[1] Schütze A. et al., IEEE Trans. Plasma Sci., 1998, 26(6), 1685 CrossrefGoogle Scholar

[2] Kunhardt E.E., IEEE Trans. Plasma Sci., 2000, 28(1), 189 CrossrefGoogle Scholar

[3] Laroussi M., IEEE Trans. Plasma Sci., 2002, 30(4), 1409 CrossrefGoogle Scholar

[4] Duan Y.et al., IEEE Trans. Plasma Sci., 2005, 33 (2), 328 CrossrefGoogle Scholar

[5] Yu Q.S. et al., Appl. Phys. Lett., 2006, 88(1), 013903 CrossrefGoogle Scholar

[6] Cheng C.et al., Surface & Coatings Technology, 2006, 200, 6659 Google Scholar

[7] Noeske M. et al., International Journal of Adhesion and Adhesives, 2004, 24, 171 CrossrefGoogle Scholar

[8] Gweon B. et al., Appl. Phys. Lett., 2010, 96, 101501 Google Scholar

[9] Tendero C. et al., Spectrochim. Acta B, 2006, 61, 2 Google Scholar

[10] Benedikt J. et al., Appl. Phys. Lett., 2006, 89(25), 251504 CrossrefGoogle Scholar

[11] Duan Y. et al., Rev. Sci. Instrum., 2007, 78(1), 015104 CrossrefGoogle Scholar

[12] Han M.H. et al., Plasma Process. Polym., 2008, 5(9), 861 CrossrefGoogle Scholar

[13] Bornholdt S. et al., Eur. Phys. J. D, 2010, 60, 653 Google Scholar

[14] Yang S.-H. et al., Thin Solid Films, 2009, 517, 5284 Google Scholar

[15] Schafer J. et al., J. Phys. D: Appl. Phys., 2008, 41, 194010 Google Scholar

[16] Schafer J. et al., Eur. Phys. J. D, 2009, 54, 211 CrossrefGoogle Scholar

[17] Ha H.-K. et al., Appl. Phys. Lett., 1996, 68(21), 2965 CrossrefGoogle Scholar

[18] Maruyama K. et al., J. Mater. Sci. Lett., 2001, 20(5), 481 CrossrefGoogle Scholar

[19] Penkov O.V. et al., Thin Solid Films, 2010, 518(22), 6160 CrossrefGoogle Scholar

[20] Suzaki Y. et al., Thin Solid Films, 2006, 506–507, 155 Google Scholar

[21] Kim D.H. et al., J. Electrochem. Soc., 2007, 154(11), H939 CrossrefGoogle Scholar

[22] Yamada T. et al., Appl.Phys. Lett., 2007, 91(5), 051915 CrossrefGoogle Scholar

[23] Ramamoorthy K. et al., Opt. Commun., 2006, 262(1), 91 Google Scholar

[24] Bhosle V.et al., J. Appl. Phys., 2006, 100(3), 033713 CrossrefGoogle Scholar

[25] Volintiru I. et al., J. Appl. Phys., 2007, 102(4), 043709 CrossrefGoogle Scholar

[26] Lin C.-C. et al., Chemical Physics Letters, 2005, 404, 30 Google Scholar

[27] Irzh A., Langmuir, 2010, 26(8), 5976 CrossrefGoogle Scholar

[28] Chang K.-M. et al., Thin Solid Films, 2011, 519, 5114 Google Scholar

[29] Samukawa S.et al., J. Phys. D: Appl. Phys., 2012, 45, 253001 Google Scholar

[30] Foest R. et al., Contrib. Plasma Phys., 2007, 47, 119 Google Scholar

[31] Erikson L., Louer D., Werner P.E., J. Solid State Chem., 1989, 81, 9 Google Scholar

[32] Staehlin W., Ostwald H.R., Acta Crystallographia, 1979, 26, 860 CrossrefGoogle Scholar

[33] Crist B.V., Handbook of Monochromatic Xps Spectra, vol. 2, Commercially Pure Binary Oxides, XPS International Inc., 754 Leona Lane, Mountain View, California, 94040, USA, 1999, 818-827 Google Scholar

[34] Baltrusaitis J. et al., Phys. Chem. Chem. Phys., 2009, 11, 8295-8305 CrossrefGoogle Scholar