Abstract
The WO3 thin films have been synthesized on to the glass substrates by a simple and easy spin coating method at different deposition cycles and their sensor responses towards various concentrations of NO2 gas were investigated. The WO3 films were spin coated at a spinning rate of 2500–3000 rpm for 5, 10 and 15 deposition cycles, respectively. Then the films were annealed at 400 °C for 1 h in a furnace. The structural, morphological, optical and electrical properties of WO3 films were studied by different characterization techniques such as X-ray diffraction (XRD), Scanning Electron Microscopy (SEM), FT-RAMAN Spectroscopy and electrical resistivity measurements by laboratory made two probe method respectively. It reveals a spherical grain – like morphology with a pure monoclinic phase of WO3. The FT-RAMAN spectra also confirm the pure monoclinic phase of WO3. The WO3-10 film sensor exhibits maximum gas sensitivity 21.93 and 102.4% to 5 and 100 ppm NO2 at 200 °C, respectively. The WO3-10 thin film sensors is highly sensitive and selective to NO2 over other gases.
Funding source: Science and Engineering Research Board
Award Identifier / Grant number: SR/FTP/PS-083/2012
Funding source: Human Resources Development program
Award Identifier / Grant number: 20124010203180
Funding statement: This research is supported under the project “Synthesis and characterization of nanostructured metal oxides for gas sensor applications” (Funder Id: http://dx.doi.org/10.13039/501100001843, No. SR/FTP/PS-083/2012) with a grant from the Science and Engineering Research Board (SERB), Department of Science and Technology (DST), New Delhi, India. This work was supported by the Human Resources Development program (No. 20124010203180) of the Korea Institute of Energy Technology Evaluation and Planning (KETEP) grant funded by the Korea government Ministry of Trade, Industry and Energy.
References
1. S. A. Vanalakar, V. L. Patil, N. S. Harale, S. A. Vhanalakar, M. G. Gang, J. Y. Kim, P. S. Patil, J. H. Kim, Sens. Actuators B 221 (2015) 1195.10.1016/j.snb.2015.07.084Search in Google Scholar
2. J. M. Peters, E. Avol, W. J. Gauderman, W. S. Linn, W. Navidi, S. J. London, H. Margolis, E. Rappaport, H. Vora, H. Gong, D. C. Thomas, Am. J. Respir. Crit. Care Med. 159 (1999) 768.10.1164/ajrccm.159.3.9804144Search in Google Scholar PubMed
3. K. Wetchakun, T. Samerjai, C. Liewhiran, C. Siriwong, V. Kruetu, A. Wisitsoraat, A. Tuantranont, S. Phanichphant, Sens. Actuators B 160 (2011) 580.10.1016/j.snb.2011.08.032Search in Google Scholar
4. L. Spinelle, M. Villani, M. G. Aleixandre, F. Bonavitacola, Sens. Actuators B 215 (2015) 249.10.1016/j.snb.2015.03.031Search in Google Scholar
5. S. P. Patil, V. L. Patil, S. S. Shendage, N. S. Harale, S. A. Vanalakar, J. H. Kim, P. S. Patil, Ceram. Inter. 42 (2016) 16160.10.1016/j.ceramint.2016.07.135Search in Google Scholar
6. C. C. Chan, W. C. Hsu, C. C. Chang, C. S. Hsu, Sens. Actuators B 157 (2011) 504.10.1016/j.snb.2011.05.008Search in Google Scholar
7. H. Zheng, Y. Tachibana, K. Kalantar-Zade, Langmuir 26 (2010) 19148.10.1021/la103692ySearch in Google Scholar PubMed
8. Q. Xiang, G. F. Meng, H. B. Zhao, Y. Zhang, H. Li, W. J. Ma, J. Phys. Chem. C 114 (2010) 2049.10.1021/jp909742dSearch in Google Scholar
9. T. Kida, A. Nishiyama, M. Yuasa, K. Shimanoe, N. Yamazoe, Sens. Actuators B 135 (2009) 568.10.1016/j.snb.2008.09.056Search in Google Scholar
10. S. S. Shendage, V. L. Patil, S. P. Patil, S. A. Vanalakar, J. L. Bhosale, J. H. Kim, P. S. Patil, J. Anal. Appl. Pyrol. 125 (2017) 9.10.1016/j.jaap.2017.05.006Search in Google Scholar
11. C. Klinke, J. B. Hannon, L. Gignac, K. Reuter, P. Avouris, J. Phys. Chem. B 109 (2005) 17787.10.1021/jp0533224Search in Google Scholar
12. S. Wang, X. F. Jiannian, Y. Lei, J. Angew. Chem. Int. 45 (2006) 1264.10.1002/anie.200502061Search in Google Scholar
