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Licensed Unlicensed Requires Authentication Published by Oldenbourg Wissenschaftsverlag January 31, 2014

Optimal design of spherical capacitive probe with ultra-large aspect ratio based on modal analysis

Optimierung eines sphärischen kapazitiven Stylus mit ultrahohem Aspektverhältnis, basierend auf Modenanalyse und Simulation
Junning Cui

Junning Cui was born in Jilin province, P. R. China, in 1981. He received his M.Eng.and PHD degrees in Instrument Science and Technology from Harbin Institute of Technology in 2006 and 2010 respectively. He is currently working as a teacheer and researcher in Ultraprecision Optoelectronic Instrument Engineering Center. His past project experience includes design of a variety of electronic circuits, development of ultraprecision capacitive displacement sensors and machine vision instruments. His current interests are ultraprecision dimensional and profile measurement of small structures with large aspect ratio.

Ultra-precision Optoelectronic Instrument Engineering Center, P. O. Box 718, Harbin Instute of Technology, Harbin, 150001, Heilongjiang, PR China

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, Yesheng Lu

Yesheng Lu was born in Jiangsu Province, P. R. China, in 1989. He received his graduate and master degree in Instrument Science and Technology from Harbin Institute of Technology (HIT) in 2011 and 2013 respectively. And now he is a PHD candidate in HIT, and his research field is micro environment control for ultra-precision equipment.

Ultra-precision Optoelectronic Instrument Engineering Center, P. O. Box 718, Harbin Instute of Technology, Harbin, 150001, Heilongjiang, PR China

, Zhangqiang He

Zhangqiang He was born in Anhui Province, P. R. China, in 1990. He received his graduate and master degree in Instrument Science and Technology from Harbin Institute of Technology (HIT) in 2011 and 2013 respectively. And now he is a PHD candidate in HIT, and his research field is vibration calibration with ultra-low frequency.

Ultra-precision Optoelectronic Instrument Engineering Center, P. O. Box 718, Harbin Instute of Technology, Harbin, 150001, Heilongjiang, PR China

and Junchao Guo

Junchao Guo was born in Henan Province, P. R. China, in 1990. And now he is a master degree candidate in Harbin Institute of Technology, and his research field is thermostatic system with water circulation.

Ultra-precision Optoelectronic Instrument Engineering Center, P. O. Box 718, Harbin Instute of Technology, Harbin, 150001, Heilongjiang, PR China

From the journal tm – Technisches Messen

Abstract

In order to solve the problem of stylus vibration of the spherical capacitive probe with ultra-large aspect ratio, modal analysis of the stylus is done and optimal design of stylus structure is carried out. The Euler–Bernoulli Beam model is introduced to build the dynamic equation of lateral vibration of the stylus. Based on results of modal analysis and simulation, the first order natural frequency of the stylus is optimized to near 100 Hz, and the resolution of the probing sensor is improved from 20 nm to 4 nm with adoption of damping material.

Zusammenfassung

Das Problem der Vibrationen bei Tastköpfen bei kapazitiven, kugelförmigen Sensoren mit übergroßem Formfaktor beruht auf geringer Steifigkeit und geringem Dämpfungsaufbau. Um dieses Problem zu lösen, werden Modalanalysen und Simulationen des Tastkopfes durchgeführt und ein optimales Design der Taster-Struktur aufgezeigt. Mit Hilfe der Euler–Bernoulli-Balkentheorie wird die dynamische Gleichung für die Quervibration des Tasters entwickelt. Basierend auf den Ergebnissen zur Eigenwertanalyse und den Simulationen wird die Grundfrequenz erster Ordnung auf nahezu 100 Hertz optimiert. Die Ausgangsstabilität des Tastkopfes wird durch Einsetzen von Dämpfermaterialien von 20 nm auf 4 nm (Spitze-zu-Spitze-Wert) verbessert.

About the authors

Junning Cui

Junning Cui was born in Jilin province, P. R. China, in 1981. He received his M.Eng.and PHD degrees in Instrument Science and Technology from Harbin Institute of Technology in 2006 and 2010 respectively. He is currently working as a teacheer and researcher in Ultraprecision Optoelectronic Instrument Engineering Center. His past project experience includes design of a variety of electronic circuits, development of ultraprecision capacitive displacement sensors and machine vision instruments. His current interests are ultraprecision dimensional and profile measurement of small structures with large aspect ratio.

Ultra-precision Optoelectronic Instrument Engineering Center, P. O. Box 718, Harbin Instute of Technology, Harbin, 150001, Heilongjiang, PR China

Yesheng Lu

Yesheng Lu was born in Jiangsu Province, P. R. China, in 1989. He received his graduate and master degree in Instrument Science and Technology from Harbin Institute of Technology (HIT) in 2011 and 2013 respectively. And now he is a PHD candidate in HIT, and his research field is micro environment control for ultra-precision equipment.

Ultra-precision Optoelectronic Instrument Engineering Center, P. O. Box 718, Harbin Instute of Technology, Harbin, 150001, Heilongjiang, PR China

Zhangqiang He

Zhangqiang He was born in Anhui Province, P. R. China, in 1990. He received his graduate and master degree in Instrument Science and Technology from Harbin Institute of Technology (HIT) in 2011 and 2013 respectively. And now he is a PHD candidate in HIT, and his research field is vibration calibration with ultra-low frequency.

Ultra-precision Optoelectronic Instrument Engineering Center, P. O. Box 718, Harbin Instute of Technology, Harbin, 150001, Heilongjiang, PR China

Junchao Guo

Junchao Guo was born in Henan Province, P. R. China, in 1990. And now he is a master degree candidate in Harbin Institute of Technology, and his research field is thermostatic system with water circulation.

Ultra-precision Optoelectronic Instrument Engineering Center, P. O. Box 718, Harbin Instute of Technology, Harbin, 150001, Heilongjiang, PR China

Received: 2013-11-8
Accepted: 2013-11-10
Published Online: 2014-1-31
Published in Print: 2014-2-28

©2014 Walter de Gruyter Berlin/Boston

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