Abstract
Spontaneous locking of the phase of a coherent phonon source to an external reference is demonstrated in a deeply sideband-unresolved optomechanical system. The high-amplitude mechanical oscillations are driven by the anharmonic modulation of the radiation pressure force that result from an absorption-mediated free-carrier/temperature limit cycle, i.e., self-pulsing. Synchronization is observed when the pump laser driving the mechanical oscillator to a self-sustained state is modulated by a radiofrequency tone. We employ a pump-probe phonon detection scheme based on an independent optical cavity to observe only the mechanical oscillator dynamics. The lock range of the oscillation frequency, i.e., the Arnold tongue, is experimentally determined over a range of external reference strengths, evidencing the possibility to tune the oscillator frequency for a range up to 350 kHz. The stability of the coherent phonon source is evaluated via its phase noise, with a maximum achieved suppression of 44 dBc/Hz at 1 kHz offset for a 100 MHz mechanical resonator. Introducing a weak modulation in the excitation laser reveals as a further knob to trigger, control and stabilize the dynamical solutions of self-pulsing based optomechanical oscillators, thus enhancing their potential as acoustic wave sources in a single-layer silicon platform.
Enabled by progress in nanofabrication, the enhanced coupling of optical and mechanical degrees of freedom in purposely engineered micro-/nanoscale structures has provided physicists with the possibility to observe new physical phenomena in both the classical and quantum regime [1]. In particular, their interaction in a mechanically compliant and laser-driven optical cavity has led to the design of cavity-optomechanical systems that enables both cooling [2] and amplification of mechanical motion [3] by mere selection of the driving laser wavelength. This versatility can be used for tasks spanning the exploration of the quantum nature of mesoscopic objects to on-chip signal processing. Among the applications are a new category of self-sustained radio-frequency oscillators called optomechanical oscillators (OMOs) [4] which, by construction, also serve as self-sustained coherent phonon sources and may be used as such. Since any physical property in a solid-state system depends on the exact positioning of the atoms, coherent acoustic phonons are extremely suited to dynamically manipulate electric [5], [6], optical [7], [8] and magnetic [9], [10] properties of matter. Acoustic wave sources are therefore an enabling technology across physics as well as the first building block for information processing with phonons [11], [12].
Even though several strategies to induce mechanical lasing in optomechanical devices have been proposed [13], [14], OMOs based on a single optical and mechanical mode are probably the only practical small-footprint implementation [15], [16]. They can trigger an oscillation from a direct continuous source without needing feedback electronics using mechanisms such as the retarded radiation-pressure force [13], the back-action induced by the bolometric light force [17] or by coupling the optomechanical system to carrier/thermal self-sustained cyclic dynamics [18]. In these cases, their all-optical operation, ease of miniaturization, low power consumption and scalability make these oscillators potential candidates as optically driven phonon sources [19] and a possible replacement to conventional quartz-based oscillators in specific RF-photonic communication and sensing applications such as optical down conversion [20] or mass sensing [21]. Although the reported output stability of OMOs approaches state-of-the-art optoelectronic oscillators [22], their performance is often degraded by mechanical effects such as slow frequency drift [23], intrinsic [24] or thermomechanical noise [25] and by instabilities occurring at large displacement amplitudes [26]. Additional postfabrication tunability of their phase and frequency as well as their noise characteristics are therefore critical for their improved performance as both acoustic wave sources and carriers in microwave photonics.
The behavior of a regenerative oscillator driven by an extra external oscillatory signal with a frequency close the oscillation frequency has been explored in a variety of systems such as lasers [27], [28] or masers [29], electrical tank circuits [30], [31], organ pipes [32], nonlinear mechanical resonators [33], [34], superconducting circuits [35] and human circadian rhythms [36]. These apparently dissimilar systems all share their tendency toward an adjustment of the oscillator’s rhythm to the one externally imposed, as originally proposed by Adler [37]. In recent years, the intrinsic nonlinearity of the optomechanical interaction has been harnessed to explore the spontaneous locking of an oscillator to a reference signal delivered via the driving optical field [22], [38], [39], [40], via electrical capacitive actuation [41], [42] or by mechanical actuation with propagating acoustic waves [43]. In all these cases, the system is driven to a mechanical lasing state by dynamical back action, which requires a large optomechanical cooperativity [1]. In this article, we demonstrate spontaneous frequency locking of the coherent mechanical motion of a one-dimensional silicon optomechanical crystal (OMC) brought to a self-sustained state using the anharmonic modulation of the radiation pressure force due to the activation of a self-pulsing (SP) mechanism [44]. We use an independent optical cavity the radiofrequency spectrum of which is solely affected by the self-sustained mechanical dynamics. In this way, we overcome a drawback of the transduction schemes in previous power-modulated experiments, which often prevented an unambiguous assessment of the instantaneous amplitude of the mechanical oscillator due to the direct measurement of the reference oscillatory signal.
The particular system investigated here is a pair of close-by one-dimensional OMCs fabricated in a silicon-on-insulator wafer, as shown in the central SEM micrograph of Figure 1. We investigate the fundamental optical cavity mode of each OMC at wavelengths of 1531 nm (right-R) and 1550 nm (left-L), respectively, whose eigenfields are shown in Figure 1(c). Fabrication disorder distorts the nominal y-symmetry of the single OMC optical field profiles and naturally provides the spectral detuning between the two optical cavities, preventing any optical crosstalk as shown in the schematic of Figure 1. In addition, the same distortion leads to a high vacuum optomechanical coupling rate go between the optical resonances and the mechanical flexural modes with three antinodes along the x direction, that would otherwise be optomechanically dark. For the right OMC, this mechanical mode (Figure 1(b)) displays a frequency of fR = 100.37 MHz and a calculated value of go,RR = 2π ⋅ 514 kHz. The precise geometry and reasoning behind the clamping and interconnect structure has been described elsewhere [45], but it essentially allows the simultaneous optical excitation of the two optical modes as well as controlled phonon leakage from one beam to its neighbor. The mechanical eigenstructure of identical nanobeams would exhibit the symmetry of the system and would induce a perfect hybridization of the two mechanical modes into a symmetric and antisymmetric coupled modes. The mentioned fabrication disorder breaks the as-designed symmetry and the original string-like modes weakly hybridize as a result. However, the two-mode picture with in-phase and anti-phase oscillation still applies (see Supplementary Information). As a result of this weak coupling, a small part of the energy of the mechanical mode supported by the right beam (imperceptible in Figure 1(b)) resides in the left beam, which leads to a small calculated cross-coupling term of go,LR = 2π ⋅ 8 kHz between the mechanical mode of the right OMC and the optical cavity of the left OMC, two orders of magnitude smaller than the direct term go,RR. The mechanical dynamics of the right OMC are controlled via a strong pump laser (dark blue in Figure 1) that couples light into the right optical cavity, eventually driving the mechanical mode into a free-running phonon lasing state at frequency
Measurements are performed at ambient conditions by bringing a tapered microloop optical fiber between the two structures, coupling light propagating in the fiber to the fundamental optical resonance of both beams (Figure 2(b)). The measured optical resonances have quality factors of

