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TEM-Präparation in drei Raumrichtungen zur Defektanalyse

TEM Preparation in Three Spatial Directions for a Defect Analysis
Lutz Hillmann , Robby Prang , Uwe Mühle and Ingo Österreicher
From the journal Practical Metallography

Kurzfassung

Es wird ein Verfahren vorgestellt, mit dessen Hilfe Defekte in siliziumbasierten Halbleiterbauelementen in allen drei Raumrichtungen für eine TEM-Untersuchung präpariert werden. Die Groblokalisierung der Defekte erfolgte zunächst durch elektrische Methoden. Durch die spezielle Lage der Defekte und den Aufbau der elektrischen Schaltungen in bestimmten Halbleiterstrukturen ist es jedoch nicht immer möglich, deren Ort hinreichend genau zu bestimmen. Die Festlegung der finalen Lage der TEM-Lamelle erfordert daher zunächst eine genauere Bestimmung der Defektposition. Das erfolgt durch eine oberflächenparallele TEM-Präparation („Plan-view“) des auffälligen Bereiches mit anschließender Untersuchung im TEM. Nach dem Auffinden der Defekte wurden diese Fehler in beiden Richtungen senkrecht zur ersten Lamelle präpariert und analysiert.

Abstract

A method is presented by means of which defects in silicon-based semiconductor components are prepared for a TEM examination in all of the three spatial directions. Defects first are roughly localized by electric methods. However, the specific location of such defects and the structure of electric circuitry in certain semiconductor configurations do not always allow a sufficiently precise determination of their locations. Therefore, ascertaining the final position of the TEM lamella requires that the position of defects can be determined even more accurately. This is done by a surface-parallel TEM preparation (a “plan view”) of the conspicuous area, which is followed by an examination in the TEM. After the defect locations were discovered those faults were prepared and analyzed in both directions perpendicular to the first lamella.


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Dr. Lutz Hillmann born in 1966, 1993 Diploma thesis in Physics at the TU Dresden, 1996 — 1998 workings as journalist, Doctoral thesis in 1998 at the TU Dresden in Material science, Since 1998 working at the TEM group of SIMEC/Infineon/Qimonda Dresden.

Dr. Uwe Mühle born in 1960; 1988 Diploma thesis in Physical metallurgy at the TU Bergakademie Freiberg; 1988-1992 Materials analytics in non-ferrous metallurgy; Doctoral thesis in 1997 at the TU Bergakademie Freiberg about Microstructural related modelling of deformation behaviour of a Co-based superallay; since 1996 head of TEM-group in SIMEC/Infineon/Qimonda Dresden.


Literatur/References

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Erhalten: 2008-4-22
Angenommen: 2009-2-11
Online erschienen: 2013-05-05
Erschienen im Druck: 2009-06-01

© 2009, Carl Hanser Verlag, München

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