Volatile organic compounds (VOC) containing gases from semiconductor industries are toxic to human health, and, therefore, need to be controlled. A bench scale wire-pipe type pulsed corona discharge induced plasma reactor was used to decompose these compounds from dry air. The concentration of VOCs and by-products are measured by both gas/chromatography and Fourier Transform InfraRed Spectroscopy systems. The removal efficiencies for both xylene and trichloroethylene depends on the residence time and applied voltage and a 100% removal efficiency was achieved for both 200 ppm o-xylene and TCE with the residence time below 2.5 s and applied voltage of 25 kV. When xylene and TCE mixture was used, xylene removal is enhanced while TCE removal is reduced. The mechanism of destruction process and discharge by-products are also discussed in detail.