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International Journal of Chemical Reactor Engineering

Ed. by de Lasa, Hugo / Xu, Charles Chunbao

IMPACT FACTOR 2017: 0.881
5-year IMPACT FACTOR: 0.908

CiteScore 2017: 0.86

SCImago Journal Rank (SJR) 2017: 0.306
Source Normalized Impact per Paper (SNIP) 2017: 0.503

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Volume 3, Issue 1


Volume 17 (2019)

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Volume 1 (2002)

Modeling of Chemical Vapor Deposition in a Fluidized Bed Reactor Based on Discrete Particle Simulation

Gregor Czok / Mao Ye / J. A. M. Hans Kuipers / Joachim Werther
Published Online: 2005-12-28 | DOI: https://doi.org/10.2202/1542-6580.1234

For better understanding the process of particle coating by chemical vapor deposition (CVD) in the fluidized bed, the simulation of the deposition process was combined with a discrete particle model (DPM). Based on the experimental results of the thermal decomposition of tri-isobutyl-aluminum (TIBA) to produce aluminum onto glass beads, mechanisms on the micro-scale were investigated by single particle tracking. Zones of excessive growth as well as zones of insufficient mixing were identified. In particular, the take-up of aluminum was traced for selected particles that exhibited a large mass of deposited aluminum what in turn provides insight into the homogeneity and quantity of the coating throughout the bed material.

Keywords: Chemical Vapor Deposition; Discrete Particle Modeling; Fluidized Bed Reactor; Particle Coating

About the article

Published Online: 2005-12-28

Citation Information: International Journal of Chemical Reactor Engineering, Volume 3, Issue 1, ISSN (Online) 1542-6580, DOI: https://doi.org/10.2202/1542-6580.1234.

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