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Publicly Available Published by Oldenbourg Wissenschaftsverlag September 20, 2017

Scanning confocal vibrometer microscope for vibration analysis of energy-harvesting MEMS in wearables

Scannendes konfokales Vibrometermikroskop für die Schwingungsanalyse von Energy-Harvesting-Microsystemen für Wearables

Robert Kowarsch, Jürgen Janzen, Christian Rembe, Hyunjun Cho and Hyuck Choo
From the journal tm - Technisches Messen