Hubert Teyssedre , Stefan Landis , Christine Thanner , Maria Laure , Jonas Khan , Sandra Bos , Martin Eibelhuber , Mustapha Chouiki , Michael May , Pierre Brianceau , Olivier Pollet , Jerome Hazart , Cyrille Laviron , Laurent Pain and Markus Wimplinger

A full-process chain assessment for nanoimprint technology on 200-mm industrial platform

De Gruyter | Published online: May 10, 2017