Optomechanical system and detection scheme.
(a) Illustration of the optomechanical setting explored. Two optical cavities of frequencies ωR (blue) and ωL (red), with

Experimental setup and device characterization.
(a) The main optical signals are derived from two external-cavity diode laser and sent into a tapered microloop optical fiber to evanescently couple light into the silicon optomechanical device. The optical signal from the OMC is collected by the same fiber taper and equally split in two, either in transmission or in reflection using an in-fiber circulator. The optical signals in both arms are band-pass filtered by narrow wavelength filters (λ-BPF) and impinge on two fast photodetectors (PDs). The electrical signals are sent to a spectrum analyzer (SPA), a vector network analyzer (VNA) or an oscilloscope (OSC) for characterization. EOM stands for electro-optic modulator and FPC for fiber polarization controller. (b) Optical transmission spectrum, exhibiting two optical modes at λR = 1531 nm and λL = 1550 nm. (c) Colormaps of the power spectral density (PSD) of the transmitted light when sweeping the laser (1) wavelength driving the optical resonance R at high power while another laser (2) weakly probes the resonance L; (left) λBPF = λ1 and (right) λBPF = λ2. The dashed white lines highlight (1) the thermal transduction, (2) M = 2 mechanical lasing and (3) M = 1 mechanical lasing states. (d) Within the configuration achieved in dashed line 3, adding a weak intensity-modulation via the EOM results in a peak in the PSD when its frequency fmod is far from the phonon lasing frequency fOMO (black signal), but locks the oscillator frequency for small detunings (blue signal). When the addressed signal is the probe, the spectra reproduce the ones schematically given in Figure 1.
Sweeping the laser (1) wavelength at high CW power from the blue-detuned side of the resonance at λR = 1531 nm to λ = 1538 nm leads to multiple dynamical states of the right OMC. For large detunings and relatively low intracavity photon numbers nc, the incoherent mechanical motion activated by the thermal Langevin force imprints a modulation around the transmission DC value. The measured PSD is highlighted with dashed line 1 in the left colormap of Figure 2(c) and evidences the presence of several mechanical modes. In particular, the motion of the aforementioned mechanical mode at
We focus now on the particular situation represented by dashed line 3 in Figure 2(c), where the right beam is pumped by laser (1) to the M = 1 mechanical lasing state at
The range of modulation frequencies for which injection locking occurs, i.e., the Arnold tongue [49], is investigated by performing measurements such as those shown in Figure 2(d) while step-changing the excitation frequency from lower to higher frequencies. The results for

Spectral-domain evidence of injection locking to an external modulation.
(Color online) (a) Color plot of the power spectral density (PSD) of the transmitted light of the laser driving the right beam fundamental optical resonance at λ1 = 1536 nm with Pin = 3 mW when changing the modulation frequency in steps of 100 Hz. In a given range, the phonon lasing peak synchronizes to the modulation tone. (b) Equivalent measurement by observing light from the second laser that weakly probes the optical mode at λ2 = 1550 nm of the left beam, allowing only the observation of the mechanical dynamics of the right beam. The coherent complex scattering response of the system measuring S21 in the VNA is depicted for the filter aligned with the laser driving the right (c) and the left (d) optical modes.

