Abstract
Printed electronics, e.g. organic photo-voltaic, are usually produced by roll-to-roll printing. For this fast growing market no inline-measurement method for 2D-thickness-distributions after printing exists. In many cases layer-thicknesses are in the sub-μm-range, e.g. 10–300 nm, and ellipsometry is one typical technology for this range, but up to now only in the laboratory, since most ellipsometers are too slow and/or measure only a spot. A new concept, a stroboscopic imaging ellipsometer, enables fast measurement on a line, to acquire the 2D-distribution of thickness, right after printing.
Zusammenfassung
Gedruckte Elektronik, wie beispielsweise organische Photovoltaik, wird üblicherweise mit Rolle-zu-Rolle-Verfahren hergestellt. Für diesen sehr schnell wachsenden Markt existiert bisher kein Inline-Messsystem, das es erlaubt, die 2D-Schichtdickenverteiltung direkt nach dem Druckvorgang zu erfassen. In der Regel liegt die Stärke der aufgetragenen Schichten im Submikrometerbereich (Bsp. 10–300 nm). Ellipsometrie ist für diesen Schichtdickenbereich besonders gut geeignet. Allerdings sind herkömmliche Ellipsometer als Labormessgeräte eher langsam und/oder ermöglichen nur eine punktweise Messung. Das hier vorgestellte neuartige stroboskopische Imaging-Ellipsometer erlaubt ein schnelles Bestimmen der 2D-Schichtdickenverteiltung.
Funding statement: This research has received funding from the European Union's 7th Framework Programme (FP7/2007-2013) under Grant Agreement number 315665, www.thime.eu.
About the authors
Florian Huemer is currently finishing his master in Computer Engineering at the Vienna University of Technology. Since 2014 he has been working in the field of fast imaging ellipsometry.
Vienna University of Technology, Inst. 311, Getreidemarkt 9/311, Vienna, Austria
Murad Jamalieh received his master in Biomedical Engineering at the Vienna University of Technology in 2014 after starting his studies in Jordan. Since 2011 he has been working on industrial laser applications, mainly including laser-assisted forming, but also ellipsometry.
Vienna University of Technology, Inst. 311, Getreidemarkt 9/311, Vienna, Austria
Ferdinand Bammer has been working in the field of industrial laser applications at the Vienna University of Technology since 2001. In 2004 he invented the single crystal photo-elastic modulator and tested it in several applications like time-multiplexing, laser-pulsing, and ellipsometry.
Vienna University of Technology, Inst. 311, Getreidemarkt 9/311, Vienna, Austria
Dirk Hönig graduated in physics at the University of Göttingen and prepared his thesis at the Max Planck Institute for Biophysical Chemistry. He is co-founder of a number of companies in the fields of optics, measurement technologies and high-tech engineering.
Accurion GmbH, Stresemannstr. 30, D-37079 Göttingen, Germany
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