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Licensed Unlicensed Requires Authentication Published by De Gruyter March 31, 2021

Comparison of processing parameter effects during magnetron sputtering and electrochemical anodization of TiO2 nanotubes on ITO/glass and glass substrates

Emine Başalan, Mustafa Erol, Orkut Sancakoğlu, Tuncay Dikici and Erdal Çelik
From the journal Materials Testing

Abstract

Titanium thin films were deposited on glass and indium tin oxide (ITO) coated glass substrates by radio-frequency (RF) magnetron sputtering under varying sputtering parameters as: power, pressure, substrate temperature and target-substrate distance. The crystalline structure, crystallite size and texture coefficients of the films were evaluated in detail. As the evaluation points out, 100 W, 1.33 Pa ambient temperature and 70 mm were determined as the optimum sputtering parameters for intended crystalline structures. Subsequently, electrochemical anodization experiments were performed via varied electrolytes and under various anodization parameters (voltage, time and electrolyte type) in a two-electrode electrochemical cell using the films obtained through the optimized sputtering parameters. The anodized samples were annealed at 450 °C for 1 h in air in order to obtain anatase transformation and the desired crystalline structure. The surface morphologies and the crystalline structures of the anodized films were evaluated through x-ray diffractometer (XRD) and scanning electron microscope (SEM), respectively. Finally, the anodization parameters for the formation of TiO2 nanotube arrays were determined as: 35 V and 35 min. in an electrolyte composed of 0.3 wt.-% NH4F – 2 wt.-% water – ethylene glycol.


Assoc. Prof. Dr. Mustafa Erol Department of Metallurgical and Materials Engineering, Dokuz Eylul University Tinaztepe Campus 35390, Buca-Izmir/Turkey

Acknowledgment

This study was financially supported by TUBITAK with the project code 115M151. The authors are indebted to the infrastructural support from Dokuz Eylül University, the Center for Production and Applications of Electronic Materials (EMUM) and İzmir Katip Çelebi University Central Research Laboratories (IKCU-MERLAB) where the research was carried out.

References

1 S. Park, S. Kim, S. Park, W. I. Lee, C. Lee: Effects of functionalization of TiO2 nanotube array sensors with Pd nanoparticles on their selectivity, Sensors 14 (2014), pp. 15849-15860 DOI:10.3390/s14091584910.3390/s140915849Search in Google Scholar PubMed PubMed Central

2 B. Karunagaran, P. Uthirakumar, S. Chung, S. Velumani, E.-K. Suh: TiO2 thin film gas sensor for monitoring ammonia, Materials Characterization 58 (2007), pp. 680-684 DOI:10.1016/j.matchar.2006.11.00710.1016/j.matchar.2006.11.007Search in Google Scholar

3 S. Kathirvel, C. Su, C-Y. Yang, Y-J. Shiao, B-R. Chen, W-R. Li: The growth of TiO2 nanotubes from sputter-deposited Ti film on transparent conducting glass for photovoltaic applications, Vaccum (2015), pp. 17-25 DOI:10.1016/j.vacuum.2014.12.02410.1016/j.vacuum.2014.12.024Search in Google Scholar

4 P. Pichat: Are TiO2 nanotubes worth using in photocatalytic purification of air and water?, Molecules 19 (2014), pp. 15075-15087 DOI:10.3390/molecules19091507510.3390/molecules190915075Search in Google Scholar PubMed PubMed Central

5 M. Erol, T. Dikici, M. Toparli, E. Celik: The effect of anodization parameters on the formation of nanoporous TiO2 layers and their photocatalytic activities, Journal of Alloys and Compounds 604 (2014), pp. 66-72 DOI:10.1016/j.jallcom.2014.03.10510.1016/j.jallcom.2014.03.105Search in Google Scholar

