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BY-NC-ND 3.0 license Open Access Published by De Gruyter Open Access May 27, 2014

Nitrogen as a carrier gas for regime control in focused electron beam induced deposition

Stefan Wachter, Marco Gavagnin, Heinz D. Wanzenboeck, Mostafa M. Shawrav, Domagoj Belić and Emmerich Bertagnolli
From the journal Nanofabrication