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MACRo 2015

Proceedings of the 5th International Conference on Recent Achievements in Mechatronics, Automation, Computer Sciences and Robotics

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Online
ISSN
2247-0948
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The Design of an Automated Plasma Diagnostic System – From Measurement to Signal Processing

Nimród Kutasi
  • Department of Electrical Engineering, Faculty of Technical and Human Sciences, Sapientia-Hungarian University of Transylvania, Tg. Mureş
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/ Lajos Kenéz
  • Department of Electrical Engineering, Faculty of Technical and Human Sciences, Sapientia-Hungarian University of Transylvania, Tg. Mureş
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/ Emőd Filep
  • Department of Electrical Engineering, Faculty of Technical and Human Sciences, Sapientia-Hungarian University of Transylvania, Tg. Mureş
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/ István Szöllösi
  • Department of Electrical Engineering, Faculty of Technical and Human Sciences, Sapientia-Hungarian University of Transylvania, Tg. Mureş
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/ László Jakab Farkas
  • Department of Electrical Engineering, Faculty of Technical and Human Sciences, Sapientia-Hungarian University of Transylvania, Tg. Mureş
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Published Online: 2015-05-09 | DOI: https://doi.org/10.1515/macro-2015-0005

Abstract

The paper deals with the design of a new plasma diagnostic system consisting of a microcontroller based power supply for automatic control of the measurement using Langmuir probe, the communication interface of the power supply and the signal processing program.

The main motivation for the design of the automated plasma diagnostic system was given by our research in different methods of plasma nitriding of steels. During the nitriding process, it is important to achieve information about the plasma, which is the medium where the heat-treatment process is going on. The new diagnostic system is able to perform measurements during the nitriding process, thus we can analyze the plasma at different temperatures and gas mixtures. The obtained voltage-current curves are recorded and transmitted to the computer, where further signal processing is performed. The paper presents the design of the power supply, the measurement results and the developed signal processing software.

Keywords : plasma diagnostic; Langmuir probe; power supply; microcontroller; data acquisition; IIR filtering

References

  • [1] N. Kutasi, L.Kenéz, E.Filep, A.Kelemen, Sz.Mátyási - Pulsed power supply design for DC and Active Screen Plasma Nitriding, - MACRO2013 International Conference on Recent Achievements in Mechatronics, Automation, Computer Science and Robotics Sapientia University, Tg. Mures 2013, pp. 115-122, ISSN 2247 0948.Google Scholar

  • [2] L, Kenez, N.Kutasi, E.Filep, L.F. Jakab, I.A. Szocs - Heat Treatment of 16MnCr steel in a linear non-isoterm plasma reactor, Acta Universitatis Sapientiae, Electrical and Mechanical Engineering, 5 (2013).Google Scholar

  • [3] L. Kenéz, Zsakó Z., E. Filep., Automation of plasma diagnostics measurements performed in a non-isotherm plasma reactor ,Studia Universitatis, Physica, LIII/1 2008.Google Scholar

  • [4] C.Britton Rorabaugh - Digital Filter Designer’s Handbook. TAB Books Division of McQraw-Hill, Inc.Blue Ridge Summit, PA 17294-0850.Google Scholar

  • [5] Vinay K. Ingle, John G. Proakis: Digital Signal Processing Using MATLAB (Bookware Companion), Thomson-Engineering; 2 edition (August 10, 2006), ISBN: 049507311.Google Scholar

About the article

Received: 2015-01-25

Revised: 2015-02-09

Published Online: 2015-05-09

Published in Print: 2015-03-01


Citation Information: MACRo 2015, ISSN (Online) 2247-0948, DOI: https://doi.org/10.1515/macro-2015-0005.

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© 2015. This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License. BY-NC-ND 3.0

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