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Licensed Unlicensed Requires Authentication Published by De Gruyter November 17, 2014

Synthesis and characterization of zirconium nitride coatings by cathodic arc sputtering technique

M. N. Sarwar, M. S. Awan and S. Akbar


Polycrystalline zirconium nitride films (560 nm) were deposited on stainless steel (SS-316) substrates using the multi-target cathodic arc sputtering technique. Deposition was carried out under N2 reactive atmosphere (4 × 10−3 mbar) at two different temperatures, 150 and 200 °C. X-ray diffraction studies show that reflections from planes changed from (111) to (200) for deposition temperatures of 150 °C and 200 °C, respectively. Films deposited at 150 °C and 200 °C bear a critical load of 6.4 N and 6.8 N respectively, showing better adherence at higher temperature. This may be the result of film–substrate diffusion at the interface.

* M. N. Sarwar, ISIT, Islamabad, Pakistan. Tel.: +92 3215414649, E-mail:

Paper presented at International Conference on Solid State Physics 2013 (ICSSP13), 02 – 06 December 2013, University of the Punjab, Lahore, Pakistan


[1] D.F.Arias, Y.C.Arango, A.Devia: Appl. Surf. Sci.253 (2006) 16831690. 10.1016/j.apsusc.2006.03.017Search in Google Scholar

[2] J.X.Deng, J.H.Liu, J.L.Zhao, W.L.Song, M.Niu: Wear264 (2008) 298307. 10.1016/j.wear.2007.03.014Search in Google Scholar

[3] M.Wittmer: Appl. Phys. Lett.37 (1980) 540. 10.1063/1.91978Search in Google Scholar

[4] C.Y.Ting: Vac. Sci. Technol.21 (1982) 14. 10.1116/1.571700Search in Google Scholar

[5] U.Beck, G.Reiners, I.Urban, H.A.Jehn, U.Kopacz, H.Sahack: Surf. Coat. Technol.61 (1993) 215. 10.1016/0257-8972(93)90228-GSearch in Google Scholar

[6] V.A.Mernagh, T.C.Kelly, M.Ahern, A.D.Kennedy, A.P.M.Adriaansen, P.P.J.Ramackers, L.McDonnel, R.Kockoek: Surf. Coat. Technol.49 (1991) 462. 10.1016/0257-8972(91)90101-2Search in Google Scholar

[7] A.J.Perry, J.R.Treglio, A.F.Tian: Surf. Coat. Technol.76/77 (1995) 815820. 10.1016/0257-8972(95)02628-2Search in Google Scholar

[8] J.V.Ramana, S.Kumar, C.David, A.K.Ray, V.S.Raju: Mater. Lett.43 (2000) 7376. 10.1016/S0167-577X(99)00233-5Search in Google Scholar

[9] B.Jüttner: Beitr. Plasmaphys.19 (1979) 2548. 10.1002/ctpp.19790190104Search in Google Scholar

[10] D.E.Wolfe, J.Singh, K.Narasimhan: Surf. Coat. Technol.160 (2002) 206218. 10.1016/S0257-8972(02)00404-8Search in Google Scholar

Received: 2014-02-27
Accepted: 2014-06-03
Published Online: 2014-11-17
Published in Print: 2014-11-10

© 2014, Carl Hanser Verlag, München