Poly(dimethyl-methyltrifluoropropyl-methylvinyl)siloxanes (PFMVS) with various contents of trifluoropropyl groups were prepared by ring-opening copolymerization of 2,4,6-trimethyl-2,4,6-tris(3,3,3-trifluoropropyl) cyclotrisiloxane (D 3 F ), octamethylcyclotetrasiloxane (D 4 ) and 1,3,5,7-tetramethyl tetravinylcyclotetrasiloxane (D 4 Vi ). All the polymers were characterized by IR, 1 HNMR, 29 SiNMR, gel permeation chromatography (GPC), thermogravimetric analysis (TGA), and differential scanning calorimetry (DSC) measurements. The results show that methyltrifluoropropyl-siloxane units in the copolymer can disrupt the molecular regularity and lead to noncrystalline copolymers with low glasstransition temperatures. Moreover, the onset temperatures of thermal degradation and the glass transition temperatures of polymers decrease gradually with the content of trifluoropropyl groups increasing. Then the thermal stability and solvent resistance of elastomers based on PFMVSs were measured. The data of TGA indicate that the thermal stability of fluorosilicone elastomers are less than conventional methyl vinyl silicone rubber (MVQ), but the fluorosilicone elastomers have outstanding solvent resistance. The content of the trifluoropropyl groups influences the performances of elastomer to a certain degree.