The WO3 thin films have been synthesized on to the glass substrates by a simple and easy spin coating method at different deposition cycles and their sensor responses towards various concentrations of NO2 gas were investigated. The WO3 films were spin coated at a spinning rate of 2500–3000 rpm for 5, 10 and 15 deposition cycles, respectively. Then the films were annealed at 400 °C for 1 h in a furnace. The structural, morphological, optical and electrical properties of WO3 films were studied by different characterization techniques such as X-ray diffraction (XRD), Scanning Electron Microscopy (SEM), FT-RAMAN Spectroscopy and electrical resistivity measurements by laboratory made two probe method respectively. It reveals a spherical grain – like morphology with a pure monoclinic phase of WO3. The FT-RAMAN spectra also confirm the pure monoclinic phase of WO3. The WO3-10 film sensor exhibits maximum gas sensitivity 21.93 and 102.4% to 5 and 100 ppm NO2 at 200 °C, respectively. The WO3-10 thin film sensors is highly sensitive and selective to NO2 over other gases.
J. M. Peters, E. Avol, W. J. Gauderman, W. S. Linn, W. Navidi, S. J. London, H. Margolis, E. Rappaport, H. Vora, H. Gong, D. C. Thomas, Am. J. Respir. Crit. Care Med. 159 (1999) 768.1005124910.1164/ajrccm.159.3.9804144)| false
This research is supported under the project “Synthesis and characterization of nanostructured metal oxides for gas sensor applications” (Funder Id: http://dx.doi.org/10.13039/501100001843, No. SR/FTP/PS-083/2012) with a grant from the Science and Engineering Research Board (SERB), Department of Science and Technology (DST), New Delhi, India. This work was supported by the Human Resources Development program (No. 20124010203180) of the Korea Institute of Energy Technology Evaluation and Planning (KETEP) grant funded by the Korea government Ministry of Trade, Industry and Energy.
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