Accessible Requires Authentication Published by De Gruyter 1986

NIOBIUM ETCH PRODUCTS IN A CF4 / 02 PLASMA

From the book SQUID '85 Superconducting Quantum Interference Devices and their Applications
R. Fromknecht, M. Neuhaus and W. Jutzi
https://doi.org/10.1515/9783110862393.659
From the book
SQUID '85 Superconducting Quantum Interference Devices and their Applications
SQUID '85 Superconducting Quantum Interference Devices and their Applications

Chapters in this book (130)

Frontmatter
PREFACE
CONTENTS
LIST OF PARTICIPANTS
PHYSICS OF TUNNELING BARRIERS
TUNNELSPECTROSCOPY OF INHOMOGENEOUS POTENTIAL BARRIERS SHOWING RESONANCES EXEMPLIFIED FOR Nb 2Ο5
NON-THERMAL NOISE IN ULTRASMALL AREA TUNNEL JUNCTION DC SQUIDS
MICROSCOPIC THEORY OP THE JOSEPHSON EFFECT IN THE SNINS AND SNIS TUNNEL JUNCTION
STATIONARY PROPERTIES OP JOSEPHSON SN-N-NS MICROBRIDGES
ALTERATION OF MAGNETIC FIELD DEPENDENCE FOR VOLTAGE BIASED SNS JOSEPHSON JUNCTIONS
BEHAVIOUR OF ALUMINIUM MICROBRIDGES IRRADIATED WITH MICROWAVES
AUTOMATION OF NUMERICAL ANALYSIS OF CIRCUITS WITH JOSEPHSON TUNNEL JUNCTIONS
ON A FEW-DEGREE-OF-FREEDOM-MODEL OF THE JOSEPHSON TUNNELING JUNCTION
DIRECT NUMERICAL DETERMINATION OF STATIONARY ROTATIONAL STATES IN JOSEPHSON JUNCTIONS WITH ARBITRARY CURRENT PHASE RELATION
ANALYTICAL CALCULATION OF THE INDUCTANCE OF JOSEPHSON JUNCTIONS
INFLUENCE OF THE ABRICOSOV'S VORTICES ON SUPERCONDUCTING TUNNEL JUNCTIONS PROPERTIES
I-V CURVES OF RF-DRIVEN JOSEPHSON JUNCTIONS IN THE LOW FREQUENCY REGIME
RECONSTRUCTION OF THE JOSEPHSON JUNCTION PARAMETERS VIA ITS THRESHOLD CURVES
PROPERTIES OF THE LEAD-ALLOY JOSEPHSON TUNNEL JUNCTIONS
RESONANT MODES IN LIGHT-SENSITIVE dc SQUIDs
RESONANT MODES IN REFRACTORY BASELAYER d.c. SQUIDs
QUANTIZED FLUX Φ0 IN DC-SQUID WITH LI0 < Φ0
MULTIPLE PERIODS AND HYPERFINE FEATURES IN DC SQUID RESPONSE
THE INDUCTANCES OF R.F. SQUIDS
Nb-Si-Nb TUNNEL JUNCTION RF SQUID
NOISE, BANDWIDTH AND THE RESISTIVELY SHUNTED JUNCTION MODEL OF AN AC BIASED SQUID MAGNETOMETER
THE ASYMMETRY EFFECT IN DC-SQUID
A RESISTIVE DC-SQUID
THREE TERMINAL NON-EQUILIBRIUM SUPERCONDUCTING DEVICES
QUITERON FOR LOGIC APPLICATIONS
PROBABLE COHERENT OSCILLATIONS AT SINGLE-ELECTRON TUNNELING
CHARGE OSCILLATIONS AND ZENER NOISE DUE TO INTERBAND TRANSITIONS IN SMALL JUNCTIONS
THE LIFETIMES OF NON-EQUILIBRIUM DISSIPATIVE STEADY STATES
MACROSCOPIC QUANTUM TUNNELLING AND COHERENCE: THEIR SIGNIFICANCE FOR THE FOUNDATIONS OF PHYSICS
MACROSCOPIC QUANTUM EFFECTS AND QUANTUM NOISE IN JOSEPHSON ELEMENTS
MACROSCOPIC QUANTUM TUNNELING AND QUANTUM COHERENCE IN JOSEPHSON SYSTEMS
