100, 38116 Braunschweig, Germany
  • 2 Department of Electrical Engineering, University of Kassel, Wilhelmshöher Allee 71, 34121 Kassel, Germany
Sören Laubach, Gerd Ehret, Jörg Riebeling and Peter Lehmann

Abstract

A new optical form measurement system for almost rotational symmetric surfaces has been set up. It is based on an interferometric line sensor applying sinusoidal path length modulation in combination with a movement system. With this system, ring-shaped subapertures of the specimens are measured. The system is especially suitable for measuring spheres and aspheres with a broad range of radii (r>50 mm). The individual subapertures are stitched together to yield the full 3D topography. Because the rotation of the specimen by more than 360° has to yield the same results, inherent consistency tests are possible. Example measurements of a sphere are shown and discussed. Reproducibility measurements for one ring scan performed with the system show a standard deviation of 14 nm. The system can be set up at a moderate price as off-the-shelf mechanical and optoelectronic devices can be used. Future improvements of the system are discussed.

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Advanced Optical Technologies is a strictly peer-reviewed scientific journal. The major aim of Advanced Optical Technologies is to publish recent progress in the fields of optical design, optical engineering, and optical manufacturing. Advanced Optical Technologies has a main focus on applied research and addresses scientists as well as experts in industrial research and development.

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