6 M. Pelaez, N. T. Nolan, S. C. Pillai, M. K. Seery, P. Falaras, A. G. Kontos, P. S. M. Dunlop, J. W. J. Hamilton, J. A. Byrne, K. O’Shea, M. H. Entezari, D. D. Dionysiou: A review on the visible light active titanium dioxide photocatalysts for environmental applications, Applied Catalysis B: Environmental 125 (2012), pp. 331-349 DOI:10.1016/j.apcatb.2012.05.03610.1016/j.apcatb.2012.05.036Search in Google Scholar

7 P. Navabpour, S. Ostovarpour, J. Hampshire, P. Kelly, J. Verran, K. Cooke: The effect of process parameters on the structure, photocatalytic and self-cleaning properties of TiO2 and Ag-TiO 2 coatings deposited using reactive magnetron sputtering, Thin Solid Films 571 (2014), pp. 75-83 DOI:10.1016/j.tsf.2014.10.04010.1016/j.tsf.2014.10.040Search in Google Scholar

8 Q. Gui, Z. Xu, H. Zhang, C. Cheng, X. Zhu, M. Yin, Y. Song, L. Lu, X. Chen, D. Li: Enhanced photoelectrochemical water splitting performance of anodic TiO2 nanotube arrays by surface passivation, ACS Applied Materials Interfaces 6 (2014), pp. 17053-17058 DOI:10.1021/am504662w10.1021/am504662wSearch in Google Scholar PubMed

9 F.-X. Xiao, J. Miao, H.-Y. Wang, B. Liu: Self-assembly of hierarchically ordered CdS quantum dots – TiO2 nanotube array heterostructures as efficient visible light photocatalysts for photoredox applications, Materials Chemistry 1 (2013), pp. 12229-12238 DOI:10.1039/C3TA12856C10.1039/C3TA12856CSearch in Google Scholar

10 O. Carp, C. L. Huisman, A. Reller: Photoinduced reactivity of titanium dioxide, Progress in Solid State Chemistry 32 (2004) pp. 33-177 DOI:10.1016/j.progsolidstchem.2004.08.00110.1016/j.progsolidstchem.2004.08.001Search in Google Scholar

11 K. Siuzdak, R. Bogdanowicz, M. Sawczak, M. Sobaszek: Enhanced capacitance of composite TiO2 nanotube/boron-doped diamond electrodes studied by impedance spectroscopy, Nanoscale 7 (2015) pp. 551-558 DOI:10.1039/C4NR04417G10.1039/C4NR04417GSearch in Google Scholar

12 M. S. Kim, T.-W. Lee, J. H. Park: Controlled TiO2 nanotube arrays as an active material for high power energy-storage devices, Journal of the Electrochemical Society 156 (2009), pp. A584-A588 DOI:10.1149/1.312968210.1149/1.3129682Search in Google Scholar

13 F. Fabregat-Santiago, E. M. Barea, J. Bisquert, G. K. Mor, K. Shankar, C. A. Grimes: High carrier density and capacitance in TiO2 nanotube arrays induced by electrochemical doping, Journal of the American Chemical Society 130 (2008), pp. 11312-11316 DOI:10.1021/ja710899q10.1021/ja710899qSearch in Google Scholar PubMed

14 R. F. Bunshah: Handbook of Deposition Technologies for Films and Coatings: Science, Technology, and Applications, Elsevier, Amsterdam, The Netherlands (1994)Search in Google Scholar

15 T. Dikici, S. Yıldırım, M. Yurddaskal, M. Erol, R. Yiğit, M. Toparlı, E. Çelik: A comparative study on the photocatalytic activities of microporous and nanoporous TiO2 layers prepared by electrochemical anodization, Surface Coating Technologies 263 (2015), pp. 1-7 DOI:10.1016/j.surfcoat.2014.12.07610.1016/j.surfcoat.2014.12.076Search in Google Scholar

