Light scattering of optical components caused by residual imperfections can be a critical factor for their practical application. In particular, the scattering properties of optical interference coatings are rather complex. Yet, simple theoretical models and comparisons with experimental results provide valuable insight into the main impact factors and mechanisms. The magnitude of scattering and the dominating factors strongly depend on the wavelength of application in connection with the types of coatings used in the corresponding ranges. The paper, therefore, gives an overview of the scattering properties of coatings in different spectral regions including the visible, deep ultraviolet, and extreme ultraviolet and discusses strong in-band variations of the scattering characteristics that have been neglected so far.
About the authors
Sven Schröder received his PhD degree in Physics (Dr. rer. nat.) from the Friedrich-Schiller-University (FSU) in 2008. Since 2001, he has been with the Surface and Thin Film Characterization Group at Fraunhofer IOF in Jena. His interests are directed to the study of the roughness and light scattering of surfaces and thin film coatings. In 2010, he spent 1 year at CREOL/UCF in Orlando, FL, USA to work on surface roughness and scattering models.
Marcus Trost graduated in Physics from the FSU Jena in 2009. Currently, he is a PhD student at the Fraunhofer IOF in Jena. His research interests include the characterization and modeling of roughness and light scattering of surfaces and thin film coatings for the extreme ultraviolet spectral range.
Tobias Herffurth graduated in Physics from the FSU Jena in 2008. Since 2006, he has been with the Surface and Thin Film Characterization Group at the Fraunhofer IOF working on methods and applications for light scattering-based surface and thin film characterization.
Alexander von Finck graduated in Physical Engineering in 2008 from the University of Applied Science Ravensburg-Weingarten. Since 2007, he has been with the Surface and Thin Film Characterization Group at the Fraunhofer IOF and works on the development of light scattering methods and instruments.
Angela Duparré received her PhD degree in Physics (Dr. rer. nat.) from the University of Jena in 1985. Since 1992, she has been the head of the Surface and Thin Film Characterization Group of the Fraunhofer Institute IOF Jena. Her interests focus on the study of surface, material, and thin film properties such as nanostructure, light scattering, roughness and wetting, as well as on the development of measurement and modeling techniques. In 2011, she was elected a fellow of the European Optical Society.
We are very grateful to Matthias Hautpvogel (Fraunhofer IOF, Jena) as well as Kerstin Täschner, Hagen Bartzsch, and Peter Frach (all Fraunhofer FEP, Dresden) for their contributions to measurements and sample generation. This work is supported by the Thuringian Ministry for Education, Science and Culture/European Regional Development Fund (ERDF/EFRE), project SPECTRO-SCAT (12017-715).
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