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BY-NC-ND 3.0 license Open Access Published by De Gruyter Open Access July 7, 2014

Focused Ion Beam Processing of Superconducting Junctions and SQUID Based Devices

  • David C. Cox EMAIL logo , John C. Gallop and Ling Hao
From the journal Nanofabrication


Focused ion beam (FIB) has found a steady and growing use as a tool for fabrication, particularly in the length-scale of micrometres down to nanometres. Traditionally more commonly used for materials characterisation, FIB is continually finding new research areas in a growing number of laboratories. For example, over the last ten years the number of FIB instruments in the U.K. alone has gone from single figures, largely supplied by a single manufacturer, to many tens of instruments supplied by several competing manufacturers. Although the smaller of the two research areas, FIB fabrication has found itself to be incredibly powerful in the modification and fabrication of devices for all kinds of experimentation. Here we report our use of FIB in the production of Superconducting QUantum Interference Devices (SQUIDs) and other closely related devices for metrological applications. This is an area ideally suited to FIB fabrication as the required precision is very high, the number of required devices is relatively low, but the flexibility of using FIB means that a large range of smallbatch, and often unique, devices can be constructed quickly and with very short lead times.


[1] Clarke J., Braginski A., ed., The SQUID Handbook Fundamentals and Technology of SQUIDs and SQUID Systems, 2004, 1, New York: Wiley–VCH. Search in Google Scholar

[2] Koelle D., Kleiner R., Ludwig F., Danster E., Clarke J., High-transition-temperature superconducting quantum interference devices, Rev. Mod. Phys., 1999, 71 631; Erratum, Rev. Mod. Phys., 1999, 71, 1249. Search in Google Scholar

[3] Gallop J.C., SQUIDs: some limits to measurement, Supercond. Sci. Technol., 2003, 16, 1575. Search in Google Scholar

[4] Hilgenkamp H., Mannhart J., Grain boundaries in high-Tc superconductors, Rev. Mod. Phys., 2002, 74, 485. Search in Google Scholar

[5] Veauvy C., Hasselbach K., Mailly D., Scanning μ-superconduction quantum interference device force microscope, Rev. Sci. Instrum., 2002, 73, 3825-3830. Search in Google Scholar

[6] Hilgenkamp H., Ariando, Smilde H.J., Blank D., Rijnders G., Rogalla H., et al., Ordering and manipulation of the magnetic moments in large-scale superconducting pi-loop arrays, Nature, 2003, 422, 50-53. Search in Google Scholar

[7] Hao L., Macfarlane J.C., Lam S.K.H., Foley C.P., Josephs-Franks P., Gallop J.C., Inductive Sensor Based on Nano-scale SQUIDs, IEEE Trans. Appl. Supercond., 2005, 15, 514-517. Search in Google Scholar

[8] Awschalom D.D., Rozen J.R., Ketchen M.B., Gallagher W.J., Kleinsasser A.W., Sandstrom R.L., Bumble B., Low‐noise modular microsusceptometer using nearly quantum limited dc SQUIDs, Appl. Phys. Lett., 1986, 53, 2108. Search in Google Scholar

[9] Lam S.K.H., Tilbrook D.L., Development of a niobium nanosuperconducting quantum interference device for the detection of small spin populations, Appl. Phys. Lett., 2003, 82, 1078-1080. Search in Google Scholar

[10] Cleuziou J.P., Wernsdorfer W., Bouchiat V., Ondarcuhu T., Nonthioux M., Carbon nanotube superconducting quantum interference device, Nat. Nanotechnol., 2006, 1, 53-59. Search in Google Scholar

[11] Gallop J., Josephs-Franks P.W., Davis J., Hao L., Macfarlane J., Miniature dc SQUID devices for the detection of single atomic spin-flips, Physica C, 2002, 368, 109-113. Search in Google Scholar

[12] Hao L., Gallop J.C., Cox D., Romans E., Macfarlane J.C., Chen J., Focused Ion Beam NanoSQUIDs as Novel NEMS Resonator Readouts, IEEE Trans. Appl. Supercond., 2009, l19, 693-696. Search in Google Scholar

[13] Troeman A.G.P., Derking H., Borger B., Pleikies J., Veldhuis D., Hilgenkamp H., NanoSQUIDs Based on Niobium Constrictions, Nano Lett., 2007, 7, 2152-2156. Search in Google Scholar

[14] Hao L., Macfarlane J.C., Gallop J.C., Romans E., Cox D., Hutson D., Chen J., Spatial resolution assessment of Nano-SQUIDs made by focused ion beam, IEEE Trans. Appl. Supercond., 2007, 17, 742-745. Search in Google Scholar

[15] Hao L., Macfarlane J.C., Gallop J.C., Cox D., Beyer J., Drung D., Schurig T., Measurement and noise performance of nano-superconducting-quantum-interference devices fabricated by focused ion beam, Appl. Phys. Lett., 2008, 92, 192507. Search in Google Scholar

[16] Calculated using SRIM (Stopping Range of Ions in Matter). Search in Google Scholar

[17] Additional calculations using SUPRE (Surrey University Sputter Profile Resolution and Energy deposition programme). www. htm. Search in Google Scholar

[18] Nanometer Pattern Generation System (NPGS). www.jcnabity. com. Search in Google Scholar

[19] Hao L., Aßmann C., Gallop J.C., Cox D.C., Ruede F., Kazakova O., et al., Detection of Single Magnetic Nanobead with a Nano-Superconducting Quantum Interference Device, Appl. Phys. Lett., 2011, 98, 092504. Search in Google Scholar

[20] Vasyukov D., Anahory Y., Embon L., Halbertal D., Cuppens J., Neeman L., et al., A scanning superconducting quantum interference device with single electron spin sensitivity, Nat. Nanotechnol., 2013, 8, 639-644. Search in Google Scholar

[21] Hao L., Cox D.C., Gallop J.C., Chen J., Rozhko S., Blois A., Romans E.J., Coupled NanoSQUIDs and Nano-Electromechanical Systems (NEMS) Resonators, IEEE Trans. Appl. Supercond., 2013, 23, 1800304. Search in Google Scholar

[22] Jin Y.R, Song X,H., Zhang D.L., Grain-size dependence of superconductivity in dc sputtered Nb films, Science in China Series G, Physics Mechanics & Astronomy, 2009, 52, 1289-1292. Search in Google Scholar

[23] Bose S., Raychaudri P., Banerjee R., Vasa P., Ayyub P., Mechanism of the Size Dependence of the Superconducting Transition of Nanostructured Nb, Phys. Rev. Lett., 2005, 95, 147003. Search in Google Scholar

[24] Work currently in progress.Search in Google Scholar

Received: 2014-3-20
Accepted: 2014-5-13
Published Online: 2014-7-7

© 2014 David C. Cox et al.

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

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