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Materials Science-Poland

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IMPACT FACTOR 2016: 0.610

CiteScore 2016: 0.64

SCImago Journal Rank (SJR) 2015: 0.226
Source Normalized Impact per Paper (SNIP) 2015: 0.431

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2083-134X
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Temperature dependence of stress in CVD diamond films studied by Raman spectroscopy

Anna Dychalska
  • Faculty of Technical Physics, Poznan University of Technology, Piotrowo 3, 60-965 Poznan, Poland
  • Other articles by this author:
  • De Gruyter OnlineGoogle Scholar
/ Kazimierz Fabisiak
  • Institute of Physics, Kazimierz Wielki University, Powstańców Wielkopolskich 2, 85-090 Bydgoszcz, Poland
  • Medical Physics Department, Oncology Center, I. Romanowskiej 2, 85-796 Bydgoszcz, Poland
  • Other articles by this author:
  • De Gruyter OnlineGoogle Scholar
/ Kazimierz Paprocki
  • Institute of Physics, Kazimierz Wielki University, Powstańców Wielkopolskich 2, 85-090 Bydgoszcz, Poland
  • Other articles by this author:
  • De Gruyter OnlineGoogle Scholar
/ Alina Dudkowiak
  • Faculty of Technical Physics, Poznan University of Technology, Piotrowo 3, 60-965 Poznan, Poland
  • Other articles by this author:
  • De Gruyter OnlineGoogle Scholar
/ Mirosław Szybowicz
Published Online: 2016-08-30 | DOI: https://doi.org/10.1515/msp-2015-0064

Abstract

Evolution of residual stress and its components with increasing temperature in chemical vapor deposited (CVD) diamond films has a crucial impact on their high temperature applications. In this work we investigated temperature dependence of stress in CVD diamond film deposited on Si(100) substrate in the temperature range of 30 °C to 480 °C by Raman mapping measurement. Raman shift of the characteristic diamond band peaked at 1332 cm-1 was studied to evaluate the residual stress distribution at the diamond surface. A new approach was applied to calculate thermal stress evolution with increasing tempera­ture by using two commonly known equations. Comparison of the residts obtained from the two methods was presented. The intrinsic stress component was calculated from the difference between average values of residual and thermal stress and then its temperature dependence was discussed.

Keywords: Raman spectroscopy; stress; diamond structure; CVD diamond films

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About the article

Received: 2015-01-12

Accepted: 2015-03-28

Published Online: 2016-08-30

Published in Print: 2015-09-01


Citation Information: Materials Science-Poland, ISSN (Online) 2083-134X, DOI: https://doi.org/10.1515/msp-2015-0064.

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© 2016. This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License. BY-NC-ND 3.0

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