Phonon lasing oscillation frequency. (Color online) Colormaps of the power spectral density (PSD) of light transmitted at the wavelength of the probe laser for modulation amplitudes from VAC = 0.0019Vπ to VAC = 0.0061 Vπ. The dashed white lines are guides to the eye and help to visualize the asymmetric growth of the Arnold tongue with respect to the free-running oscillation frequency at fOMO,0 = 100.322 MHz.
As seen in Figure 4, injection locking controls the oscillation frequency over bandwidths as high as several hundreds of linewidths of the bare OMO. Locking to a low-noise reference also improves its stability, gauged over short times via its phase noise. The phase noise analysis was carried out with a different fiber taper, slightly changing the external coupling condition and resulting in an even wider Arnold tongue at a fixed modulation amplitude and exhibiting injection locking physics for voltages up to

Phase noise characteristics.
(Color online) (a) Phase noise measurements of the phonon lasing state with a radio-frequency external tone at
In conclusion, we have reported the observation of injection locking of self-pulsing-driven regenerative oscillations of an optomechanical system to an external optical reference and isolated the mechanical signal by engineering the system geometry and read-out scheme. The lock range achieved can go up to 350 kHz, enabling a large tuning range over the oscillator frequency. Besides the direct consequences for acoustic wave self-sustained sources of the results shown here, applications using distributed arrays of oscillators within a single small-footprint chip, like robust time-keeping with standard optoelectronic oscillators [52], or neuromorphic computing [53], may benefit from the reported physics of injection locking from a variety of perspectives. Variations in natural mechanical frequencies due to unwanted fabrication variations make mutual synchronization of weakly coupled beams as in the study by Colombano et al. [45] relatively hard to observe. Due to the wide lock range achieved, injection locking can be used to presynchronize one of the coupled OMOs to an external drive and use it as a lead oscillator to which the others can synchronize via weak mechanical links, a configuration under exploration. Moreover, in cases where mechanical lasing of a particular mode cannot be achieved with an adiabatic laser parameter sweep, usually because the attained self-pulsing frequency νSP is still far from fm, injection locking of the SP limit cycle to the external tone can be used to increase νSP. With this additional degree of freedom mechanical lasing can be reached, leading to a state that persists after the modulation is switched off, i.e., it enables exploration of usually inaccessible dynamical attractors of the system. Pulsed or modulated operation in this configuration could enable switching between different dynamical states, as reported in the study by Maire et al. [54] with a top pumping scheme. Furthermore, the feed forward nature of the technique stabilizes the oscillator without the need of feedback circuits, achieving a phase noise suppression up to 44 dBc/Hz at 1 kHz and 8.5 dBc/Hz at 100 kHz, resulting in an oscillator operated at atmospheric conditions with phase noise levels close to state of the art silicon optomechanical oscillators [16], [22], [55].
Funding source: European Comission
Award Identifier / Grant number: PHENOMEN (GA: 713450)
Funding source: CERCA Programme / Generalitat de Catalunya
Funding source: Ministerio de Ciencia, Innovación y Universidades
Award Identifier / Grant number: PGC2018-094490-B-C22PGC2018-101743-B-I00RYC-2014-15392
Funding source: Spanish Research Agency
Award Identifier / Grant number: AEI, grant no. SEV-2017-0706
Acknowledgments
The authors thank Dr. E. Chavez for his careful and critical reading of the manuscript.
Author contributions: All the authors have accepted responsibility for the entire content of this submitted manuscript and approved submission.
Research funding: This research was funded by EU FET Open project PHENOMEN (GA: 713450). ICN2 is supported by the Severo Ochoa program from the Spanish Research Agency (AEI, grant no. SEV-2017-0706) and by the CERCA Programme/Generalitat de Catalunya. G. A. and C. M. S.-T. acknowledge the support from the Spanish MICINN project SIP (PGC2018-101743-B-I00). D. N. U., G. A. and M. F. C. gratefully acknowledge the support of a Ramón y Cajal postdoctoral fellowship (RYC-2014-15392), a BIST studentship, and a Severo Ochoa studentship, respectively. D. N. U. acknowledges the funding through the Ministry of Science, Innovation and Universities (PGC2018-094490-B-C22).
Conflict of interest statement: The authors declare no conflicts of interest regarding this article.
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Supplementary Material
The online version of this article offers supplementary material (https://doi.org/10.1515/nanoph-2020-0592).
© 2021 Guillermo Arregui et al., published by De Gruyter, Berlin/Boston
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