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Licensed Unlicensed Requires Authentication Published by De Gruyter November 17, 2014

Synthesis and characterization of zirconium nitride coatings by cathodic arc sputtering technique

  • M. N. Sarwar , M. S. Awan and S. Akbar


Polycrystalline zirconium nitride films (560 nm) were deposited on stainless steel (SS-316) substrates using the multi-target cathodic arc sputtering technique. Deposition was carried out under N2 reactive atmosphere (4 × 10−3 mbar) at two different temperatures, 150 and 200 °C. X-ray diffraction studies show that reflections from planes changed from (111) to (200) for deposition temperatures of 150 °C and 200 °C, respectively. Films deposited at 150 °C and 200 °C bear a critical load of 6.4 N and 6.8 N respectively, showing better adherence at higher temperature. This may be the result of film–substrate diffusion at the interface.

* M. N. Sarwar, ISIT, Islamabad, Pakistan. Tel.: +92 3215414649, E-mail:

Paper presented at International Conference on Solid State Physics 2013 (ICSSP13), 02 – 06 December 2013, University of the Punjab, Lahore, Pakistan


[1] D.F.Arias, Y.C.Arango, A.Devia: Appl. Surf. Sci.253 (2006) 16831690. 10.1016/j.apsusc.2006.03.017Search in Google Scholar

[2] J.X.Deng, J.H.Liu, J.L.Zhao, W.L.Song, M.Niu: Wear264 (2008) 298307. 10.1016/j.wear.2007.03.014Search in Google Scholar

[3] M.Wittmer: Appl. Phys. Lett.37 (1980) 540. 10.1063/1.91978Search in Google Scholar

[4] C.Y.Ting: Vac. Sci. Technol.21 (1982) 14. 10.1116/1.571700Search in Google Scholar

[5] U.Beck, G.Reiners, I.Urban, H.A.Jehn, U.Kopacz, H.Sahack: Surf. Coat. Technol.61 (1993) 215. 10.1016/0257-8972(93)90228-GSearch in Google Scholar

[6] V.A.Mernagh, T.C.Kelly, M.Ahern, A.D.Kennedy, A.P.M.Adriaansen, P.P.J.Ramackers, L.McDonnel, R.Kockoek: Surf. Coat. Technol.49 (1991) 462. 10.1016/0257-8972(91)90101-2Search in Google Scholar

[7] A.J.Perry, J.R.Treglio, A.F.Tian: Surf. Coat. Technol.76/77 (1995) 815820. 10.1016/0257-8972(95)02628-2Search in Google Scholar

[8] J.V.Ramana, S.Kumar, C.David, A.K.Ray, V.S.Raju: Mater. Lett.43 (2000) 7376. 10.1016/S0167-577X(99)00233-5Search in Google Scholar

[9] B.Jüttner: Beitr. Plasmaphys.19 (1979) 2548. 10.1002/ctpp.19790190104Search in Google Scholar

[10] D.E.Wolfe, J.Singh, K.Narasimhan: Surf. Coat. Technol.160 (2002) 206218. 10.1016/S0257-8972(02)00404-8Search in Google Scholar

Received: 2014-02-27
Accepted: 2014-06-03
Published Online: 2014-11-17
Published in Print: 2014-11-10

© 2014, Carl Hanser Verlag, München

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