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Advanced Optical Technologies

Editor-in-Chief: Pfeffer, Michael


CiteScore 2017: 1.31

SCImago Journal Rank (SJR) 2017: 0.530
Source Normalized Impact per Paper (SNIP) 2017: 1.268

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2192-8584
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Volume 2, Issue 2

Issues

Practical optimization of a coating deposition process by application of hybrid monitoring strategies in an industrial production environment

Mario Held
  • Bte Bedampfungstechnik GmbH, Am Ganzacker 2, D-56479 Elsoff, Germany
  • Friedrich-Schiller-University Jena, Institute of Applied Physics, Abbe Center of Photonics, Albert-Einstein-Str. 15, D-07745 Jena, Germany
  • Other articles by this author:
  • De Gruyter OnlineGoogle Scholar
/ Steffen Wilbrandt / Olaf Stenzel / Norbert Kaiser / Andreas Tünnermann
  • Friedrich-Schiller-University Jena, Institute of Applied Physics, Abbe Center of Photonics, Albert-Einstein-Str. 15, D-07745 Jena, Germany
  • Fraunhofer IOF, Albert-Einstein-Str.7, D-07745 Jena, Germany
  • Other articles by this author:
  • De Gruyter OnlineGoogle Scholar
Published Online: 2012-11-29 | DOI: https://doi.org/10.1515/aot-2012-0062

Abstract

The applicability of broadband optical monitoring to an industrial optical coating production environment is investigated. Different monitoring strategies have been applied to the deposition of beamsplitters and longpass edge filters by electron beam evaporation without any plasma or ion assistance. While the shift and reproducibility in the optical constants were poorly specified, pure optical broadband monitoring of the coatings did not prove superior to traditional quartz crystal monitoring. On the contrary, the introduction of a hybrid monitoring strategy that combines quartz crystal and broadband optical monitoring led to significant improvements in the coating performance reproducibility compared to a pure quartz crystal monitoring approach. Accompanying computational manufacturing experiments performed for the beamsplitter design reveal the same trend.

Keywords: beamsplitter; electron beam evaporation; longpass filter; optical monitoring; quartz crystal monitoring; OCIS codes: 310.1860; 310.6860; 310.3840; 310.4165; 310.1620

References

About the article

Mario Held

Mario Held was born in Hachenburg, Germany, on December 7, 1976. He received his graduate in Engineering and Business from University Siegen, Germany, in 2003. From 2004, he has worked as a development engineer for optical coatings at the BTE Bedamp-fungstechnik GmbH in Elsoff, Germany.

Steffen Wilbrandt

Steffen Wilbrandt was born in Plauen, Germany on January 13, 1972. He finished his diploma thesis at the Physics Department of Chem-nitz University of Technology, Germany, in 1998. He received his PhD from Friedrich-Schiller-University in Jena, in 2006. From 2002, he has worked at the Optical Coating Department of Fraunhofer Institute for Applied Optics and Precision Engineering IOF in Jena, Germany.

Olaf Stenzel

Olaf Stenzel finished his diploma thesis in laser spectroscopy at the Physics Department of Moscow State University, Russia, in 1986. He received his PhD from Chemnitz University of Technology, Germany, in 1990 and habilitated there in 1999 in the field of optical proper-ties of heterogeneous optical coatings. From 2001, he has worked at the Optical Coating Department of Fraunhofer Institute for Applied Optics and Precision Engineering IOF in Jena, Germany. He is the author of The Physics of Thin Film Optical Spectra: An Introduction, (Springer 2005).

Norbert Kaiser

Norbert Kaiser received his Diplom Physiker in 1974, his Dr. rer. nat. in 1983 and his Dr. habil in 1999 from the University of Jena, Germany. He is the Professor for Physics and Technology of Thin Films at the Technical University Jena. He heads the Optical Thin Film Department and is the Vice Director of the Fraunhofer Institute for Applied Optics and Precision Engineering in Jena.

Andreas Tünnermann

Andreas Tünnermann was born in Ahnsen, Germany on June 10, 1963. He received a Diploma and a PhD degree in Physics from the University of Hannover in 1988 and 1992, respectively. In 1997, he received a habilitation qualification. He was head of the Department of Development at the Laser Zentrum Hannover from 1992 to 1997. In the beginning of 1998, he joined the Friedrich-Schiller-University in Jena, Germany, as a Professor and Director of the Institute of Applied Physics. In 2003, he additionally became the Director of the Fraunhofer Institute for Applied Optics and Precision Engineering IOF in Jena. He is a sought-after expert in the Optics and Photonics Industry. He is the founder and member of the Board of Directors of the industry-driven cluster OptoNet Jena, one of the most dynamic regional optics clusters in Europe.

Andreas Tünnermann is a member of various societies, e.g., of the German Physical Society and the Optical Society of America. His research activities on Applied Quantum Electronics have been awarded, e.g., with the Gottfried-Wilhelm-Leibniz Award (2005).


Corresponding author: Steffen Wilbrandt, Fraunhofer IOF, Albert-Einstein-Str.7, D-07745 Jena, Germany


Received: 2012-10-17

Accepted: 2012-11-02

Published Online: 2012-11-29

Published in Print: 2013-04-01


Citation Information: Advanced Optical Technologies, Volume 2, Issue 2, Pages 189–196, ISSN (Online) 2192-8584, ISSN (Print) 2192-8576, DOI: https://doi.org/10.1515/aot-2012-0062.

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