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Licensed Unlicensed Requires Authentication Published by De Gruyter January 13, 2017

Design of an ultraviolet projection lens by using a global search algorithm and computer optimization

Nenad Zoric

Nenad Zoric graduated from the Faculty of Technical Sciences in Novi Sad, Serbia, and did a master’s program in Microcomputer Electronics in the field of Microelectronics. In 2013, he worked within the FP7 Senseiver project at the Faculty of Electrical Engineer, Technical University ‘Gheorghe Asachi’ in Iasi, Romania, in research focused on the development of innovative and low-cost sensors in LTCC (Low-Temperature Co-Fired Ceramics) technology. In 2014, he began his research within the FP7 Adopsys project as a PhD student focused on Optical design and Design methods for lithographic objectives at the National Research University of IT, Mechanics and Optics, St. Petersburg, Russia.

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, Irina Livshits

Irina Livshits was born in the Russian Federation and graduated in the field of Optical Devices and Spectroscopy from the National Research University of Information Technologies, Mechanics and Optics ITMO (formerly named as Leningrad Institute of Fine Mechanics and Optics) with a Master’s Degree in 1974. She received her Doctor of Science degree in 1980. Since 1974, she has been a Research Scientist and Educator in Optical Design at the same University at the Department of Theory of Optical Devices. Her current position is the Head of Lab “CAD of Opto-information and Energy Saving Systems”. She authored 178 publications, including 70 patents. She is a member of EOS, SPIE, and ROS.

, Don Dilworth

Mr. Don Dilworth received his B.C degree from MIT University in 1962. He is president of Optical Systems Design, Inc., and has since 1961 been intensively involved in development and application of computer software for optical design. He has extensive experience in most areas of lens design, particularly in thermal infrared systems, and is the author of the well-known SYNOPSYS™ lens design program, which is widely used by lens designers worldwide. As author of SYNOPSYS, Mr. Dilworth has advanced the state of the art in the areas of artificial intelligence (AI) and with the development of the popular PSD (Pseudo Second Derivative) optimization method. He is a senior member of the Optical Society of America and SPIE. He was director of the optical design department at Baus Optics, Inc., where he developed and implemented techniques for the design of geometric and thin-film optics. Prior to joining Baus Optics, Mr. Dilworth was employed by Itek Corporation as Senior Optical Physicist. In this capacity he was responsible for designing a variety of advanced optical systems, including aerial photographic lenses used on the recently declassified Corona project, aspheric systems, multilayer dielectric coatings, and a submarine periscope. At the Massachusetts Institute of Technology, he developed computational techniques for optical and thin-film design, which were applied to the design of the optical navigation equipment for the Apollo project.

and Sergey Okishev

Sergey Okishev has started his research career in the optical design of microscopes and photo-objectives at the Leningrad Institute of Fine Mechanics and Optics early. He is one of the leading specialists in the optics, optical design, and testing with more than 30 years of experience.

Abstract

This paper describes a method for designing an ultraviolet (UV) projection lens for microlithography. Our approach for meeting this objective is to use a starting design automatically obtained by the DSEARCH feature in the SYNOPSYS™ lens design program. We describe the steps for getting a desired starting point for the projection lens and discuss optimization problems unique to this system, where the two parts of the projection lens are designed independently.

About the authors

Nenad Zoric

Nenad Zoric graduated from the Faculty of Technical Sciences in Novi Sad, Serbia, and did a master’s program in Microcomputer Electronics in the field of Microelectronics. In 2013, he worked within the FP7 Senseiver project at the Faculty of Electrical Engineer, Technical University ‘Gheorghe Asachi’ in Iasi, Romania, in research focused on the development of innovative and low-cost sensors in LTCC (Low-Temperature Co-Fired Ceramics) technology. In 2014, he began his research within the FP7 Adopsys project as a PhD student focused on Optical design and Design methods for lithographic objectives at the National Research University of IT, Mechanics and Optics, St. Petersburg, Russia.

Irina Livshits

Irina Livshits was born in the Russian Federation and graduated in the field of Optical Devices and Spectroscopy from the National Research University of Information Technologies, Mechanics and Optics ITMO (formerly named as Leningrad Institute of Fine Mechanics and Optics) with a Master’s Degree in 1974. She received her Doctor of Science degree in 1980. Since 1974, she has been a Research Scientist and Educator in Optical Design at the same University at the Department of Theory of Optical Devices. Her current position is the Head of Lab “CAD of Opto-information and Energy Saving Systems”. She authored 178 publications, including 70 patents. She is a member of EOS, SPIE, and ROS.

Don Dilworth

Mr. Don Dilworth received his B.C degree from MIT University in 1962. He is president of Optical Systems Design, Inc., and has since 1961 been intensively involved in development and application of computer software for optical design. He has extensive experience in most areas of lens design, particularly in thermal infrared systems, and is the author of the well-known SYNOPSYS™ lens design program, which is widely used by lens designers worldwide. As author of SYNOPSYS, Mr. Dilworth has advanced the state of the art in the areas of artificial intelligence (AI) and with the development of the popular PSD (Pseudo Second Derivative) optimization method. He is a senior member of the Optical Society of America and SPIE. He was director of the optical design department at Baus Optics, Inc., where he developed and implemented techniques for the design of geometric and thin-film optics. Prior to joining Baus Optics, Mr. Dilworth was employed by Itek Corporation as Senior Optical Physicist. In this capacity he was responsible for designing a variety of advanced optical systems, including aerial photographic lenses used on the recently declassified Corona project, aspheric systems, multilayer dielectric coatings, and a submarine periscope. At the Massachusetts Institute of Technology, he developed computational techniques for optical and thin-film design, which were applied to the design of the optical navigation equipment for the Apollo project.

Sergey Okishev

Sergey Okishev has started his research career in the optical design of microscopes and photo-objectives at the Leningrad Institute of Fine Mechanics and Optics early. He is one of the leading specialists in the optics, optical design, and testing with more than 30 years of experience.

Acknowledgments

The research leading to these results received funding from the People Programme (Marie Curie Actions) of the European Union’s Seventh Framework Programme (FP7/2007-2013) under European Commission (EC) (REA grant agreement no. PITNGA-2013-608082 ‘ADOPSYS’).

References

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Received: 2016-10-21
Accepted: 2016-11-29
Published Online: 2017-1-13
Published in Print: 2017-2-1

©2017 THOSS Media & De Gruyter

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