Jump to ContentJump to Main Navigation
Show Summary Details
More options …

Measurement Science Review

The Journal of Institute of Measurement Science of Slovak Academy of Sciences

6 Issues per year


IMPACT FACTOR 2017: 1.345
5-year IMPACT FACTOR: 1.253



CiteScore 2017: 1.61

SCImago Journal Rank (SJR) 2017: 0.441
Source Normalized Impact per Paper (SNIP) 2017: 0.936

Open Access
Online
ISSN
1335-8871
See all formats and pricing
More options …
Volume 18, Issue 6

Issues

Electrostatic Force Microscopy Measurement System for Micro-topography of Non-conductive Devices

Gaofa He
  • School of Mechanical and Power Engineering, Chongqing University of Science and Technology, Chongqing 401331, China
  • Email
  • Other articles by this author:
  • De Gruyter OnlineGoogle Scholar
/ Jie Meng
  • School of Mechanical and Power Engineering, Chongqing University of Science and Technology, Chongqing 401331, China
  • Other articles by this author:
  • De Gruyter OnlineGoogle Scholar
/ Renbing Tan
  • School of Mathematics and Physics, Chongqing University of Science and Technology, Chongqing 401331, China
  • Other articles by this author:
  • De Gruyter OnlineGoogle Scholar
/ Peng Zhong
  • School of Mechanical and Power Engineering, Chongqing University of Science and Technology, Chongqing 401331, China
  • Other articles by this author:
  • De Gruyter OnlineGoogle Scholar
Published Online: 2018-11-30 | DOI: https://doi.org/10.1515/msr-2018-0035

Abstract

A home-made electrostatic force microscopy (EFM) system is described which is directed toward assessment of the microscopic geometry of the surface of specimens made of non-conductive material with a large thickness. This system is based on the variation in the electrostatic force between the conductive probe and the non-conductive specimen in order to get its surface morphology. First, based on the principle of dielectric polarization, the variation rules of the electrostatic force between the charged probe and the non-conductive specimen were studied. Later, a special tuning fork resonant probe unit made of quartz crystal was fabricated for measurement of the electrostatic force, and the scanning probe microscopic system in the constant force mode was constructed to characterize the three-dimensional micro-topography of the surface of the specimen. Finally, this system was used to perform scanning measurement experiments on the indented surface of the specimen made of the polyvinyl chloride (PVC) material with thickness 3 mm. In the present experimental system, when the external voltage was 100 V and the distance from the probe tip to the specimen surface approximately 100 nm, the variance in the resonant frequency of the probe unit was around 0.5 Hz. These results indicate that this home-made EFM system can effectively characterize the micro-topography of the non-conductive specimen with very large thickness which is above several millimeters.

Keywords: Electrostatic force microscopy; surface morphology; precise measurement; scanning probe microscopy

References

  • [1] Ulcinas, A., Vaitekonis, S. (2017). Rotational scanning atomic force microscopy. Nanotechnology, 28 (10), 10LT02.Google Scholar

  • [2] Bozchalooi, I.S., Houck, A.C., Alghamdi, J.M., Youceftoumi, K. (2016). Design and control of multiactuated atomic force microscope for large-range and high-speed imaging. Ultramicroscopy,160, 213-224.Google Scholar

  • [3] Maroufi, M., Fowler, A.G., Bazaei, A., Moheimani, S.O. (2015). High-stroke silicon-on-insulator MEMS nanopositioner: Control design for non-raster scan atomic force microscopy. Review of Scientific Instruments, 86 (2), 023705.Google Scholar

  • [4] Barth, C., Foster, A.S., Henry, C.R., Shluger, A.L. (2011). Recent trends in surface characterization and chemistry with high - resolution scanning force methods. Advanced Materials, 23 (4), 477-501.Google Scholar

  • [5] Khoury, D.E., Arinero, R., Castellon, J., Laurentie, J., Fedorenko, V., Bechelany, M., Frechette, M.F. (2016). Detection of shell coatings from core-shell like dielectric nanoparticles with electrostatic force microscopy. In Conference on Electrical Insulation and Dielectric Phenomena. IEEE, 755-758.Google Scholar

  • [6] Martin, Y., Williams, C.C., Wickramasinghe, H.K. (1987). Atomic force microscope–force mapping and profiling on a sub 100-Å scale. Journal of Applied Physics, 61 (5), 4723-4729.Google Scholar

