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Metrology and Measurement Systems

The Journal of Committee on Metrology and Scientific Instrumentation of Polish Academy of Sciences

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Ultrasonic Spectroscopy of Silicon Single Crystal

Petr Sedlak
  • Faculty of Electrical Engineering and Communications, Department of Physics, Brno University of Technology, Technicka 10, Brno 61600, Czech Republic
/ Pavel Tofel
  • Faculty of Electrical Engineering and Communications, Department of Physics, Brno University of Technology, Technicka 10, Brno 61600, Czech Republic
/ Vlasta Sedlakova
  • Faculty of Electrical Engineering and Communications, Department of Physics, Brno University of Technology, Technicka 10, Brno 61600, Czech Republic
/ Jiri Majzner
  • Faculty of Electrical Engineering and Communications, Department of Physics, Brno University of Technology, Technicka 10, Brno 61600, Czech Republic
/ Josef Sikula
  • Faculty of Electrical Engineering and Communications, Department of Physics, Brno University of Technology, Technicka 10, Brno 61600, Czech Republic
/ Lech Hasse
  • Faculty of Electronics, Telecommunications and Informatics, Department of Metrology and Optoelectronics, Gdansk University of Technology, G. Narutowicza 11/12, 80-233 Gdańsk
Published Online: 2011-12-25 | DOI: https://doi.org/10.2478/v10178-011-0059-3

Ultrasonic Spectroscopy of Silicon Single Crystal

Specimens of Si single crystals with different crystal orientation [100] and [110] were studied by Electro-Ultrasonic Spectroscopy (EUS) and Resonant Ultrasonic Spectroscopy (RUS). A silicon single crystal is an anisotropic crystal, so its properties are different in different directions in the material relative to the crystal orientation. EUS is based on interaction of two signals: an electric AC signal and an ultrasonic signal, which are working on different frequencies. The ultrasonic wave affects the charge carriers' transport in the structures and the intermodulation electrical signal which is created due to the interaction between the ultrasonic wave and charge carriers, is proportional to the density of structural defects. RUS enables to measure natural frequencies of free elastic vibrations of a simply shaped specimen by scanning a selected frequency range including the appropriate resonances of the measured specimens.

Keywords: non-destructive testing; silicon single crystal; electro-ultrasonic spectroscopy; resonant ultrasonic spectroscopy

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About the article


Published Online: 2011-12-25

Published in Print: 2011-01-01


Citation Information: Metrology and Measurement Systems, ISSN (Print) 0860-8229, DOI: https://doi.org/10.2478/v10178-011-0059-3. Export Citation

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