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Inline-fähige Weißlichtinterferometrie mit integrierter Schwingungskompensation

Inline scanning white-light interferomety with integrated vibration compensation
Stanislav Tereschenko and Peter Lehmann
From the journal tm - Technisches Messen

Zusammenfassung

Weißlichtinterferometer sind weit verbreitete Messgeräte zur Erfassung von 3D-Mikrotopographien. Der Einsatz solcher Messgeräte in maschinennaher Umgebung abseits schwingungsgedämpfter Labore wird durch Umgebungsschwingungen erschwert oder sogar unmöglich gemacht. In diesem Beitrag wird ein passives Kompensationsverfahren am Beispiel von zwei interferometrischen Sensoren vorgestellt, mit dem der Einfluss beliebiger sowohl periodischer als auch transienter axialer Störschwingungen auf interferometrische Weißlichtmessungen kompensiert werden kann. Durch die zeitlich hochaufgelöste Abstandserfassung eines in das Weißlichtinterferometer integrierten Abstandsinterferometers werden alle Abweichungen von dem Soll-Tiefenscanverlauf gemessen und zur Korrektur der Weißlichtinterferenzsignale verwendet. Daraus wird anschließend mit etablierten Auswertealgorithmen die Oberflächentopographie berechnet. Die Schwingungskompensation wird anhand von Vergleichsmessungen mit und ohne Störschwingungen an verschiedenen Messobjekten demonstriert.

Abstract

Scanning white-light interferometers are widely used measuring instruments for 3D microtopography. Due to environmental vibrations the use of such devices in close-to-machine environments away from vibration-damped laboratories is difficult or even impossible. In this article we present a passive vibration compensation method using the example of two interferometric sensors, which can compensate for the influence of arbitrary periodic and transient axial vibrations on the interferometric white-light measurements. Due to the temporally high-resolution distance detection of a distance measuring laser interferometer integrated into the white-light interferometer, all deviations from the desired linear depth-scanning process are measured and this information is used to correct the white-light interference signals. From these, the surface topography is calculated by well-known evaluation algorithms. The vibration compensation is demonstrated based on comparative measurements with and without disturbing vibrations for different measuring objects.

Funding source: Deutsche Forschungsgemeinschaft

Award Identifier / Grant number: LE 992/9-2

Funding statement: Die Autoren danken der Deutschen Forschungsgemeinschaft (DFG) für die Förderung des Projektes “3D-Analyse von Oberflächenschädigungen in metallischen Werkstoffen unter Ermüdungsbelastung” (Förderkennzeichen LE 992/9-2).

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Erhalten: 2018-12-20
Angenommen: 2019-02-21
Online erschienen: 2019-03-14
Erschienen im Druck: 2019-04-04

© 2019 Walter de Gruyter GmbH, Berlin/Boston