MACROSCOPIC QUANTUM EFFECTS IN THE ZERO VOLTAGE STATE OF THE CURRENT BIASED JOSEPHSON JUNCTION
THE DECAY OF METASTABLE STATES IN SYSTEMS WITH HIGHLY DAMPED JOSEPHSON JUNCTIONS
INTRINSIC TUNNEL JUNCTION PROPERTIES AND KRAMERS' MACROSCOPIC ESCAPE PROBLEM
INFLUENCE OF THERMAL FLUCTUATIONS AND BIASING FORCES ON Q-FACTOR AND AMPLITUDE OF MACROSCOPIC QUANTUM OSCILLATIONS
MACROSCOPIC QUANTUM COHERENCE: AN EXPERIMENTAL STRATEGY
MACROSCOPIC QUANTUM MECHANICAL BEHAVIOUR OF AN A.C. BIASED SQUID MAGNETOMETER
BEHAVIOUR OF AN AC BIASED SQUID RING IN THE QUANTUM MECHANICAL JOSEPHSON LIMIT
SCHRÖDINGER EQUATION SOLUTIONS FOR A WEAK LINK CONSTRICTION RING
CHAOS IN JUNCTIONS AND DEVICES
UNIVERSAL SCALING AND CHAOTIC BEHAVIOR – A JOSEPHSON JUNCTION ANALOG APPROACH
EFFECT OF CHAOS ON THE 1-V CURVES OF RF-DR1VEN JOSEPHSON JUNCTIONS
OBSERVATION OF MULTIQUANTUM TRANSITIONS WITH INTERMITTENCY IN HYSTERETIC SLIGHTLY UNDERDAMPED RF-SQUIDS
PROBLEMS OF FLUXON MOTION IN LONG JOSEPHSON JUNCTIONS AND THEIR APPLICATIONS
SPATIAL DISTRIBUTION OF THE MAXIMUM JOSEPHSON CURRENT IN A SUPERCONDUCTING TUNNEL JUNCTION
NUMERICAL STUDIES OF FLUXON DYNAMICS IN ANNULAR JOSEPHSON JUNCTION OSCILLATORS
CAVITY MODES IN RECTANGULAR JOSEPHSON JUNCTIONS
EFFECT OF NONLINEAR DAMPING ON THE ZERO FIELD STEPS OF LONG JOSEPHSON TUNNEL JUNCTIONS
INFLUENCE OF THE LOWER LIMIT FOR THE FLUXON CONTRACTION ON THE I-V CHARACTERISTIC OF ZERO-FIELD SINGULARITIES IN LONG JOSEPHSON JUNCTIONS
FISKE STEPS IN LONG OVERLAP JUNCTIONS
RF INDUCED STEPS IN LONG JOSEPHSON JUNCTIONS
CHAOS AND SUBHARMONIC GENERATION IN LONG JOSEPHSON JUNCTIONS
FLUXON OSCILLATIONS IN INTERMEDIATE-LENGTH JOSEPHSON JUNCTIONS
SPLITTING OF THE FIRST ZERO-FIELD STEP IN A JOSEPHSON JUNCTION OF INTERMEDIATE LENGTH
QUANTUM OSCILLATIONS IN NORMAL METAL LOOPS
IN SEARCH OF MAGNETIC FLUX QUANTIZATION IN NORMAL METAL RINGS
h/2e OSCILLATIONS IN THE MAGNETORESISTANCE OF NORMAL ALUMINUM RINGS
NEW MATERIALS FOR REFRACTORY TUNNEL JUNCTIONS: FUNDAMENTAL ASPECTS
NBN BASED JOSEPHSON JUNCTIONS
NIOBIUM ETCH PRODUCTS IN A CF<sub xmlns:env="http://degruyter.com/resources/metadata" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">4</sub> / 0<sub xmlns:env="http://degruyter.com/resources/metadata" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">2</sub> PLASMA
FABRICATION AND PROPERTIES OF NITROGEN IMPLANTED NIOBIUM WEAK-LINKS
FABRICATION TECHNIQUES FOR THIN FILM NB3GE JOSEPHSON DEVICES
ANODIC OXYDATION : A SIMPLE PROCEDURE FOR NbN THIN FILM CHARACTERISATION
TIN–COBALT ALLOY JOSEPHSON JUNCTIONS
DC MAGNETRON SYSTEM FOR THE PREPARATION OF NIOBIUM THIN FILMS
PROGRESS IN COOLING FACILITIES FOR SQUID APPLICATIONS ?!
