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BY-NC-ND 3.0 license Open Access Published by De Gruyter Open Access May 27, 2014

Graphene crystal growth by thermal precipitation of focused ion beam induced deposition of carbon precursor via patterned-iron thin layers

Gemma Rius, Francesc Perez-Murano and Masamichi Yoshimura
From the journal Nanofabrication

Abstract

Recently, relevant advances on graphene as a building block of integrated circuits (ICs) have been demonstrated. Graphene growth and device fabrication related processing has been steadily and intensively powered due to commercial interest; however, there are many challenges associated with the incorporation of graphene into commercial applications which includes challenges associated with the synthesis of this material. Specifically, the controlled deposition of single layer large single crystal graphene on arbitrary supports, is particularly challenging. Previously, we have reported the first demonstration of the transformation of focused ion beam induced deposition of carbon (FIBID-C) into patterned graphitic layers by metal-assisted thermal treatment (Ni foils). In this present work, we continue exploiting the FIBID-C approach as a route for graphene deposition. Here, thin patterned Fe layers are used for the catalysis of graphenization and graphitization. We demonstrate the formation of high quality single and few layer graphene, which evidences, the possibility of using Fe as a catalyst for graphene deposition. The mechanism is understood as the minute precipitation of atomic carbon after supersaturation of some iron carbides formed under a high temperature treatment. As a consequence of the complete wetting of FIBID-C and patterned Fe layers, which enable graphene growth, the as-deposited patterns do not preserve their original shape after the thermal treatment

References

[1] Proposal for all-graphene monolithic logic circuits. J. Kang, D. Sarkar, Y. Khatami, K. Banerjee Appl. Phys. Lett. 103, 083113 (2013)Search in Google Scholar

[2] Synthesis of graphene and its applications. W. Choia, I. Lahiria, R. Seelaboyinaa,Y. S. Kang Critical Reviews in Solid State and Materials Sciences 35, 1, 52-71 (2010)Search in Google Scholar

[3] Electrostatic interactions between graphene layers and their environment. J. Sabio, C. Seoanez, S. Fratini, F. Guinea, A. H. Castro Neto, F. Sol Phys. Rev. B 77, 195409 (2008)Search in Google Scholar

[4] Grains and grain boundaries in single-layer graphene atomic patchwork quilts. P. Y. Huang, C. S. Ruiz-Vargas, A. M. van der Zande, W. S. Whitney, M. P. Levendorf, J. W. Kevek, S. Garg, J. S. Alden, C. J. Hustedt, Y. Zhu, J. Park, P. L. McEuen, D.A. Muller Nature 469, 389-392 (2011)Search in Google Scholar

[5] Electric Field Effect in Atomically Thin Carbon Films. K. S. Novoselov, A. K. Geim, S. V. Morozov, D. Jiang, Y. Zhang, S.V. Dubonos, I. V. Grigorieva, A. A. Firsov, Science 306, 666-669 (2004)Search in Google Scholar

[6] Production: Beyond sticky tape. R. Van Noorden Nature 483, S32-S33 (2012)Search in Google Scholar

[7] Graphene: synthesis and applications, P. Avouris, C. Dimitrakopoulos Materials Today 15, 3, 86-97 (2012)Search in Google Scholar

[8] A roadmap for graphene. K. S. Novoselov, V. I. Fal′ko, L. Colombo, P. R. Gellert, M. G. Schwab, K. Kim Nature 490, 192-200 (2012)Search in Google Scholar

[9] Synthesis of Patterned Nanographene on Insulators from Focused Ion Beam Induced Deposition of Carbon. G. Rius, N. Mestres, M. Yoshimura, Journal of Vacuum Science and Technology B 2012, 30(3) 03D113-1Search in Google Scholar

[10] Focused ion beam as a tool for graphene technology: Structural study of processing sequence by electron microscopy. G. Rius, A. H. Tavabi, N. Mestres, O. Eryu, T. Tanji, M.Yoshimura Jpn. J. Appl. Phys. 53 02BC22 (2014)Search in Google Scholar

[11] Metal-Induced Crystallization of Focused Ion Beam-Induced Deposition for Functional Patterned Ultrathin Nanocarbon. G. Rius, X. Borrise, N. Mestres FIB Nanostructures Lecture Notes in Nanoscale Science and Technology Volume 20,123-159 (2013)Search in Google Scholar

