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Licensed Unlicensed Requires Authentication Published by Oldenbourg Wissenschaftsverlag April 19, 2019

Accurate 3-axis measurement of inhomogeneous magnetic fields

Präzise 3-Achsen-Messung inhomogener Magnetfelder
  • Dragana Popovic Renella

    Dragana Popovic Renella received a Master of Science degree in Electrical Engineering from ETH Zurich, Switzerland and a PhD in Technology Management from the University of Novi Sad, Serbia. She performed an executive education in Marketing and Communication Management at SDA Bocconi, Milan, Italy. Dr. Popovic Renella is a co-founder of two Swiss high-tech start-ups. Currently, she is the COO of SENIS AG, Switzerland. Prior to co-founding SENIS she worked for ETH Zurich in research and teaching, for Sentron AG in marketing and for Credit Suisse in e-business. Dragana was elected as a Swiss member of the technical committee of IMEKO (International Measurement Confederation) in 2015.

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    , Sasa Spasic

    Sasa Spasic holds a Master degree in Electrical Engineering from the University of Nis, Serbia. Prior to joining Senis he worked in the energy management and software development business areas at Landis & Gyr, Siemens, Metso Automation and AnyDoc Software as technology development and professional service manager. He has many years of experience in technology development, team management and sales of magnetic sensors, magnetic measurement instruments and current sensors.

    , Remo Ughini

    Remo Ughini is Application Engineer at SENIS since 2018. He holds a Master degree from ETH Zurich in Mechanical Engineering with focus in automatic control and robotics. Prior to joining SENIS he worked as engineer at Maurer Magnetic AG in the area of demagnetization equipment and processes, as well as residual magnetism measurements. His technical expertise is in the field of ferromagnetism, electromagnetism and the magnetic field metrology.

    and Radivoje S. Popovic

    Radivoje S. Popovic received the Dipl. Ing. Degree in engineering physics from the University of Beograd, Beograd, Yugoslavia, in 1969 and the M.Sc. and Dr.Sc. degrees in electronics from the University of Nis, Nis, Yugoslavia, in 1974 and 1978, respectively. From 1969 to 1981, he was with Elektronska Industrija, Nis. From 1982 to 1993, he was with Landis and Gyr AG, Central R&D, Zug, Switzerland, where he was appointed Vice President of Central R&D in 1991. In 1994, he joined the Swiss Federal Institute of Technology (EPFL), Lausanne, Switzerland, as a Professor of microtechnology systems. He is the Founder of start-up companies Sentron AG, Sentronis ad, Senis AG, and Ametes AG. He is the author or co-author of 250 publications and 95 patent applications. His current research interests include sensors for magnetic and optical signals, interface electronics, and noise phenomena. Prof. Popovic is a member of the Swiss Academy of Engineering Sciences and the Serbian Academy of Engineering Sciences.

From the journal tm - Technisches Messen

Abstract

Hall effect based Teslameters/Gaussmeters measure DC and AC magnetic flux densities in the range from a few µT to about 30 T. For accurate measurement a 3-axis Hall probe is applied with small magnetic field sensitive volume (MFSV) of 100 µm × 10 µm × 100 µm, with vertical and horizontal Hall elements integrated on a single chip. The planar Hall effect, that produces additional measurement errors is suppressed by the spinning current technique. The orthogonality error of the 3-axis Hall probe is reduced to smaller than 0.1° by the described calibration procedure. This paper explains why the above features are crucial for some applications in industry and modern science for accurate measurement of inhomogeneous magnetic fields and how to achieve them. The future technology trends in magnetic metrology are introduced and the newly developed Nanomapper that incorporates a 3-axis Hall probe with a MFSV of smaller than 10×10×10 micrometer is presented.

