Abstract
Parallel femtosecond laser processing using a computer-generated hologram displayed on a spatial light modulator, known as holographic femtosecond laser processing, provides the advantages of high throughput and high-energy use efficiency. Therefore, it has been widely used in many applications, including laser material processing, two-photon polymerization, two-photon microscopy, and optical manipulation of biological cells. In this paper, we review the development of holographic femtosecond laser processing over the past few years from the perspective of wavefront and polarization modulation. In particular, line-shaped and vector-wave femtosecond laser processing are addressed. These beam-shaping techniques are useful for performing large-area machining in laser cutting, peeling, and grooving of materials and for high-speed fabrication of the complex nanostructures that are applied to material-surface texturing to control tribological properties, wettability, reflectance, and retardance. Furthermore, issues related to the nonuniformity of diffraction light intensity in optical reconstruction and wavelength dispersion from a computer-generated hologram are addressed. As a result, large-scale holographic femtosecond laser processing over 1000 diffraction spots was successfully demonstrated on a glass sample.
About the authors
Satoshi Hasegawa is an Assistant Professor at Department of Optical Engineering, Utsunomiya University, Japan. He received his master’s degree from The University of Tokushima in 2007 and his doctorate degree from Utsunomiya University in 2010. He was a postdoctoral fellow at Center for Optical Research and Education (CORE), Utsunomiya University, until 2014. His current interests include femtosecond laser material processing with holographic manipulation and computer-generated holography.
Yoshio Hayasaki received his PhD (Applied Physics) from University of Tsukuba, Japan, in 1993. He was a researcher in RIKEN from April 1993 to March 1995. He was an Associate Professor in The University of Tokushima from April 1995 to March 2008. At present, he is a professor in Utsunomiya University, Center for Optical Research and Education (CORE). The main research fields are information photonics, optical metrology, and laser material processing. Recently, he is focusing on a holographic femtosecond laser processing, digital super-resolution microscopy, and optical frequency comb imaging.
Acknowledgments
This study was supported by a Grant-in-Aid for Scientific Research (B), by a Grant-in-Aid for Challenging Exploratory Research from the Ministry of Education, Culture, Sports, Science, and Technology of Japan, and by Nippon Sheet Glass Foundation for Materials Science and Engineering.
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