13. L. Armerao, R. Bertoncello, G. Granozzi, G. Depaoli, E. Tondello, G. Battaglin, J. Mater. Chem. 4 (1994) 407.10.1039/JM9940400407Search in Google Scholar
14. X. Wang, G. Sakai, K. Shimanoe, N. Miura, N. Yamazoe, Sens. Actuators B 45 (1997) 141.10.1016/S0925-4005(97)00286-4Search in Google Scholar
15. S. K. Shukla, A. Bharadvaja, G. K. Parashar, Adv. Mater. Lett. 3 (2012) 365.10.5185/amlett.2012.5350Search in Google Scholar
16. H. T. Sun, C. Cantalini, M. Faccio, M. Pelino, Thin Solid Films 269 (1995) 97.10.1016/0040-6090(95)06668-3Search in Google Scholar
17. G. L. Agawane, S. W. Shin, S. A. Vanalakar, M. P. Suryawanshi, A. V. Moholkar, J. H. Yun, J. Gwak, J. H. Kim, J. Mater. Sci. Mater. Electron. 26 (2015) 1900.10.1007/s10854-014-2627-2Search in Google Scholar
18. D. Susanti, A. A. G. P. Diputra, L. Tananta, H. Purwaningsih, G. E. Kusuma, C. Wang, S. Shih, Y. Huang, Front. Chem. Sci. Eng. 8 (2014) 179.10.1007/s11705-014-1431-0Search in Google Scholar
19. A. T. Mane, S. B. Kulkarni, S. T. Navale, A. A. Ghanvat, N. M. Shinde, J. H. Kim, V. B. Patil, Ceram. Inter. 40 (2014) 16495.10.1016/j.ceramint.2014.08.001Search in Google Scholar
20. V. Srivastava, A. K. Srivastava, K. N. Sood, K. Jain, Sens. Transd. J. 107 (2009) 99.Search in Google Scholar
21. L. G. Teoh, I. M. Hung, J. Shieh, W. H. Lai, M. H. Hon, Electrochem. Solid State Lett. 6 (2003) G108.10.1149/1.1585252Search in Google Scholar
22. K. Toda, R. Furue, S. Hayami, Anal. Chim. Acta 878 (2015) 43.10.1016/j.aca.2015.02.002Search in Google Scholar
23. A. S. Rad, Appl. Sur. Sci. 357 (2015) 1217.10.1016/j.apsusc.2015.09.168Search in Google Scholar
24. P. G. Su, S. L. Peng, Talanta 132 (2015) 398.10.1016/j.talanta.2014.09.034Search in Google Scholar
25. A. S. Rad, M. Esfahanian, E. Ganjian, H. A. Tayebi, Z. Phys. Chem. 230 (2016) 1487.10.1515/zpch-2015-0645Search in Google Scholar
26. R. Seiser, K. Seshadri, U. Niemann, R. Cattolica, Z. Phys. Chem. 229 (2015) 811.10.1515/zpch-2014-0620Search in Google Scholar
27. M. Balji, J. Chandrasekaran, M. Raja, Z. Phys. Chem. 231 (2017) 1017.10.1515/zpch-2016-0861Search in Google Scholar
28. E. Vasilyeva, A. Nasibulin, O. Tolochko, A. Rudskoy, A. Sachdev, X. Xiao, Z. Phys. Chem. 229 (2015) 1429.10.1515/zpch-2015-0573Search in Google Scholar
29. J. Shieh, H. M. Feng, M. H. Hon, H. Y. Juang, Sens. Actuators B 86 (2002) 75.10.1016/S0925-4005(02)00150-8Search in Google Scholar
30. N. Yamazoe, N. Muira, Chem. Sens. Tech. Elsevier, Amsterdam, 4 (1992).Search in Google Scholar
31. Y. Baek, K. Yong, J. Phys. Chem. 111 (2007) 1213.10.1021/jp0652953Search in Google Scholar PubMed
32. G. L. Frey, A. Rothschild, J. Sloan, R. Rosentsveig, R. Popovitz-Biro, R. Tenne, J. Solid State Chem. 162 (2001) 300.10.1006/jssc.2001.9319Search in Google Scholar
33. T. Siciliano, A. Tepore, G. Micocci, A. Serra, D. Manno, E. Filippo, Sens. Actuators B 133 (2008) 321.10.1016/j.snb.2008.02.028Search in Google Scholar
34. Y. Djaoued, S. Balaji, N. Beaudoin, J. Sol-Gel Sci. Technol. 65 (2013) 374.10.1007/s10971-012-2948-7Search in Google Scholar
35. N. Yamazoe, G. Sakai, K. Shimanoe, Catal. Surv. Asia 7 (2003) 63.10.1023/A:1023436725457Search in Google Scholar
36. B. Ruhland, T. Becker, G. Muller, Sens. Actuators B 50 (1998) 85.10.1016/S0925-4005(98)00160-9Search in Google Scholar
37. L. Francioso, A. Forleo, S. Capone, M. Epifani, A. M. Taurino, P. Siciliani, Sens. Actuators B 114 (2006) 646.10.1016/j.snb.2005.03.124Search in Google Scholar
38. S. Ahlers, G. Muller, T. Doll, Sens. Actuators B 107 (2005) 587.10.1016/j.snb.2004.11.020Search in Google Scholar
39. S. S. Shendage, V. L. Patil, S. A. Vanalkar, S. P. Patil, N. S. Harale, J. L. Bhosale, J. H. Kim, P. S. Patil, Sens. Actuators B 240 (2017) 426.10.1016/j.snb.2016.08.177Search in Google Scholar
40. W. Zeng, T. M. Liu, Physica B 405 (2010) 1345.10.1016/j.physb.2009.11.086Search in Google Scholar
© 2020 Walter de Gruyter GmbH, Berlin/Boston