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Licensed Unlicensed Requires Authentication Published by Oldenbourg Wissenschaftsverlag September 25, 2009

A CMOS Range Camera based on Single Photon Avalanche Diodes (CMOS-Range-Kamera mit Single-Photon-Avalanche-Photodioden)

Lucio Pancheri , David Stoppa , Lorenzo Gonzo and Gian-Franco Dalla Betta
From the journal tm - Technisches Messen

This paper reports on a novel range camera employing Single Photon Avalanche Diodes for Time-of-Flight imaging applications. The architecture of an active pixel containing a single photon detector and the relative read-out channel is presented together with experimental results of a 64-pixel linear array. The sensor array, fabricated with a standard high-voltage 0.8-μm CMOS technology, exhibits a range accuracy of better than ± 3cm in the range interval 2m to 5m, without any external averaging operation.

In diesem Artikel wird über eine neuartige Range-Kamera aus Single-Photon-Avalanche-Photodioden berichtet. Die Architektur der Active-Pixel-Elemente wird beschrieben, die sowohl einen Single-Photon-Detektor als auch den entsprechenden Auslesekanal enthalten, zusammen mit experimentellen Ergebnissen zu den Eigenschaften einer 64-Pixel-Linear-Kamera. Das Sensorarray, mittels eines kommerziellen 0,8-μm-CMOS-Prozesses hergestellt, liefert eine Distanzgenauigkeit von besser als ± 3cm innerhalb eines Intervalls von 2 bis zu 5 Metern ohne Mittelwertbildung.



[1] LangeR.SeitzP.Solid-State Time-of-Flight Range Camera. IEEE Journal of Quantum Electronics37(2001)No. 3390397.10.1109/3.910448Search in Google Scholar

[2] StoppaD.ViaraniL.SimoniA.GonzoL.MalfattiM.PedrettiG.A 16 × 16-Pixel Range-Finding CMOS Image SensorProc. IEEE ESSCIRC 2004, Leuven, BelgiumSeptember419422.Search in Google Scholar

[3] JeremiasR.BrockherdeW.DoemensG.HostickaB.ListlL.MengelP.A CMOS Photosensor Array for 3D Imaging Using Pulsed Laser. In: ISSCC Digest of Technical Papers, February2001252253.Search in Google Scholar

[4] NiclassL.RochasA.BesseP. A.CharbonE.A CMOS Single Photon Avalanche Diode Array for 3D ImagingISSCC Digest of Technical PapersFebruary2004120121.Search in Google Scholar

[5] K. K. Ng: Complete Guide to Semiconductor Devices. Wiley-IEEE Press, 2002.Search in Google Scholar

[6] RochasA.PauchardR.BesseP. A.PanticD.PrijicZ.PopovicR. S.Low-Noise Silicon Avalanche Photodiodes Fabricated in Conventional CMOS Technologies. IEEE Trans. on Electron Devices49(2002)No. 3387394.10.1109/16.987107Search in Google Scholar

[7] BiberA.SeitzP.Jäckel:H.Avalanche Photodiode Image Sensor in Standard BiCMOS TechnologyIEEE Trans. on Electron Devices47(2000)No. 1122412243.10.1109/16.877191Search in Google Scholar

[8] CovaS.LongoniA.AndroniA.CubedduR.A semiconductor detector for measuring ultra-weak fluorescence decays, with 70 ps FWHM resolution. IEEE J. of Quantum Electronics19(1983)630634.10.1109/JQE.1983.1071905Search in Google Scholar

[9] StellariF.TosiA.ZappaF.CovaS.CMOS Circuit Testing via Time-Resolved Luminescence Measurements and Simulations. IEEE Trans. on Instrumentation and Measurement53(2004)No. 1163169.10.1109/TIM.2003.822195Search in Google Scholar

[10] NiclassC. L.RochasA.BesseP. A.CharbonE.A CMOS Single Photon Avalanche Diode Array for 3D Imaging. ISSCC Digest of Technical PapersFebruary2004120121.Search in Google Scholar

[11] RochasA.GöschM.SerovA.BesseP. A.PopovicR. S.LasserT.RiglerR.First Fully Integrated 2-D Array of Single-Photon Detectors in Standard CMOS Technology. IEEE Photonics Technology Letters15(2003)No. 7.10.1109/LPT.2003.813387Search in Google Scholar

[12] NixonR. H.KemenyS. E.PainB.StallerC. O.FossumE. R.A 256x256 CMOS Active Pixel Sensor Camera-on-a-Chip. IEEE J. of Solid-State Circuits31(1996)20462050.10.1109/4.545830Search in Google Scholar

Published Online: 2009-09-25
Published in Print: 2007-02

© Oldenbourg Wissenschaftsverlag

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