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NIOBIUM ETCH PRODUCTS IN A CF4 / 02 PLASMA
From the book SQUID '85 Superconducting Quantum Interference Devices and their Applications
R. Fromknecht
,
M. Neuhaus
and
W. Jutzi
From the book
Chapters in this book (130)
JUNCTION AND DEVICE PHYSICS
MACROSCOPIC QUANTUM FLUCTUATIONS
CHAOTIC PHENOMENA
FLUXON DYNAMICS
FLUX QUANTIZATION IN NORMAL METAL RINGS
FABRICATION TECHNIQUES
NIOBIUM ETCH PRODUCTS IN A CF<sub>4</sub> / 0<sub>2</sub> PLASMA
CRYOCOOLERS
SQUID INSTRUMENTS
BIOMAGNETIC INSTRUMENTATION
HF APPLICATIONS
DIGITAL APPLICATIONS
METROLOGICAL APPLICATIONS
VARIOUS APPLICATIONS AND PROPOSALS