Zusammenfassung

Auf Hall-Effekt basierte Teslameter/Gaussmeter messen DC und AC magnetische Flussdichten im Bereich von einigen μT bis etwa 30 T. Für eine genaue Messung wird eine 3-Achsen Hall-Sonde mit kleinräumigem Magnetic Field Sensitive Volume (MFSV; Magnetfeld-empfindliches Volumen) mit den Dimensionen 100 µm × 10 µm × 100 µm angewendet. Das MFSV besteht aus vertikalen und horizontalen Hall-Elementen, die auf einem einzigen Chip integriert sind. Der planare Hall-Effekt, der zusätzliche Messungsfehler erzeugt, wird durch Spinning Current Technology (Drehung des Stroms) unterdrückt. Der Orthogonalitätsfehler der 3-Achsen Hall-Sonde wird durch das beschriebene Kalibrierungsverfahren auf weniger als 0.1° reduziert. Zudem wird erklärt, warum die oben genannten Eigenschaften massgebend für Anwendungen in der Industrie und der modernen Wissenschaft zur genauen Messung von inhomogenen Magnetfeldern sind und wie man sie erreichen kann. Die Technologietrends in der magnetischen Messtechnik werden vorgestellt und der neu entwickelte Nanomapper mit einer 3-Achsen Hall-Sonde und einem MFSV von weniger als 10×10×10 Mikrometern wird präsentiert.

About the authors

Dragana Popovic Renella

Dragana Popovic Renella received a Master of Science degree in Electrical Engineering from ETH Zurich, Switzerland and a PhD in Technology Management from the University of Novi Sad, Serbia. She performed an executive education in Marketing and Communication Management at SDA Bocconi, Milan, Italy. Dr. Popovic Renella is a co-founder of two Swiss high-tech start-ups. Currently, she is the COO of SENIS AG, Switzerland. Prior to co-founding SENIS she worked for ETH Zurich in research and teaching, for Sentron AG in marketing and for Credit Suisse in e-business. Dragana was elected as a Swiss member of the technical committee of IMEKO (International Measurement Confederation) in 2015.

Sasa Spasic

Sasa Spasic holds a Master degree in Electrical Engineering from the University of Nis, Serbia. Prior to joining Senis he worked in the energy management and software development business areas at Landis & Gyr, Siemens, Metso Automation and AnyDoc Software as technology development and professional service manager. He has many years of experience in technology development, team management and sales of magnetic sensors, magnetic measurement instruments and current sensors.

Remo Ughini

Remo Ughini is Application Engineer at SENIS since 2018. He holds a Master degree from ETH Zurich in Mechanical Engineering with focus in automatic control and robotics. Prior to joining SENIS he worked as engineer at Maurer Magnetic AG in the area of demagnetization equipment and processes, as well as residual magnetism measurements. His technical expertise is in the field of ferromagnetism, electromagnetism and the magnetic field metrology.

Radivoje S. Popovic

Radivoje S. Popovic received the Dipl. Ing. Degree in engineering physics from the University of Beograd, Beograd, Yugoslavia, in 1969 and the M.Sc. and Dr.Sc. degrees in electronics from the University of Nis, Nis, Yugoslavia, in 1974 and 1978, respectively. From 1969 to 1981, he was with Elektronska Industrija, Nis. From 1982 to 1993, he was with Landis and Gyr AG, Central R&D, Zug, Switzerland, where he was appointed Vice President of Central R&D in 1991. In 1994, he joined the Swiss Federal Institute of Technology (EPFL), Lausanne, Switzerland, as a Professor of microtechnology systems. He is the Founder of start-up companies Sentron AG, Sentronis ad, Senis AG, and Ametes AG. He is the author or co-author of 250 publications and 95 patent applications. His current research interests include sensors for magnetic and optical signals, interface electronics, and noise phenomena. Prof. Popovic is a member of the Swiss Academy of Engineering Sciences and the Serbian Academy of Engineering Sciences.

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Received: 2018-11-30
Accepted: 2019-04-07
Published Online: 2019-04-19
Published in Print: 2019-10-25

© 2019 Walter de Gruyter GmbH, Berlin/Boston

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