  • [7] Stern, J.E., Terris, B.D., Mamin, H.J., Rugar, D. (1988). Deposition and imaging of localized charge on insulator surfaces using a force microscope. Applied Physics Letters, 53, 2717-2719.Google Scholar

  • [8] Girard, P. (2001). Electrostatic force microscopy principles and some applications to semiconductors. Nanotechnology, 12, 485-490.Google Scholar

  • [9] Zhao, H.B., Han, L., Wang, X.F. (2007). A new measurement system based on EFM for charges on dielectric surface in micro-nanometre scale. Insulating Materials, 40 (2), 66-68. (in Chinese)Google Scholar

  • [10] Martin, Y., Abraham, D.W., Wickramasinghe, H.K. (1988). High resolution capacitance measurement and potentiometry by force microscopy. Applied Physics Letters, 52, 1103-1105.Google Scholar

  • [11] Leveque, G., Bonnet, J., Tahraoui, A., Girard, P. (1998). Observation of surface potential at nanometer scale by electrostatic force microscopy (EFM) with large signals. Materials Science and Engineering B, 51 (1-3), 197-201.Google Scholar

  • [12] Sun, Z., Wang, X., Han, B. (2013). Dielectric property of binary phase composite and its interface investigated by electric force microscope. Acta Physica Sinica, 62 (03), 95-100. (in Chinese)Google Scholar

  • [13] Villeneuvefaure, C., Boudou, L., Makasheva, K., Teyssedre, G. (2017). Methodology for extraction of space charge density profiles at nanoscale from Kelvin probe force microscopy measurements. Nanotechnology, 28 (50), 505701.Google Scholar

  • [14] Boularas, A., Baudoin, F., Villeneuvefaure, C., Clain, S., Teyssedre, G. (2014). Multi-dimensional modelling of electrostatic force distance curve over dielectric surface: Influence of tip geometry and correlation with experiment. Journal of Applied Physics, 116 (8).Google Scholar

  • [15] Gramse, G., Gomila, G., Fumagalli, L. (2012). Quantifying the dielectric constant of thick insulators by electrostatic force microscopy: Effects of the microscopic parts of the probe. Nanotechnology, 23 (20), 205703.Google Scholar

  • [16] Riedel, C., Alegria, A., Schwartz, G.A., Colmenero, J., Saenz, J.J. (2011). Numerical study of the lateral resolution in electrostatic force microscopy for dielectric samples. Nanotechnology, 22 (28), 285705.Google Scholar

  • [17] Gomila, G., Gramse, G., Fumagalli, L. (2014). Finitesize effects and analytical modeling of electrostatic force microscopy applied to dielectric films. Nanotechnology, 25 (25), 255702.Google Scholar

  • [18] Dunaevskiy, M.S., Alekseev, P.A., Girard, P., Lashkul, A.V., Lahderanta, E., Titkov, A.N. (2012). Analysis of the lateral resolution of electrostatic force gradient microscopy. Journal of Applied Physics, 112 (6).Google Scholar

  • [19] Gao, W., Goto, S., Hosobuchi, K., Ito, S., Shimizu, Y. (2012). A noncontact scanning electrostatic force microscope for surface profile measurement. CIRP Annals: Manufacturing Technology, 61 (1), 471-474.Google Scholar

  • [20] He, G., Jia, Z., Ito, S., Shimizu, Y., Gao, W. (2014). Experiment of polarization forces in scanning electrostatic force microscopy for measuring surface profile of dielectric. The Open Electrical & Electronic Engineering Journal, 8 (1), 342-347.Google Scholar

  • [21] Goto, S., Minglei, L.I., Ito, S., Shimizu, Y., Gao, W. (2016). A highly stable noncontact SPM for surface profile measurement and its application to insulating samples. Journal of Advanced Mechanical Design Systems and Manufacturing, 10 (5).Google Scholar

About the article

Received: 2018-07-19

Accepted: 2018-11-05

Published Online: 2018-11-30

Published in Print: 2018-10-01


Citation Information: Measurement Science Review, Volume 18, Issue 6, Pages 256–261, ISSN (Online) 1335-8871, DOI: https://doi.org/10.1515/msr-2018-0035.

Export Citation

© 2018 Gaofa He et al., published by Sciendo. This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License. BY-NC-ND 3.0

Comments (0)

Please log in or register to comment.
Log in