Abstract
In this work studies of some electrical parameters of the MOS structure based on 3C-SiC substrate are presented. The effective contact potential difference ϕMS, the barrier height at the gate-dielectric interface E BG and the flat-band in semiconductor voltage V FB were measured using several electric and photoelectric techniques. Values of these parameters obtained on structures with different gate areas decrease monotonically with increasing parameter R, defined as the ratio of the gate perimeter to the gate area. Such behavior confirmed results obtained on MOS structures on silicon substrate and also supported our hypothesis that the mechanical stress in the dielectric layer under the metal gate causes non uniform distribution of some parameters over the gate area of MOS structure.
[1] H. Morkoc, S. Strite, G. B. Gao, M.E. Lin, B. Sverdlov, M. Burns, J. Appl. Phys. 76, 1363 (1994) http://dx.doi.org/10.1063/1.35846310.1063/1.358463Search in Google Scholar
[2] M. Ruff, H. Mitlehner, R. Helbig, IEEE T. Electron Dev. 41, 1040 (1994) http://dx.doi.org/10.1109/16.29331910.1109/16.293319Search in Google Scholar
[3] M. Shur, SiC parameters handbook, http://www.ioffe.ru/SVA/NSM/Semicond/SiC Search in Google Scholar
[4] R. Schorner, P. Friedrichs, D. Peters, IEEE T. Electron Dev. 46, 533 (1999) http://dx.doi.org/10.1109/16.74887310.1109/16.748873Search in Google Scholar
[5] S. M. Hu, J. Appl. Phys. 70, R53 (1991) http://dx.doi.org/10.1063/1.34928210.1063/1.349282Search in Google Scholar
[6] I. de Wolf, H.E. Maes, S.K. Jones, J. Appl. Phys. 79, 7148 (1996) http://dx.doi.org/10.1063/1.36148510.1063/1.361485Search in Google Scholar
[7] K. F. Dombrowski, I. de Wolf, B. Dietrich, J. Appl. Phys. 75, 2450 (1999) 10.1063/1.125044Search in Google Scholar
[8] C. H. Bjorkman, J. T. Fitch, G. Lucovsky, Appl. Phys. Lett. 56, 1983 (1990) http://dx.doi.org/10.1063/1.10322810.1063/1.103228Search in Google Scholar
[9] H. M. Przewlocki, H. Z. Massoud, J. Appl. Phys. 92, 2198 (2002) http://dx.doi.org/10.1063/1.148949910.1063/1.1489499Search in Google Scholar
[10] A. Kudla, H.M. Przewlocki, L. Borowicz, D. Brzezinska, W. Rzodkiewicz, Thin Solid Films 450, 203 (2004) http://dx.doi.org/10.1016/j.tsf.2003.10.14710.1016/j.tsf.2003.10.147Search in Google Scholar
[11] H. M. Przewlocki, A. Kudla, D. Brzezinska, H. Z. Massoud, Microelectron. Eng. 72, 165 (2004) http://dx.doi.org/10.1016/j.mee.2003.12.03110.1016/j.mee.2003.12.031Search in Google Scholar
[12] H. M. Przewlocki, A. Kudla, D. Brzezinska, H. Z. Massoud, J. Telecommun. Inf. Technol. 1, 34 (2005) Search in Google Scholar
[13] K. Piskorski, H. M. Przewlocki, Bull. Pol. Acad. Sci.-Te. 54, 461 (2006) Search in Google Scholar
[14] K. Piskorski, H. M. Przewlocki, J. Telecommun. Inf. Technol. 3, 49 (2007) Search in Google Scholar
[15] H. M. Przewlocki, A. Kudla, K. Piskorski, D. Brzezinska, Thin Solid Films 516, 4184 (2008) http://dx.doi.org/10.1016/j.tsf.2007.11.00510.1016/j.tsf.2007.11.005Search in Google Scholar
[16] S. Porebski, P. Machalica, J. Zajac, L. Borowicz, A. Kudla, H. M. Przewlocki, IEE Proc.-Sci. Meas. Technol. 150, 148 (2003) http://dx.doi.org/10.1049/ip-smt:2003062310.1049/ip-smt:20030623Search in Google Scholar
[17] E. H. Nicollian, J. R. Brews, MOS Physics and Technology (J. Wiley, New York, 1982) Search in Google Scholar
[18] H. M. Przewlocki, J. Appl. Phys. 85, 6610 (1999) http://dx.doi.org/10.1063/1.37016910.1063/1.370169Search in Google Scholar
[19] H. M. Przewlocki, Solid State Electron. 45, 1241 (2001) http://dx.doi.org/10.1016/S0038-1101(00)00274-410.1016/S0038-1101(00)00274-4Search in Google Scholar
[20] A. Jakubowski, H. M. Przewlocki, S. Krawczyk, Rev. Phys. Appl. 17, 473 (1982) http://dx.doi.org/10.1051/rphysap:0198200170804730010.1051/rphysap:01982001708047300Search in Google Scholar
[21] R. H. Fowler, Phys. Rev. 38, 45 (1931) http://dx.doi.org/10.1103/PhysRev.38.4510.1103/PhysRev.38.45Search in Google Scholar
[22] V. V. Afanas’ev, Internal Photoemission Spectroscopy. Principles and Applications (Elsevier, Amsterdam, 2008) 10.1016/B978-008045145-9.50007-1Search in Google Scholar
[23] E. D. Palik et al., Handbook of optical constants of solids (Academic Press Handbook Series, Orlando Fl., 1985) Search in Google Scholar
[24] O. S. Heavens, Optical properties of thin solid films (Academic Press, New York, 1955) Search in Google Scholar
[25] C. N. Berglund, R. J. Powell, J. Appl. Phys. 40, 5093 (1969) http://dx.doi.org/10.1063/1.165735810.1063/1.1657358Search in Google Scholar
© 2013 Versita Warsaw
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.
