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Metrology and Measurement Systems

The Journal of Committee on Metrology and Scientific Instrumentation of Polish Academy of Sciences

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IMPACT FACTOR 2016: 1.598

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2300-1941
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Volume 22, Issue 3 (Sep 2015)

Issues

Construction Of A Piezoelectric-Based Resonance Ceramic Pressure Sensor Designed For High-Temperature Applications

Darko Belavič
  • Corresponding author
  • 1) HIPOT-RR, Šentpeter 18, SI-8222 Otočec, Slovenia
  • 2) Jožef Stefan Institute, Jamova 39, SI-1000 Ljubljana, Slovenia
  • 3) Centre of Excellence NAMASTE, Jamova 39, SI-1000 Ljubljana, Slovenia
  • Email
  • Other articles by this author:
  • De Gruyter OnlineGoogle Scholar
/ Andraž Bradeško
  • 2) Jožef Stefan Institute, Jamova 39, SI-1000 Ljubljana, Slovenia
  • 4) Jožef Stefan International Postgraduate School, Jamova 39, SI-1000 Ljubljana, Slovenia
  • Email
  • Other articles by this author:
  • De Gruyter OnlineGoogle Scholar
/ Marina Santo Zarnik
  • 1) HIPOT-RR, Šentpeter 18, SI-8222 Otočec, Slovenia
  • 2) Jožef Stefan Institute, Jamova 39, SI-1000 Ljubljana, Slovenia
  • Email
  • Other articles by this author:
  • De Gruyter OnlineGoogle Scholar
/ Tadej Rojac
  • 2) Jožef Stefan Institute, Jamova 39, SI-1000 Ljubljana, Slovenia
  • 4) Jožef Stefan International Postgraduate School, Jamova 39, SI-1000 Ljubljana, Slovenia
  • Email
  • Other articles by this author:
  • De Gruyter OnlineGoogle Scholar
Published Online: 2015-09-23 | DOI: https://doi.org/10.1515/mms-2015-0034

Abstract

In this work the design aspects of a piezoelectric-based resonance ceramic pressure sensor made using low-temperature co-fired ceramic (LTCC) technology and designed for high-temperature applications is presented. The basic pressure-sensor structure consists of a circular, edge-clamped, deformable diaphragm that is bonded to a ring, which is part of the rigid ceramic structure. The resonance pressure sensor has an additional element – a piezoelectric actuator – for stimulating oscillation of the diaphragm in the resonance-frequency mode. The natural resonance frequency is dependent on the diaphragm construction (i.e., its materials and geometry) and on the actuator. This resonance frequency then changes due to the static deflection of the diaphragm caused by the applied pressure. The frequency shift is used as the output signal of the piezoelectric resonance pressure sensor and makes it possible to measure the static pressure. The characteristics of the pressure sensor also depend on the temperature, i.e., the temperature affects both the ceramic structure (its material and geometry) and the properties of the actuator. This work is focused on the ceramic structure, while the actuator will be investigated later.

Keywords: LTCC; piezoelectric; pressure sensor

References

  • [1] Partsch, U., Arndt, D., Georgi, H. (2007). A new concept for LTCC-based pressure sensors. Proc. of 3rd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies CICMT 2007, Denver, Colorado, USA, 367–372, CD-ROM.Google Scholar

  • [2] Belavič, D., Hrovat, M., Pavlin, M., Santo Zarnik, M. (2003). Thick-film technology for Sensor Applications. Informacije MIDEM, 33(1), 45–50.Google Scholar

  • [3] Maeder, T., Jacq, C., Briol, H., Ryser, P. (2003). High-strength Ceramic Substrates for Thick-film Sensor Applications. Proc. of 14th European Microelectronics and Packaging Conference EMPC 2003, Frieddrichshafen, Germany, 133–140, CD-ROM.Google Scholar

  • [4] Belavič, D., Hrovat, M., Holc, J., Santo Zarnik, M., Kosec, M., Pavlin, M. (2007). The application of thick-film technology in C-MEMS. Journal Electroceramics, 19, 363–368.Google Scholar

  • [5] Belavič, D., Santo Zarnik, M., Hrovat, M., Maček, S., Pavlin, M., Jerlah, M., Holc, J., Drnovšek, S., Cilenšek, J., Kosec, M. (2007). Benchmarking different types of thick-film pressure sensors. Proc. of 3rd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies CICMT 2007, Denver, Colorado, USA, 278–285, CD-ROM.Google Scholar

  • [6] Belavič, D. (2008). Piezoresistive, piezoelectric and capacitive pressure sensors. Tutorial: Ceramic pressure sensors – from materials to devices. Proc. of 4th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies CICMT 2008, Munich, Germany, CDROM.Google Scholar

  • [7] Santo Zarnik, M., Belavič, D., Maček, S., Holc, J. (2009) Feasibility study of a thick-film PZT resonant pressure sensor made on a prefired 3D LTCC structure. International journal of applied ceramic technology, 6(1), 9–17.Web of ScienceGoogle Scholar

  • [8] Golonka, L.J., Malecha, K. (2012). LTCC Fluidic Microsystems. Informacije MIDEM, 42(4), 225–233.Google Scholar

  • [9] Kita, J., Moos, R. (2003). Development of LTCC-materials and Their Applications: an Overview. Informacije MIDEM, 38(4), 219–224.Google Scholar

  • [10] Belavič, D., Hrovat, M., Santo Zarnik, M., Makarovič, K, Benčan, A., Holc, J., Dolanc, G., Fajdiga, P., Hočevar, S., Pohar, A., Kovač, F., Hodnik, M., Konda, A., Jordan, B., Sedlakova, V., Sikula, J., Malič, B. (2014). An overview of LTCC based ceramic microsystems: from simple pressure sensors to complex chemical reactors. Proc. of EDS’ 14, Electronic Devices and Systems IMAPS CS International Conference 2014, Brno, Czech Republic, XVI–XXI, CD-ROM.Google Scholar

  • [11] Santo Zarnik, M., Belavič, D., Sedlakova, V., Sikula, J., Majzner, J., Sedlak, P. (2012). Estimation of the long-term stability of piezoresistive LTCC pressure sensors by means of low-frequency noise measurements. Sensors and actuators A Physical, 199, 334–343.Google Scholar

  • [12] Lide, R.D. (2005). Handbook of chemistry and Physics. Boca Raton, CRC Press.Google Scholar

About the article

Received: 2015-02-27

Accepted: 2015-05-17

Published Online: 2015-09-23

Published in Print: 2015-09-01


Citation Information: Metrology and Measurement Systems, ISSN (Online) 2300-1941, DOI: https://doi.org/10.1515/mms-2015-0034.

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