Yvonne Ritz, Agata Masalska, Michael Hecker, Teodor Gotszalk, Ehrenfried Zschech
May 20, 2013
The characterization of nanoscale regions in present and future device structures of leading-edge microelectronic products requires probes with dedicated features tailored on the nanoscale. SPM tips are used not only for conventional AFM characterization, but also for electrical, thermal and optical investigation of devices. For particular applications as nano-Raman spectroscopy or conductive AFM, highly reproducible metal tips or metallized tips are needed. In this paper, new approaches to tailor those tips using the FIB technique, and to characterize the tips using dedicated structures and adapted AFM methods are described. Based on a numerical procedure, the tip quality is described quantitatively. The described preparation and calibration techniques offer new possibilities for the routine application of nanostructures and nanodevices as needed for advanced SPM techniques and nanosensors.