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Licensed Unlicensed Requires Authentication Published by De Gruyter November 17, 2014

Synthesis and characterization of zirconium nitride coatings by cathodic arc sputtering technique

  • M. N. Sarwar , M. S. Awan and S. Akbar

Abstract

Polycrystalline zirconium nitride films (560 nm) were deposited on stainless steel (SS-316) substrates using the multi-target cathodic arc sputtering technique. Deposition was carried out under N2 reactive atmosphere (4 × 10−3 mbar) at two different temperatures, 150 and 200 °C. X-ray diffraction studies show that reflections from planes changed from (111) to (200) for deposition temperatures of 150 °C and 200 °C, respectively. Films deposited at 150 °C and 200 °C bear a critical load of 6.4 N and 6.8 N respectively, showing better adherence at higher temperature. This may be the result of film–substrate diffusion at the interface.


* M. N. Sarwar, ISIT, Islamabad, Pakistan. Tel.: +92 3215414649, E-mail:

Paper presented at International Conference on Solid State Physics 2013 (ICSSP13), 02 – 06 December 2013, University of the Punjab, Lahore, Pakistan


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Received: 2014-02-27
Accepted: 2014-06-03
Published Online: 2014-11-17
Published in Print: 2014-11-10

© 2014, Carl Hanser Verlag, München

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