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Licensed Unlicensed Requires Authentication Published by Oldenbourg Wissenschaftsverlag January 31, 2014

Unique sensors and methods for traceable measurements on micro features

Spezielle Sensoren und Methoden für rückführbare Messungen an Mikromerkmalen
Ralf Christoph

Ingomar Schmidt studied electrical and information engineering at the Technische Universität Ilmenau. 2008 he has obtained his doctorate. Since 2008 he is working for Werth Messtechnik GmbH Gießen as administrative assistant and Manager Intellectual Property.

Werth Messtechnik GmbH, Siemensstraße 19, 35394 Gießen, Germany

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and Ingomar Schmidt

Ralf Christoph studied precision engineering at the Friedrich Schiller University in Jena. 1985 he has obtained his doctorate and did a post doctorate thesis in 1989. Since 1993 he is the president and owner of Werth Messtechnik GmbH in Gießen.

Werth Messtechnik GmbH, Siemensstraße 19, 35394 Gießen, Germany

From the journal tm – Technisches Messen

Abstract

Measurements on micro features require high accuracy and high structural resolution with dense point clouds. Different sensors that are capable of providing these demands have been integrated into coordinate measuring machines. The different basic working principles and recently developed functionalities will be presented. Highest flexibility is achieved by the combination of different sensors in a multi sensor coordinate measuring machine.

Zusammenfassung

Messungen an Mikromerkmalen erfordern hohe Genauigkeiten und eine hohe Strukturauflösung mit Hilfe dichter Punktewolken. Verschiedene dafür geeignete Sensoren wurden in Koordinatenmessgeräte integriert. Die unterschiedlichen Arbeitsprinzipien und neu entwickelte Funktionen werden vorgestellt. Durch die Kombination von verschiedenen Sensoren in einem Multisensor-Koordinatenmessgerät wurde höchste Flexibilität erreicht.

About the authors

Ralf Christoph

Ingomar Schmidt studied electrical and information engineering at the Technische Universität Ilmenau. 2008 he has obtained his doctorate. Since 2008 he is working for Werth Messtechnik GmbH Gießen as administrative assistant and Manager Intellectual Property.

Werth Messtechnik GmbH, Siemensstraße 19, 35394 Gießen, Germany

Ingomar Schmidt

Ralf Christoph studied precision engineering at the Friedrich Schiller University in Jena. 1985 he has obtained his doctorate and did a post doctorate thesis in 1989. Since 1993 he is the president and owner of Werth Messtechnik GmbH in Gießen.

Werth Messtechnik GmbH, Siemensstraße 19, 35394 Gießen, Germany

Received: 2013-10-24
Accepted: 2013-11-10
Published Online: 2014-1-31
Published in Print: 2014-2-28

©2014 Walter de Gruyter Berlin/Boston

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