16 F.-X. Xiao, S.-F. Hung, H. B. Tao, J. Miao, H. B. Yang, B. Liu: Spatially branched hierarchical ZnO nanorod-TiO2 nanotube array heterostructures for versatile photocatalytic and photoelectrocatalytic applications: towards intimate integration of 1D–1D hybrid nanostructures, Nanoscale 6 (2014), pp. 14950-14961 DOI:10.1039/C4NR04886E10.1039/C4NR04886ESearch in Google Scholar PubMed

17 M. Zhao, J. Li, Y. Li, J. Wang, Y. Zuo, J. Jiang, H. Wang: Gradient Control of the Adhesive Force between Ti/TiO2 Nanotubular Arrays Fabricated by Anodization, Scientific Reports 4 (2014) DOI:10.1038/srep0717810.1038/srep07178Search in Google Scholar PubMed PubMed Central

18 V. Galstyan, E. Comini, G. Faglia, G. Sberveglieri: TiO2 nanotubes: recent advances in synthesis and gas sensing properties, Sensors 13 (2013), pp. 14813-14838 DOI:10.3390/s13111481310.3390/s131114813Search in Google Scholar PubMed PubMed Central

19 O. K. Varghese, M. Paulose, C. A. Grimes: Long vertically aligned titania nanotubes on transparent conducting oxide for higly efficient solar cells, Nature Nanotechnology 4 (2009), pp. 592-597 DOI:10.1038/NNANO.2009.22610.1038/NNANO.2009.226Search in Google Scholar

20 S. Venkatachalam, H. Hayashi, H. Nanjo, T. Ebina: Preparation and characterization of nanostructured TiO2 thin films by hydrothermal and anodization methods, Journal of Optoelectronics and Advanced Materials 5 (2013), pp.115-136 DOI:10.5772/5125410.5772/51254Search in Google Scholar

21 H. S. Kim, Y. Yang, J. T. Koh, K. K. Lee, D. J. Lee, K. M. Lee, S. W. Park, Fabrication and characterization of functionally graded nano-micro porous titanium surface by anodizing, Journal of Biomedical Materials Research B Applied Biomaterials 88 (2009), pp. 427-435 DOI:10.1002/jbm.b.3112410.1002/jbm.b.31124Search in Google Scholar PubMed

22 G. K. Mor, K. Shankar, M. Paulose, O. K. Varghese, C. A. Grimes: Use of higly-ordered TiO2 arrays in dye-sensitized solar cells, Nano Letters 6 (2006), pp. 215-218 DOI:10.1021/nl052099j10.1021/nl052099jSearch in Google Scholar

23 G. K. Mor, O. K. Varghese, M. Paulose, C. A. Grimes: Transparent highly ordered TiO2 nanotube arrays via anodization of titanium thin films, Adv. Funct.Mater. 15 (2005), pp. 1291-1296 DOI:10.1002/adfm.20050009610.1002/adfm.200500096Search in Google Scholar

24 A. Z. Sadek, H. Zheng, K. Latham, W. Wlodarski, K. Kalantar-Zadeh: Anodization of Ti thin film deposited on ITO, Langmuir 25 (2008), pp. 509-514 DOI:10.1021/la802456r10.1021/la802456rSearch in Google Scholar

25 Y.-X. Tang, T. Jie, Y.-Y. Zhang, W. Tao, H.-J. Tao, Y.-R. Zhu: Preparation of TiO2 nano-tube on glass by anodization of Ti films at room temperature, Transactions of the Nonferrous Metals Society 19 (2009), pp. 192-198 DOI:10.1016/S1003-6326(08)60251-410.1016/S1003-6326(08)60251-4Search in Google Scholar

26 L. Yang, Q. Cai, Y. Yu: Size-controllable fabrication of noble metal nanonets using a TiO2 template, Inorganic Chemistry 45 (2006), pp. 9616-9618 DOI:10.1016/S1003-6326(08)60251-410.1016/S1003-6326(08)60251-4Search in Google Scholar