GIFFORD-MCMAHON CRYOCOOLER WITH A FINAL JOULE-THOMSON STAGE
CONICAL PLASTIC CRYOCOOLER FOR SQUIDS
INTEGRATED THIN FILM SQUID INSTRUMENTS
TUNNEL JUNCTION DC SQUID WITH A PLANAR INPUT COIL
DC-SQUID DESIGN FOR A 25 CHANNEL MULTISENSOR TEST CIRCUIT
MULTILOOP PLANAR DC SQUID GRADIOMETER
EFFECT OF A SUPERCONDUCTING CYLINDER ON THE SQUID-MAGNETOMETER SIGNAL FROM A MAGNETIC DIPOLE
HYSTERETIC AC SQUIDs USING TUNNEL JOSEPHSON JUNCTIONS
HYSTERETIC NOISE SIMULATION OF DC SQUIDS WITH INPUT COIL
NOISE CONTRIBUTIONS TO SQUID CIRCUITS DUE TO TEMPERATURE FLUCTUATIONS
A NEW R.F. SQUID
APPLICATION OF A DC SQUID TO RF AMPLIFICATION: NQR
SQUID GRADIOMETRIC DETECTION OF DEFECTS IN FERROMAGNETIC STRUCTURES
NOISE OPTIMIZATION OF DC SQUID-BASED WIDEBAND AMPLIFIERS
NONDESTRUCTIVE EVALUATION OF METALLIC STRUCTURES USING A SQUID MAGNETOMETER
DC SQUID FLUX FOCUSER
CALORIMETRY AT LOW TEMPERATURES USING A SQUID
DETECTION OF NMR LARMOR AND DOUBLE LARMOR FREQUENCY OF PROTONS BY A SQUID
DETECTION OF SCHUMANN RESONANCES WITH THREE-AXIAL SQUID MAGNETOMETER
SQUID MEASUREMENT TECHNIQUES IN MEDICAL DIAGNOSIS
USE OF MULTISENSOR SQUID SYSTEMS IN BRAIN RESEARCH
MULTICHANNEL INSTRUMENTATION FOR ΒIOMAGNETISM
DESIGN OF COMPENSATED PLANAR INPUT COILS FOR BIOMAGNETIC MEASUREMENTS
DESIGN CONSIDERATIONS FOR MULTICHANNEL SQUID MAGNETOMETERS
HIGH-RESOLUTION MCG WITH DC-THIN FILM SQUID'S
PERFORMANCES OF HIGHER ORDER PLANAR GRADIOMETERS FOR ΒIOMAGNETIC SOURCE LOCALIZATION
ADVANCES IN HIGH FREQUENCY APPLICATIONS OF SUPERCONDUCTING TUNNEL JUNCTIONS
SIS QUASIPARTICLE MIXER RECEIVER FOR RADIO-ASTRONOMY APPLICATIONS
SATELLITE MICROWAVE STEPS AND MIXING CLOSE TO THE SELF-RESONANCE OF A JOSEPHSON TUNNEL JUNCTION
JOSEPHSON INTERFERENCE AND ITS SUPPRESSION IN SIS MIXERS OPERATING CLOSE TO THE GAP FREQUENCY
QUANTUM FLUCTUATIONS AT QUADRATIC VIDEODETECTION OF MICROWAVE RADIATION USING SUPERCONDUCTING JUNCTIONS
PARAMETRIC EFFECTS IN INDUCTIVELY COMPENSATED TUNNEL JUNCTIONS
AMPLIFIER NOISE SIMULATION OF DC SQUIDS WITH GROUNDED INPUT COIL
X-BAND PARAMETRIC AMPLIFIER AND MICROWAVE SQUID USING SINGLETUNNEL- JUNCTION SUPERCONDUCTING INTERFEROMETER
JOSEPHSON JUNCTION ARRAYS
MUTUAL PHASE LOCKING OF THE JOSEPHSON TUNNEL JUNCTIONS
DYNAMIC CONDUCTANCE OF A TW-DIMENSIONAL ARRAY OF JOSEPHSON JUNCTIONS
RF SQUID MATCHING TO A FIFTY OHMS LINE THEORY AND EXPERIMENT
Configuration of High Speed Superconducting Logic Circuits
OPTIMIZED RCJL FAMILY AND TWO-BIT FULL ADDER
RESISTIVE SINGLE FLUX QUANTUM LOGIC FOR THE JOSEPHSON-JUNCTION DIGITAL TECHNOLOGY
JOSEPHSON-JUNCTION A/D CONVERTER USING PARAMETRIC QUANTRONS AND REDUNDANT CODING
OVERSHOOT AND RISE TIME SIMULATION OF JOSEPHSON JUNCTION SAMPLERS
A COMPARISON OF DIGITAL TECHNOLOGIES WITH SUPER- AND SEMI-CONDUCTORS
THERMOMETRY AND STANDARDS WITH JOSEPHSON JUNCTIONS
NOISE THERMOMETER BETWEEN 1 AND 7.2 Κ USING A SQUID MAGNETOMETER
STABLE CONSTANT VOLTAGE STEPS BETWEEN 0.1 AND 1.5 V FROM NEW SERIES ARRAYS OF JOSEPHSON TUNNEL JUNCTIONS
A POSSIBLE QUANTUM CURRENT STANDARD BASED ON A SUPERCONDUCTING WEAK-LINK
SUPERCONDUCTIVE TUNNEL STRUCTURES AS RADIATION DETECTORS
ESR IN SITU WITH A JOSEPHSON TUNNEL JUNCTION
THE SQUID AS A MEASURING DEVICE FOR THE ELECTROMAGNETIC RESPONSE TO GRAVITATIONAL WAVES
Laboratory Experiment for Testing the Gravi-Magnetic Hypothesis with Squid-Magnetometers
A SUPERCONDUCTING GRAVITY GRADIOMETER
GYROMAGNETIC DETECTION OF ROTATION WITH A FERROMAGNETIC CORE SQUID
SUMMARY AND CONCLUSIONS
SUBJECT INDEX
SURVEY ON MATERIALS
AUTHOR INDEX
1237-1238