[12] Nanographene patterns from focused ion beam induced deposition. Structural characterization of graphene materials by XPS and Raman scattering. M. Castellino, G. Rius, A. Virga, A.Tagliaferro. Handbook of Graphene Science, Taylor and Francis Ed. - (Book chapter. Under Review)Search in Google Scholar

[13] Three-dimensional nanostructure fabrication by focused-ionbeam chemical vapor deposition. S. Matsui, T. Kaito, J. I. Fujita, M. Komuro, K. Kanda,Y. Haruyama J. Vac. Sci. Technol. B 18, 3181 (2000)Search in Google Scholar

[14] Carbon nanopillar laterally grown with electron beam-induced chemical vapor deposition. J. Fujita, M. Ishida, T. Ichihashi, Y. Ochiai, T. Kaito S. Matsui J. Vac. Sci. Technol. B 21, 2990 (2003)Search in Google Scholar

[15] Raman Spectrum of Graphene and Graphene Layers. A. C. Ferrari,J. C. Meyer, V. Scardaci, C. Casiraghi, M. Lazzeri, F. Mauri, S. Piscanec, D. Jiang, K. S. Novoselov, S. Roth, A. K. Geim PRL 97, 187401 (2006)Search in Google Scholar

[16] Raman spectroscopy of graphene and graphite: Disorder, electron-phonon coupling, doping and nonadiabatic effects. A. C. Ferrari Solid State Communications 143, 1-2, 47-57 (2007)Search in Google Scholar

[17] Edge-controlled growth and kinetics of single-crystal graphene domains by chemical vapor deposition. T. Ma, W. Ren, X. Zhang, Z. Liu, Y. Gao, L.-C. Yin, X.-.L. Ma, F. Ding, H.-M. Cheng Proc. Natl. Acad. Sci. USA 20386-20391 (2013)Search in Google Scholar

[18] Chemical Vapor Deposition of Graphene Single Crystals. Z. Yan, Z. Peng, J. M. Tour Accounts of Chemical Research Article ASAP (2014)Search in Google Scholar

[19] Raman Spectroscopy of Graphene Edges. C. Casiraghi, A. Hartschuh, H. Qian, S. Piscanec, C. Georgi, A. Fasoli, K. S. Novoselov, D. M. Basko, A. C. Ferrari Nano Lett., 9, 4, 1433-1441 (2009)Search in Google Scholar

[20] The P, T Phase and Reaction Diagram for Elemental Carbon. F. P. Bundy Journal of Geophysical Research, 85, B12, 6930-6936 (1980)Search in Google Scholar

[21] Phase Diagram of Quasi-Two-Dimensional Carbon, From Graphene to Diamond. A. G. Kvashnin, L. A. Chernozatonskii, B.\ I. Yakobson, P. B. Sorokin Nano Lett. 14 (2), 676-681 (2014)Search in Google Scholar

[22] The surface science of graphene: Metal interfaces, CVD synthesis, nanoribbons, chemical modifications, and defects. M. Batzill Surface Science Reports 67, 3-4, 1, 83-115 (2012)Search in Google Scholar

[23] Prediction of carbon nanotube growth success by the analysis of carbon-catalyst binary phase diagrams. C. P. Deck, K. Vecchio Carbon 44, 2, 267-275 (2006)Search in Google Scholar

[24] Growth of large-area graphene films from metal-carbon melts. S. Amini, J. Garay, G. Liu, A. A. Balandin, R. Abbaschian J. Appl. Phys. 108, 094321 (2010)Search in Google Scholar

[25] Gas-assisted focused electron beam and ion beam processing and fabrication. I. Utke, P. Hoffmann, J. Melngailis J. Vac. Sci. Technol. B 26, 1197 (2008)Search in Google Scholar

[26] Comparison of FIB-CVD and EB-CVD growth characteristics. J. Igaka, K. Kanda, Y. Haruyama, M. Ishida, Y. Ochiai, J.-I. Fujita, T. Kaito, S. Matsui Microelectronic Engineering 83, 4-9, 1225-1228 (2006) Search in Google Scholar

Received: 2014-3-21
Accepted: 2014-2-25
Published Online: 2014-5-27
Published in Print: 2014-1-1

© 2014 Gemma Rius et al.

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

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