27 W. Chanmanee, A. Watcharenwong, C. R. Chenthamarakshan, P. Kajitvichyanukul, N. R. de Tacconi, K. Rajeshwar: Formation and characterization of self-organized TiO2 nano-tube arrays by pulse anodization, Journal of the American Chemical Society 130 (2008), pp. 965-974 DOI:10.1021/ja076092a10.1021/ja076092aSearch in Google Scholar PubMed

28 D. Wang, B. Yu, C. Wang, F. Zhou, W. Liu: A novel protocol toward perfect alignment of anodized TiO2 nanotubes, Advanced Materials 21 (2009), pp. 1964-1967 DOI:10.1002/adma.20080199610.1002/adma.200801996Search in Google Scholar

29 J. M. Macak, P. Schmuki: Anodic growth of self-organized anodic TiO2 nanotubes in viscous electrolytes, Electrochimica Acta 52 (2006), pp. 1258-1264 DOI:10.1016/j.electacta.2006.07.02110.1016/j.electacta.2006.07.021Search in Google Scholar

30 Y. Wang, Y. He, Q. Lai, M. Fan: Review of the progress in preparing nano TiO2: An important environmental engineering material, Journal of Environmental Sciences 26 (2014), pp. 2139-2177 DOI:10.1016/j.jes.2014.09.02310.1016/j.jes.2014.09.023Search in Google Scholar PubMed

31 S. Sreekantan, Z. Lockman, R. Hazan, M. Tasbihi, L. K. Tong, A. R. Mohamed, Influence of electrolyte pH on TiO2 nanotube formation by Ti anodization, Journal of Alloys and Compounds 485 (2009), pp. 478-483 DOI:10.1016/j.jallcom.2009.05.15210.1016/j.jallcom.2009.05.152Search in Google Scholar

32 Y. Tang, J. Tao, Y. Zhang, T. Wu, H. Tao, Z. Bao: Preparation and characterization of TiO2 nano-tube arrays via anodization of titanium films deposited on FTO conducting glass at room temperature, Acta Physica Sinica 24 (2008), pp. 2191-2197 DOI:10.1016/S1872-1508(08)60082-010.1016/S1872-1508(08)60082-0Search in Google Scholar

33 F. Riboni, N. T. Nguyen, S. So, P. Schmuki, Aligned metal oxide nanotube arrays: key-aspects of anodic TiO2 nanotube formation and properties, Nanoscale Horizons (2016), pp. 445-466 DOI:10.1039/C6NH00054A10.1039/C6NH00054ASearch in Google Scholar PubMed

34 Y. Tang, J. Tao, Z. Dong, J. T. Oh, Z. Chen: The Formation of Micrometer-Long TiO2 Nanotube Arrays by Anodization of Titanium Film on Conducting Glass Substrate, Advances in Natural Sciences: Nanoscience and Nanotechnology 2 (2011), No. 4 DOI:10.1088/2043-6262/2/4/04500210.1088/2043-6262/2/4/045002Search in Google Scholar

35 N. Muslim, Y. Soon, C. Lim, N. Voo: Influence of sputtering power on properties of titanium thin films deposited by rf magnetron sputtering, ARPN Journal of Engineering and Applied Sciences 10 (2015), pp. 7184-7189Search in Google Scholar

36 V. Chawla, R. Jayaganthan, A. Chawla, R. Chandra, Microstructural characterizations of magnetron sputtered Ti films on glass substrate, Journal of Materials Process Technology 209 (2009), pp. 3444-3451 DOI:10.1016/j.jmatprotec.2008.08.00410.1016/j.jmatprotec.2008.08.004Search in Google Scholar

37 Y. Song, S. Cho, C. Jung, I. Bae, J. Boo, S. Kim: The structural and mechanical properties of Ti films fabricated by using RF magnetron sputtering, Journal of the Korean Physical Society 51 (2007), pp. 1152-1155 DOI:10.3938/jkps.51.115210.3938/jkps.51.1152Search in Google Scholar

Published Online: 2021-03-31

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