Electron Backscatter Diffraction (EBSD) is a sensitive method to analyze samples with regard to their surface deformation condition. Hence, a possibly planar cross section without edge rounding as well as a best possible sample preparation are essential for the examination of edge areas up to the edge. Both objectives are quite contrary to each other, so that a comprehensive examination is important. Using Differential Interference Contrast (DIC) and Confocal Laser Scanning Microscopy (CLSM) and taking the example of soft pure iron, it was examined how different grinding media as well as mounting resins affect the cross section. The preparation quality was quantified by means of the EBSD Image Quality (IQ). The findings obtained were applied to the preparation of harder, technologically more relevant ferrous materials. It could be evidenced that the preparation using epoxy resin in combination with hardness regulator is a feasible method which meets both requirements.