Accessible Unlicensed Requires Authentication Published by De Gruyter May 26, 2013

Study of p-6P Molecule Growth by In-Situ and Real-Time Spectroscopic Ellipsometry

Studie des Wachstums von p-6P-Moleküle mittels in-situ und real-time Ellipsometrie
Zhi Dan Yan, Li Dong Sun, P. Zeppenfeld, Chunguang Hu and Xiao Tang Hu
From the journal Materials Testing


As an important analytical method for thin film growth, spectroscopic ellipsometry plays an active role in investigating thin film growth mechanism of molecular beam epitaxial especially under in-situ and real-time environment. In this paper, the dynamic data presenting p-6P molecule film growth on mica substrates at different evaporation temperatures have been obtained under ultra-high vacuum by a self-designed in-situ and real-time spectroscopic ellipsometry system. It is shown that the strength of p-6P molecular ellipsometry signal increases as the amount of molecule deposited increases, and there is a negative characteristic peak at 3.9 eV, caused by electron transition of the p-6P molecule from the highest occupied molecular orbital to the lowest unoccupied molecular orbital, which can be considered to be an optical characteristics of p-6P molecule.


Als ein wichtiges analytisches Verfahren für das Dünnschichtwachstum gewinnt die spektroskopische Ellipsometrie zunehmende Bedeutung in der Untersuchung des epitaktischen Wachstums von Molekülsträngen, insbesonders in in-situ und real-time Umgebungen. In dem vorliegenden Beitrag wird über eine Studie berichtet, in der die dynamischen Daten, die das p-6P-Molekülwachstum auf Glimmer-Substraten zeigen, mittels eines eigens entwickelten in-situ und real-time spektroskopischen Ellipsometriesystems im Ultra-Hoch-Vakuum gewonnen wurden. Es wird gezeigt, dass die Signalstärke der Ellipsometrie mit der Menge an abgelagerten Molekülen zunimmt und dass sich eine negative Charakteristik als Peak bei 3,9 eV ausbildet, die durch den Elektronenübergang im p-6P-Molekül von der höchsten zur niedrigsten Schale verursacht wird und die als optische Charakteristik des p-6P-Moleküls angesehen werden kann.

Zhidan Yan received the BE., M.E., and Dr. Eng. degrees in instrument science and techology from Tianjin University, Tianjin, China in 2005, 2007 and 2010, respecitvely. From 2007 to 2010 he worked at the experiment institute of physics in Johannes Kepler Universität Linz focusing on the real-time and in-situ fluorescence microscopy for organic thin-film growth as a joint-training PhD. student supported by both chinese and austrian scholarships. He is currently the teacher at the colleage of control and information engineering, China university of petroleum (East China). Dr. LiDong SUN and Prof. P. Zeppenfeld are now working for the experiment institute of physics, and Dr. Chunguang Hu is now the teacher at Tianjin University.


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Published Online: 2013-05-26
Published in Print: 2013-02-01

© 2013, Carl Hanser Verlag, München