Abstract
This article presents a large aperture micro scanning mirror (MSM) array especially developed for the panoramic 3D-ToF camera Fovea-3D. The Fovea-3D system uses a fiber amplified pulsed laser ToF technique at
Zusammenfassung
In diesem Artikel wird ein MEMS- Scannerspiegel Array vorgestellt, welches speziell für zur großen Empfangsapertur schnell scannendes die 3D-ToF Panoramakamera Fovea-3D entwickeltes zur Gewährleitung einer aus synchron scannenden identischen Mikroscannern besteht.
In diesem Artikel wird der MEMS basierte Laserscanner Fovea-3D vorgestellt. Dieser zielt auf Echtzeit 3D-Bildgebung mit einem optischen Panorama-Sichtfeld (FOV) von
Funding statement: The authors would like to thank the Fraunhofer society for their financial support of the presented work within the project “WISA: Fovea-3D adaptive 3D recording” performed in cooperation with the Fraunhofer Institute for Physical Measurement Techniques (IPM).
About the authors
Thilo Sandner studied electrical engineering at the Technical University of Dresden (Germany). He has been working as a scientist since his graduation in 1994 with 25 years’ experience in micro-system technology, sensors and optical measurement techniques over a wide field of application. He received his doctorate in 2003 at the Department of Solid-State Electronics of TU Dresden on a non-destructive laser induced characterization method of depth resolved polarization profiles of ferroelectric thin films. In 2003, he joined the Fraunhofer IPMS as a scientist. Since 2004 he builds up and heads the R&D group micro-scanners at IPMS for more than 11 years. His expertise involves the MEMS design, simulation, bulk micro-machiningg and characterization of MOEMS, as well as their system integration. Currently, he works as a R&D project manager and key scientist focusing on new MOEMS devices and application areas, like MEMS based LiDAR or miniaturized FTIR spectrometers. He is author/coauthor of more than 130 articles and 15 issued patents.
Thomas Graßhoff studied microsystem technology at the University of Applied Sciences Berlin. He has been working as an MEMS designer at the Fraunhofer IPMS since his graduation in 2005. Parallel to his work he completed his education with a distance learning in “Computational Engineering”. In 2014 he received his Master of Science degree from the Beuth University of Applied Sciences, Berlin Germany. His field of work as scientist includes the component design of novel micro mechanical devices, first of all novel micro-scanning-mirrors with a focus on FEM simulation of mechanical and multi-physical domains.
Michael Wildenhain received the Dipl.-Ing. (FH) degree from the University of Applied Sciences Zwickau, Germany in 1999 and a Master of Science degree from the University of Cottbus in 2012. In 2000 he joined Fraunhofer IPMS. He has more than 15 years experience in MEMS micro-mirror devices for several applications. Seven years he was concerned with development of micro-mirror arrays for Adaptive Optics. As a project manager he heads industrial projects focusing on product development and pre-series production of micro scanning devices.
Markus Schwarzenberg studied information technology at the Technical University of Dresden. He has been working as a scientist at the Fraunhofer IPMS since his graduation in 1996. He received his doctorate in 2000 at the Faculty of Electrical Engineering of the Technical University Dresden. His work focuses on the area of software development, signal and image processing as well as on system design of electronic control systems for micromechanical devices. Currently, he heads the Electronics and Software Development Working Group within the IPMS Business Unit AMS.
Acknowledgment
Here, we have especially to thank our colleagues Claudia Baulig and Stefan Schwarzer of Fraunhofer IPM. We also like to thank the IPMS colleagues Jan Grahmann and Harald Schenk for their support.
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