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Extension of solid immersion lens technology to super-resolution Raman microscopy

Edwin Ostertag
  • Corresponding author
  • Process Analysis & Technology, Reutlingen Research Institute, Reutlingen University, Alteburgstr. 150, D-72762 Reutlingen
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/ Anita Lorenz
  • Corresponding author
  • Process Analysis & Technology, Reutlingen Research Institute, Reutlingen University, Alteburgstr. 150, D-72762 Reutlingen
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/ Karsten Rebner
  • Corresponding author
  • Process Analysis & Technology, Reutlingen Research Institute, Reutlingen University, Alteburgstr. 150, D-72762 Reutlingen
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/ Rudolf W. Kessler
  • Corresponding author
  • Process Analysis & Technology, Reutlingen Research Institute, Reutlingen University, Alteburgstr. 150, D-72762 Reutlingen
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/ Alfred J. Meixner
  • Corresponding author
  • Institute for Physical and Theoretical Chemistry, Auf der Morgenstelle 18, University of Tübingen, D-72076 Tübingen
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Published Online: 2014-11-22 | DOI: https://doi.org/10.2478/nansp-2014-0001


Scanning Near-Field Optical Microscopy (SNOM) has developed during recent decades into a valuable tool to optically image the surface topology of materials with super-resolution. With aperture-based SNOM systems, the resolution scales with the size of the aperture, but also limits the sensitivity of the detection and thus the application for spectroscopic techniques like Raman SNOM. In this paper we report the extension of solid immersion lens (SIL) technology to Raman SNOM. The hemispherical SIL with a tip on the bottom acts as an apertureless dielectric nanoprobe for simultaneously acquiring topographic and spectroscopic information. The SIL is placed between the sample and the microscope objective of a confocal Raman microscope. The lateral resolution in the Raman mode is validated with a cross section of a semiconductor layer system and, at approximately 180 nm, is beyond the classical diffraction limit of Abbe.

Keywords: solid immersion lens; near-field; SNOM; nanoscopy; super-resolution; Raman spectroscopy; diffraction limit; chemical imaging; BAM L-200 reference pattern


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About the article

Received: 2014-06-22

Accepted: 2014-10-08

Published Online: 2014-11-22

Citation Information: Nanospectroscopy, Volume 1, Issue 1, ISSN (Online) 2300-3537, DOI: https://doi.org/10.2478/nansp-2014-0001.

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© 2014 Edwin Ostertag et al.. This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License. BY-NC-ND 3.0

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