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BY-NC-ND 3.0 license Open Access Published by De Gruyter Open Access December 3, 2011

Multiaxis interferometric displacement measurement for local probe microscopy

Josef Lazar EMAIL logo , Jan Hrabina , Mojmír Šerý , Petr Klapetek and Ondřej Číp
From the journal Open Physics


We present an overview of design approaches for nanometrology measuring setups with a focus on interferometry techniques and associated problems. The design and development of a positioning system with interferometric multiaxis monitoring and control is presented. The system is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length.

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Published Online: 2011-12-3
Published in Print: 2012-2-1

© 2011 Versita Warsaw

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

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