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Licensed Unlicensed Requires Authentication Published by De Gruyter June 13, 2019

Progress and perspectives in high-purity substance production for semiconductor industry

Andrey V. Vorotyntsev, Anton N. Petukhov, Maxim M. Trubyanov, Artem A. Atlaskin, Dmitriy A. Makarov, Maria S. Sergeeva, Ilya V. Vorotyntsev ORCID logo and Vladimir M. Vorotyntsev

Abstract

In the last decade, novel approaches for post-synthesis processes of separation and high purification of gases are gaining larger acceptance in industry. The market is competing with consolidated operations such as cryogenic distillation. The key for new approaches of distillation, membranes and crystallization in challenging and harsh environments is the development of new tough, high-performance materials that are characterized by higher energy efficiency compared with conventional cryogenic distillation. This review highlights the most promising fields of research in high purification and separation of gases by considering the elevated pressure and thermal distillations, membrane cascades, purification in synthesis by use of catalytic technologies, crystallization and hydride methods based on them.

Funding source: Russian Science Foundation

Award Identifier / Grant number: 18-19-00453

Funding statement: The study reported in this article was funded by the Russian Science Foundation, Funder Id: http://dx.doi.org/10.13039/501100006769 (project no. 18-19-00453 in part of membrane based hybrid processes, project no. 17-79-20286 in part crystallization methods, project no. 17-79-10464 in part of unsteady-state membrane separation and project no. 17-73-20275 in part of the catalytic technologies in semiconductor precursor production), the Russian Foundation of Basic Research (project no. 17-08-01053 in part of thermal distillation, project no. 16-38-60192 mol_a_dk in part of the silane production and project no. 16-38-60174 mol_a_dk in part of membrane based hybrid processes and MC concept for gases high purification) and the Grant of the President of the Russian Federation (MC-2924.2017.8) and in part of elevated pressure distillation and by the Ministry of Education and Science of the Russian Federation in the Framework of the Basic Part of the State Task (project no. 4.6535.2017/8.9).

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Received: 2018-07-16
Accepted: 2019-02-06
Published Online: 2019-06-13
Published in Print: 2021-01-27

© 2019 Walter de Gruyter GmbH, Berlin/Boston