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Pure and Applied Chemistry

The Scientific Journal of IUPAC

Ed. by Burrows, Hugh / Weir, Ron / Stohner, Jürgen

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In This Section
Volume 57, Issue 9 (Jan 1985)

Issues

The inductively coupled R.F. (radio frequency) plasma

M. I. Boulos
Published Online: 2009-01-01 | DOI: https://doi.org/10.1351/pac198557091321

Conference

International Symposium on Plasma Chemistry, International Symposium on Plasma Chemistry, ISPC, Plasma Chemistry, Seventh, Eindhoven, The Netherlands, 1985-07-01–1985-07-05

About the article

Published Online: 2009-01-01

Published in Print: 1985-01-01



Citation Information: Pure and Applied Chemistry, ISSN (Online) 1365-3075, ISSN (Print) 0033-4545, DOI: https://doi.org/10.1351/pac198557091321. Export Citation

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