Fromknecht, R., Neuhaus, M. and Jutzi, W.. "NIOBIUM ETCH PRODUCTS IN A CF
4 / 0
2 PLASMA".
SQUID '85 Superconducting Quantum Interference Devices and their Applications: Proceedings of the Third International Conference on Superconducting Quantum Devices, Berlin (West), June 25-28, 1985, edited by Hans-D. Hahlbohm and Heinz Lübbig, Berlin, Boston: De Gruyter, 1986, pp. 659-664.
https://doi.org/10.1515/9783110862393.659Fromknecht, R., Neuhaus, M. & Jutzi, W. (1986). NIOBIUM ETCH PRODUCTS IN A CF
4 / 0
2 PLASMA. In H. Hahlbohm & H. Lübbig (Ed.),
SQUID '85 Superconducting Quantum Interference Devices and their Applications: Proceedings of the Third International Conference on Superconducting Quantum Devices, Berlin (West), June 25-28, 1985 (pp. 659-664). Berlin, Boston: De Gruyter.
https://doi.org/10.1515/9783110862393.659Fromknecht, R., Neuhaus, M. and Jutzi, W. 1986. NIOBIUM ETCH PRODUCTS IN A CF
4 / 0
2 PLASMA. In: Hahlbohm, H. and Lübbig, H. ed.
SQUID '85 Superconducting Quantum Interference Devices and their Applications: Proceedings of the Third International Conference on Superconducting Quantum Devices, Berlin (West), June 25-28, 1985. Berlin, Boston: De Gruyter, pp. 659-664.
https://doi.org/10.1515/9783110862393.659Fromknecht, R., Neuhaus, M. and Jutzi, W.. "NIOBIUM ETCH PRODUCTS IN A CF
4 / 0
2 PLASMA" In
SQUID '85 Superconducting Quantum Interference Devices and their Applications: Proceedings of the Third International Conference on Superconducting Quantum Devices, Berlin (West), June 25-28, 1985 edited by Hans-D. Hahlbohm and Heinz Lübbig, 659-664. Berlin, Boston: De Gruyter, 1986.
https://doi.org/10.1515/9783110862393.659Fromknecht R, Neuhaus M, Jutzi W. NIOBIUM ETCH PRODUCTS IN A CF
4 / 0
2 PLASMA. In: Hahlbohm H, Lübbig H (ed.)
SQUID '85 Superconducting Quantum Interference Devices and their Applications: Proceedings of the Third International Conference on Superconducting Quantum Devices, Berlin (West), June 25-28, 1985. Berlin, Boston: De Gruyter; 1986. p.659-664.
https://doi.org/10.1515/9783110862393.659Copied to clipboard
