Bernt Ketterer, Hristina Vasilchina, Klaus Seemann, Sven Ulrich, Heino Besser, Wilhelm Pfleging, Tatjana Kaiser, Christel Adelhelm
June 11, 2013
Cathode material for Li-ion batteries can be synthesised by r.f. magnetron sputtering of LiCoO 2 targets in a pure Ar plasma. This technique is suitable for large-scale implementation in foil coating set-ups. By choosing the process parameters and by employing post heat treatment nanocrystalline, stoichiometrical LiCoO 2 films can be fabricated which exhibit the desired high temperature phase. The determination of the elementary composition is possible by optical emission spectroscopy including plasma stimulation and carrier gas temperature extraction. The proof of crystal structure is carried out by X-ray diffraction and Raman spectroscopy. Heat treatment can be conventionally realised in a furnace or by laser impact. With regard to increasing the power density, the surface of the cathode material can be enhanced six-fold by laser-assisted surface patterning.