Skip to content
Licensed Unlicensed Requires Authentication Published by De Gruyter April 22, 2021

On the Initial Annealing Stage of As+ Implanted Silicon

Rolf E. Hummel , S. W. Feng and Dieter R. Hagmann
Published Online: 2021-04-22
Published in Print: 1993-05-01

© 2021 by Walter de Gruyter Berlin/Boston

Downloaded on 31.1.2023 from https://www.degruyter.com/document/doi/10.1515/ijmr-1993-840507/html
Scroll Up Arrow