Abstract
Light scattering of optical components caused by residual imperfections can be a critical factor for their practical application. In particular, the scattering properties of optical interference coatings are rather complex. Yet, simple theoretical models and comparisons with experimental results provide valuable insight into the main impact factors and mechanisms. The magnitude of scattering and the dominating factors strongly depend on the wavelength of application in connection with the types of coatings used in the corresponding ranges. The paper, therefore, gives an overview of the scattering properties of coatings in different spectral regions including the visible, deep ultraviolet, and extreme ultraviolet and discusses strong in-band variations of the scattering characteristics that have been neglected so far.
About the authors
Sven Schröder received his PhD degree in Physics (Dr. rer. nat.) from the Friedrich-Schiller-University (FSU) in 2008. Since 2001, he has been with the Surface and Thin Film Characterization Group at Fraunhofer IOF in Jena. His interests are directed to the study of the roughness and light scattering of surfaces and thin film coatings. In 2010, he spent 1 year at CREOL/UCF in Orlando, FL, USA to work on surface roughness and scattering models.
Marcus Trost graduated in Physics from the FSU Jena in 2009. Currently, he is a PhD student at the Fraunhofer IOF in Jena. His research interests include the characterization and modeling of roughness and light scattering of surfaces and thin film coatings for the extreme ultraviolet spectral range.
Tobias Herffurth graduated in Physics from the FSU Jena in 2008. Since 2006, he has been with the Surface and Thin Film Characterization Group at the Fraunhofer IOF working on methods and applications for light scattering-based surface and thin film characterization.
Alexander von Finck graduated in Physical Engineering in 2008 from the University of Applied Science Ravensburg-Weingarten. Since 2007, he has been with the Surface and Thin Film Characterization Group at the Fraunhofer IOF and works on the development of light scattering methods and instruments.
Angela Duparré received her PhD degree in Physics (Dr. rer. nat.) from the University of Jena in 1985. Since 1992, she has been the head of the Surface and Thin Film Characterization Group of the Fraunhofer Institute IOF Jena. Her interests focus on the study of surface, material, and thin film properties such as nanostructure, light scattering, roughness and wetting, as well as on the development of measurement and modeling techniques. In 2011, she was elected a fellow of the European Optical Society.
We are very grateful to Matthias Hautpvogel (Fraunhofer IOF, Jena) as well as Kerstin Täschner, Hagen Bartzsch, and Peter Frach (all Fraunhofer FEP, Dresden) for their contributions to measurements and sample generation. This work is supported by the Thuringian Ministry for Education, Science and Culture/European Regional Development Fund (ERDF/EFRE), project SPECTRO-SCAT (12017-715).
References
[1] J. Elson, J. Rahn and J. Bennett, Appl. Opt. 19, 669–679 (1980).10.1364/AO.19.000669Search in Google Scholar PubMed
[2] P. Bousquet, F. Flory and P. Roche, J. Opt. Soc. Am. 71, 1115–1123 (1981).10.1364/JOSA.71.001115Search in Google Scholar
[3] C. Amra, C. Grezes-Besset, P. Roche and E. Pelletier, Appl. Opt. 28, 2723–2730 (1989).10.1364/AO.28.002723Search in Google Scholar PubMed
[4] A. Duparré, in ‘Encyclopedia of Modern Optics’, Ed. by B. D. Guenther, D G. Steel, and L. Bayvel (Elsevier, Oxford, 2004) pp. 314–321.10.1016/B0-12-369395-0/00875-7Search in Google Scholar
[5] S. Schröder, T. Herffurth, H. Blaschke and A. Duparré, Appl. Opt. 50, C164–C171 (2011).10.1364/AO.50.00C164Search in Google Scholar PubMed
[6] J. M. Elson, J. P. Rahn and J. M. Bennett, App. Opt. 22, 3207–3219 (1983).Search in Google Scholar
[7] J. E. Harvey, S. Schröder, N. Choi and A. Duparré, Opt. Eng. 51, 013402-1–013402-11 (2012).10.1117/1.OE.51.1.013402Search in Google Scholar
[8] S. Schröder, A. Duparré, L. Coriand, A. Tünnermann, D. Penalver, et al., Opt. Express 19, 9820–9835 (2011).10.1364/OE.19.009820Search in Google Scholar PubMed
[9] A. von Finck, M. Hauptvogel and A. Duparré, Appl. Opt. 50, C321–C328 (2011).10.1364/AO.50.00C321Search in Google Scholar PubMed
[10] J. C. Stover, ‘Optical Scattering: Measurement and Analysis,’ 3rd Ed. (SPIE-Press, Bellingham, WA, 2012).Search in Google Scholar
[11] T. A. Germer and C. C. Asmail, Rev. Sci. Instr. 70, 3688 (1999).Search in Google Scholar
[12] S. Schröder, A. Duparré and A. Tünnermann, Appl. Opt. 47, C88–C97 (2008).10.1364/AO.47.000C88Search in Google Scholar
[13] S. Schröder, T. Herffurth, M. Trost and A. Duparré, Appl. Opt. 49, 1503–1512 (2010).10.1364/AO.49.001503Search in Google Scholar PubMed
[14] A. Duparré and D. Ristau, Appl. Opt. 50, C172–C177 (2011).10.1364/AO.50.00C172Search in Google Scholar PubMed
[15] M. Jupé, M. Lappschies, L. Jensen, K. Starke and D. Ristau, Proc. SPIE 6403, 64031A (2006).Search in Google Scholar
[16] P. Frach, H. Bartzsch, D. Gloess, K. Taeschner and J. Liebig, In ‘Optical Interference Coatings,’ Ed. By M. Tilsch and D. Ristau, OSA Technical Digest (online) (Optical Society of America, 2013), paper ThB.7.Search in Google Scholar
[17] T. Herffurth, M. Trost, S. Schröder, K. Taeschner, H. Bartzsch, et al., Appl. Opt. (2013) accepted for publication.Search in Google Scholar
[18] S. Jakobs, A. Duparré and H. Truckenbrodt, Appl. Opt. 37, 1180–1193 (1998).10.1364/AO.37.001180Search in Google Scholar PubMed
[19] D. Ristau, S. Günster, S. Bosch, A. Duparré, E. Masetti, et al., Appl. Opt. 41, 3196–3204 (2002).Search in Google Scholar
[20] S. Schröder, S. Gliech and A. Duparré, Appl. Opt. 44, 6093–6107 (2005).10.1364/AO.44.006093Search in Google Scholar
[21] J. Wang, R. Maier, P. Dewa, H. Schreiber, R. Bellman, et al., Appl. Opt. 46, 3221–3226 (2007).Search in Google Scholar
[22] T. Feigl, S. Yulin, N. Benoit and N. Kaiser, Microelectron. Eng. 83, 703–706 (2006).10.1016/j.mee.2005.12.033Search in Google Scholar
[23] M. Trost, S. Schröder, T. Feigl, A. Duparré and A. Tünnermann, Appl. Opt. 50, C148–53 (2011).10.1364/AO.50.00C148Search in Google Scholar PubMed
[24] S. Schröder, D. Unglaub, M. Trost and A. Duparre, Appl. Opt. (2013) accepted for publication.Search in Google Scholar
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